Volume 435; Issue 1-2

Main
Thin Solid Films
Volume 435; Issue 1-2

Thin Solid Films

Volume 435; Issue 1-2

1

On mechanisms of argon addition influence on etching rate in chlorine plasma

A.M. Efremov, Dong-Pyo Kim, Chang-Il Kim

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 118 KB

english, 2003

2

Post-etch residue removal in BCB/Cu interconnection structure

Hong young-tack, Young il Kim, Moon-chul Lee, Park sunhee, Shim dongha, C.M Park, Byungyou Hong, Yonghan Roh, Sung hae Jung, Insang Song

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 642 KB

english, 2003

3

3D modeling of plasma–particle interactions in a plasma jet under dense loading conditions

K. Ramachandran, N. Kikukawa, H. Nishiyama

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 428 KB

english, 2003

4

Encapsulation of cesium inside single-walled carbon nanotubes by plasma-ion irradiation method

Goo-Hwan Jeong, A.A. Farajian, Takamichi Hirata, Rikizo Hatakeyama, Kazuyuki Tohji, T.M. Briere, Hiroshi Mizuseki, Yoshiyuki Kawazoe

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 1.29 MB

english, 2003

5

The distribution of Cu and resultant resistivity change in sputter deposited Al–Cu film as a conductive layer

D.H. Lee, D.M. Jeon, S.Y. Yoon, J.P. Lee, B.G. Kim, S.J. Suh

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 802 KB

english, 2003

6

Optical properties of pure and Al doped ZnO thin films fabricated with plasma produced by excimer laser

F.K. Shan, Y.S. Yu

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 278 KB

english, 2003

7

Deposition of Ti thin film using the magnetron sputtering method

Min J. Jung, Kyung H. Nam, Leonid R. Shaginyan, Jeon G. Han

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 884 KB

english, 2003

8

Nano- and micro-tribological characteristics of amorphous carbon films prepared by shielded arc ion plating

Kyung-Hwang Lee, Hiroyuki Sugimura, Yasushi Inoue, Osamu Takai

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 258 KB

english, 2003

9

Deposition of ZnO thin films by magnetron sputtering for a film bulk acoustic resonator

Jae Bin Lee, Hyeong Joon Kim, Soo Gil Kim, Cheol Seong Hwang, Seong-Hyeon Hong, Young Hwa Shin, Neung Hun Lee

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 209 KB

english, 2003

10

MgO deposition using reactive ionized sputtering

Y. Matsuda, Y. Koyama, K. Tashiro, H. Fujiyama

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 240 KB

english, 2003

11

Preparation of hard and ultra water-repellent silicon oxide films by microwave plasma-enhanced CVD at low substrate temperatures

Yunying Wu, Hiroyuki Sugimura, Yasushi Inoue, Osamu Takai

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 609 KB

english, 2003

12

Relationship between residual stress and structural properties of AlN films deposited by r.f. reactive sputtering

Si-Hyung Lee, Ki Hyun Yoon, Deok-Soo Cheong, Jeon-Kook Lee

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 507 KB

english, 2003

13

The influence of carbon content in carbon-doped silicon oxide film by thermal treatment

Chang Sil Yang, Young-Hun Yu, Kwang-Man Lee, Heon-Ju Lee, Chi Kyu Choi

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 512 KB

english, 2003

14

Growth temperature dependence of structural properties for AlN films grown on (Mn,Zn)Fe2O4 substrates

J. Ohta, H. Fujioka, S. Ito, M. Oshima

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 482 KB

english, 2003

15

Laser-induced fluorescence diagnosis of plasma processing sources

R. McWilliams, D. Edrich

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 98 KB

english, 2003

16

Growth of AlN on lattice-matched MnO substrates by pulsed laser deposition

S. Ito, H. Fujioka, J. Ohta, H. Takahashi, M. Oshima

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 183 KB

english, 2003

17

Structure of metal doped TiO2 particles produced by RF plasma

Atsushi Takeda, Takeshi Sato, Chihiro Kaito, Satoo Kaneko

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 827 KB

english, 2003

18

Improvement of electrochemical properties of MCMB powders through reactive ICP modification

H. Tanaka, T. Osawa, Y. Moriyoshi, M. Kurihara, S. Maruyama, T. Ishigaki, H. Kanda

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 470 KB

english, 2003

19

Reduction of perfluorocompound emissions by microwave plasma-torch

Yong C. Hong, Hyoung S. Kim, Han S. Uhm

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 273 KB

english, 2003

20

Thermal plasma treatment of waste ion-exchange resins doped with metals

Atsushi Nezu, Tatsuhiko Morishima, Takayuki Watanabe

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 732 KB

english, 2003

21

Effects of direct-current bias on the carbonization of Si(100) at low temperatures using electron cyclotron resonance chemical vapor deposition

Jae Hwack Pyo, Ki-Woong Whang

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 427 KB

english, 2003

22

Numerical simulation of a potassium-seeded turbulent RF inductively coupled plasma with particles

