Nitrogen profiles in materials implanted via plasma-based...

Surface and Coatings Technology 2002 Vol. 156; Iss. 1-3

Nitrogen profiles in materials implanted via plasma-based ion implantation

A Lacoste, S Béchu, Y Arnal, J Pelletier, C Vallée, R Gouttebaron, J.P Stoquert
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Volume:
156
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(02)00076-2
File:
PDF, 144 KB
english, 2002
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