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Ion projection lithography for resistless patterning of thin magnetic films
W.H. Bruenger, M. Torkler, C. Dzionk, B.D. Terris, L. Folks, D. Weller, H. Rothuizen, P. Vettiger, G. Stangl, W. FallmannVolume:
53
Year:
2000
Language:
english
Pages:
4
DOI:
10.1016/s0167-9317(00)00410-x
File:
PDF, 466 KB
english, 2000