Masaya Shigeta, Takehiko Sato, Hideya Nishiyama

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 300 KB

english, 2003

23

Behavior of hydride species on Si surface during methane plasma irradiation investigated by in-situ infrared spectroscopy

Masanori Shinohara, Takayuki Kuwano, Yasuo Kimura, Michio Niwano

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 197 KB

english, 2003

24

Formation mechanism of electrically conductive nanoparticles by induction thermal plasmas

Takayuki Watanabe, Atsushi Nezu, Yoshiyuki Abe, Yoshiro Ishii, Kenji Adachi

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 565 KB

english, 2003

25

Plasma applications for biochip technology

T. Ichiki, Y. Sugiyama, R. Taura, T. Koidesawa, Y. Horiike

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 1.24 MB

english, 2003

26

Rapid synthesis of ferrite particles from powder mixtures using thermal plasma processing

Osamu Fukumasa, Takamasa Fujiwara

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 983 KB

english, 2003

27

Linear internal inductively coupled plasma (ICP) source with magnetic fields for large area processing

Y.J. Lee, K.N. Kim, B.K. Song, G.Y. Yeom

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 258 KB

english, 2003

28

High-rate deposition of highly crystallized silicon films from inductively coupled plasma

Nihan Kosku, Fumitada Kurisu, Miwako Takegoshi, Hiroshi Takahashi, Seiichi Miyazaki

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 329 KB

english, 2003

29

Theoretical investigation of the evolution of electron energy distribution functions in inductively coupled discharges

S.S. Kim, Chin Wook Chung, H.Y. Chang

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 163 KB

english, 2003

30

Deposition of aluminum-doped zinc oxide films by RF magnetron sputtering and study of their structural, electrical and optical properties

S.H. Jeong, J.W. Lee, S.B. Lee, J.H. Boo

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 143 KB

english, 2003

31

Pair-ion plasma generation and fullerene-dimer formation

Wataru Oohara, Rikizo Hatakeyama

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 235 KB

english, 2003

32

Steam plasma reforming using microwave discharge

Hidetoshi Sekiguchi, Yoshihiro Mori

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 578 KB

english, 2003

33

Development of high frequency micro plasma source in a magnetic field

Masanori Matsushita, Yoshinobu Matsuda, Hiroshi Fujiyama

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 110 KB

english, 2003

34

Synthesis of p-type ZnO thin films using co-doping techniques based on KrF excimer laser deposition

Tamiko Ohshima, Tomoaki Ikegami, Kenji Ebihara, Jes Asmussen, RajK. Thareja

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 504 KB

english, 2003

35

Application feasibility of high-performance-type plasma jet device to various material processes

Katashi Osaki, Satoru Fujimoto, Osamu Fukumasa

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 563 KB

english, 2003

36

A hybrid solution of non-uniform planar-type inductively coupled plasma-heating problem

N.S. Yoon, B.H. Park, J.H. Kim, Y.H. Shin

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 153 KB

english, 2003

37

Electron-temperature dependence of nitrogen dissociation in 915 MHz ECR plasma

N. Itagaki, S. Iwata, K. Muta, A. Yonesu, S. Kawakami, N. Ishii, Y. Kawai

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 138 KB

english, 2003

38

Increase of cleaning rate and reduction in global warming effect during C4F8O/O2 remote plasma cleaning of silicon nitride by adding NO and N2O

C.H. Oh, N.-E. Lee, J.H. Kim, G.Y. Yeom, S.S. Yoon, T.K. Kwon

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 147 KB

english, 2003

39

Effects of scanning path on the deposition process in rapid plasma spray tooling: Modeling by homogenization theory

Guilan Wang, Yanxiang Chen, Haiou Zhang

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 1.13 MB

english, 2003

40

Characteristics of AlN buffer layers for GaAs epitaxial growths on MnZn ferrite substrates

K. Hirato, H. Fujioka, S. Ito, J. Ohta, M. Oshima

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 480 KB

english, 2003

41

Plasma oxidation and magnetoresistance in tunnel junction device

D.M. Jeon, J.W. Park, Y.S. Kim, D.H. Yoon, S.J. Suh

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 654 KB

english, 2003

42

Diamond thick film deposition in wafer scale using single-cathode direct current plasma assisted chemical vapour deposition

Wook-Seong Lee, Young-Joon Baik, Ki-Woong Chae

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 804 KB

english, 2003

43

Hydration of r.f. magnetron sputtered MgO thin films for a protective layer in AC plasma display panel

Jung Heon Lee, Jae Hwan Eun, Sun Young Park, Soo Gil Kim, Hyeong Joon Kim

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 1.12 MB

english, 2003

44

Template-directed synthesis of carbon nanowires using pulsed corona plasma at atmospheric pressure

Ming-wei Li, Zheng Hu, Xi-zhang Wang, Qiang Wu, Yi Chen

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 597 KB

english, 2003

45

Author Index

Journal:

Thin Solid Films

Year:

2003

File:

