Study on self-bias voltage induced on the substrate by r.f....

Thin Solid Films 2003 Vol. 435; Iss. 1-2

Study on self-bias voltage induced on the substrate by r.f. bias power in a high density plasma

Jung-Hyung Kim, Yong-Hyun Shin, Kwang-Hwa Chung
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Volume:
435
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(03)00385-7
File:
PDF, 194 KB
english, 2003
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