Volume 156; Issue 1-3

Surface and Coatings Technology

Volume 156; Issue 1-3
1

Shunting arc plasma generation and ion extraction

Year:
2002
Language:
english
File:
PDF, 561 KB
english, 2002
5

Ion density variation effects in plasma source ion implantation

Year:
2002
Language:
english
File:
PDF, 77 KB
english, 2002
6

Simulation of sheath and presheath dynamics in PIII

Year:
2002
Language:
english
File:
PDF, 807 KB
english, 2002
8

Effective nitriding of steels outside low-pressure microwave discharges

Year:
2002
Language:
english
File:
PDF, 86 KB
english, 2002
9

In situ stress measurements during low-energy nitriding of stainless steel

Year:
2002
Language:
english
File:
PDF, 133 KB
english, 2002
13

Controlling synthesis of Ti–O/Ti–N gradient films by PIII

Year:
2002
Language:
english
File:
PDF, 560 KB
english, 2002
20

Plasma doping for the fabrication of ultra-shallow junctions

Year:
2002
Language:
english
File:
PDF, 1.23 MB
english, 2002
26

Conformal ion implantation

Year:
2002
Language:
english
File:
PDF, 102 KB
english, 2002
30

Generation of high voltage pulses for PBII devices

Year:
2002
Language:
english
File:
PDF, 115 KB
english, 2002
32

Two switch high voltage modulator for plasma-based ion implantation

Year:
2002
Language:
english
File:
PDF, 240 KB
english, 2002
36

Lateral texture evolution during formation of TiN by MePIIID

Year:
2002
Language:
english
File:
PDF, 794 KB
english, 2002
37

Active charge control in PIII—enlarging the process space

Year:
2002
Language:
english
File:
PDF, 150 KB
english, 2002
42

Author Index of Volume 156

Year:
2002
File:
PDF, 38 KB
2002
43

Subject Index of Volume 156

Year:
2002
Language:
english
File:
PDF, 70 KB
english, 2002
44

Preface

Year:
2002
Language:
english
File:
PDF, 41 KB
english, 2002
46

Some fundamental problems in low-energy ion implantation

Year:
2002
Language:
english
File:
PDF, 959 KB
english, 2002
47

Processing considerations with plasma immersion ion implantation

Year:
2002
Language:
english
File:
PDF, 788 KB
english, 2002
54

In vivo study of Ti–O thin film fabricated by PIII

Year:
2002
Language:
english
File:
PDF, 1.14 MB
english, 2002
57

Growth of the carbide, nitride and oxide of silicon by plasma immersion ion implantation

Year:
2002
Language:
english
File:
PDF, 195 KB
english, 2002
58

The fabrication of advanced transistors with plasma doping

Year:
2002
Language:
english
File:
PDF, 160 KB
english, 2002
59

Mechanical and chemical properties of PBIID-treated plastics

Year:
2002
Language:
english
File:
PDF, 761 KB
english, 2002
60

Microstructure of plasma nitrided layers on aluminium

Year:
2002
Language:
english
File:
PDF, 1.32 MB
english, 2002