PDF, 32 KB

2003

46

Subject Index

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 61 KB

english, 2003

47

Plasma-induced damage in PZT thin films etched by inductively coupled plasma

Myoung-Gu Kang, Kyoung-Tae Kim, Chang-Il Kim

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 340 KB

english, 2003

48

Comparison of the removal efficiency for organic contaminants on silicon wafers stored in plastic boxes between UV/O3 and ECR oxygen plasma cleaning methods

Kyunsuk Choi, Tae-Jong Eom, Chongmu Lee

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 502 KB

english, 2003

49

High rate sapphire (Al2O3) etching in inductively coupled plasmas using axial external magnetic field

D.W. Kim, C.H. Jeong, K.N. Kim, H.Y. Lee, H.S. Kim, Y.J. Sung, G.Y. Yeom

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 302 KB

english, 2003

50

Growth characteristics of carbon nanotubes via aluminum nanopore template on Si substrate using PECVD

Mun Ja Kim, Jong Hyung Choi, Jong Bae Park, Seong Kyu Kim, Ji-Beom Yoo, Chong-Yun Park

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 2.77 MB

english, 2003

51

Density control of carbon nanotubes using NH3 plasma treatment of Ni catalyst layer

Jong Hyung Choi, Tae Young Lee, Sun Hong Choi, Jae-Hee Han, Ji-Beom Yoo, Chong-Yun Park, Taewon Jung, SeGi Yu, Whikun Yi, In Taek Han, J.M. Kim

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 2.63 MB

english, 2003

52

Fabrication and characterization of phosphorus-implanted mold-type diamond field-emitter arrays

Euo Sik Cho, Sang Jik Kwon, Hwi Chan Yang, Hyung Soo Uh, Yeo Hwan Kim, Byung-Gook Park, Jong Duk Lee

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 958 KB

english, 2003

53

Fabrication of CuIn1−xGaxSe2 thin film solar cells by sputtering and selenization process

Ho Keun Song, Jae Kyeong Jeong, Hyeong Joon Kim, Suk Ki Kim, Kyung Hoon Yoon

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 2.27 MB

english, 2003

54

The protection of MgO film against hydration by using Al2O3 capping layer deposited by magnetron sputtering method

Jae Hwan Eun, Jung Heon Lee, Soo Gil Kim, Myung Yoon Um, Sun Young Park, Hyeong Joon Kim

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 1.03 MB

english, 2003

55

Dynamic responses of Ar–CO2 and Ar–N2 induction thermal plasmas in pulse amplitude modulation approach

M.M. Hossain, Y. Tanaka, T. Sakuta

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 453 KB

english, 2003

56

Secondary electron ejection from the MgO protection layer in AC plasma display panels for low-energy noble ions

S.K. Lee, J.H. Kim, J. Lee, K.-W. Whang

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 97 KB

english, 2003

57

Volume and heterogeneous chemistry of active species in chlorine plasma

A.M. Efremov, Dong-Pyo Kim, Chang-Il Kim

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 122 KB

english, 2003

58

Effect of time-varying axial magnetic field on high aspect ratio contact hole etching

Ho-Young Song, Yong-Hee Choi, Beom-hoan O, Se-Geun Park, Jin-Sung Oh, Jin-Woong Kim

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 649 KB

english, 2003

59

Study on self-bias voltage induced on the substrate by r.f. bias power in a high density plasma

Jung-Hyung Kim, Yong-Hyun Shin, Kwang-Hwa Chung

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 194 KB

english, 2003

60

Effect of additives on photocatalytic activity of titanium dioxide powders synthesized by thermal plasma

Seung-Min Oh, Seung-Se Kim, Ji Eun Lee, Takamasa Ishigaki, Dong-Wha Park

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 704 KB

english, 2003

61

Development of a large-area, multi-helicon rectangular plasma source for TFT-LCD processing

Yoon Jae Kim, Seung Ho Han, Won Hwang, Y.S. Hwang

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 756 KB

english, 2003

62

Square pattern formation in a gas discharge system

Lifang Dong, Zengqian Yin, Long Wang, Guangsheng Fu, Yafeng He, Zhifang Chai, Xuechen Li

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 309 KB

english, 2003

63

Device characteristics of AlGaAs/InGaAs HEMTs fabricated by inductively coupled plasma etching

Jin-Hee Lee, Hyung-Sup Yoon, Jae Yeob Shim, Hae-Chun Kim

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 432 KB

english, 2003

64

Improvement of the biocompatibility and mechanical properties of surgical tools with TiN coating by PACVD

Jeongwon Park, Duk-Jae Kim, Yoon-Kee Kim, Keun-Ho Lee, Ki-Hoon Lee, Hoon Lee, Saeyoung Ahn

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 416 KB

english, 2003

65

The characterization of structure-tailored plasma films deposited from the pulsed RF discharge

Jing Zhang, Xiangfen Feng, Hankun Xie, Yunchen Shi, Tianshu Pu, Ying Guo

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 814 KB

english, 2003

66

Preface

Yasuhiro Horiike

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 112 KB

english, 2003