![](/img/cover-not-exists.png)
Plasma immersion ion implantation based on glow discharge with electrostatic confinement of electrons
Alexander MetelVolume:
156
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(02)00070-1
File:
PDF, 169 KB
english, 2002