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Techniques for analysing nanotopography on polished silicon wafers
T. Müller, R. Kumpe, H.A. Gerber, R. Schmolke, F. Passek, P. WagnerVolume:
56
Year:
2001
Language:
english
Pages:
5
DOI:
10.1016/s0167-9317(00)00513-x
File:
PDF, 487 KB
english, 2001