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Volume 59; Issue 1
Main
Journal of the Vacuum Society of Japan
Volume 59; Issue 1
Journal of the Vacuum Society of Japan
Volume 59; Issue 1
1
10.3131/jvsj2.59.10
FUKUTANI, K.
Journal:
Journal of the Vacuum Society of Japan
Year:
2016
File:
PDF, 143 KB
Your tags:
2016
2
Report on the 55th Vacuum Summer School
KAMIYA, Junichiro
Journal:
Journal of the Vacuum Society of Japan
Year:
2016
File:
PDF, 361 KB
Your tags:
2016
3
10.3131/jvsj2.59.2
NAKAYAMA, K.
Journal:
Journal of the Vacuum Society of Japan
Year:
2016
File:
PDF, 182 KB
Your tags:
2016
4
10.3131/jvsj2.59.8
TOSA, M.
Journal:
Journal of the Vacuum Society of Japan
Year:
2016
File:
PDF, 182 KB
Your tags:
2016
5
Evaluation of SF6 Reactive Ion Etching Performance with a Permanent Magnet Located behind the Substrate based on a Simple Design Concept
MOTOMURA, Taisei
,
TAKAHASHI, Kazunori
,
KASASHIMA, Yuji
,
Kikunaga, Kazuya
,
UESUGI, Fumihiko
,
ANDO, Akira
Journal:
Journal of the Vacuum Society of Japan
Year:
2016
Language:
english
File:
PDF, 974 KB
Your tags:
english, 2016
6
10.3131/jvsj2.59.7
SUETSUGU, Y.
Journal:
Journal of the Vacuum Society of Japan
Year:
2016
File:
PDF, 161 KB
Your tags:
2016
7
10.3131/jvsj2.59.3
KINBARA, A.
Journal:
Journal of the Vacuum Society of Japan
Year:
2016
File:
PDF, 171 KB
Your tags:
2016
8
10.3131/jvsj2.59.6
KIMURA, K.
Journal:
Journal of the Vacuum Society of Japan
Year:
2016
File:
PDF, 157 KB
Your tags:
2016
9
10.3131/jvsj2.59.1
SAITO, Y.
Journal:
Journal of the Vacuum Society of Japan
Year:
2016
File:
PDF, 114 KB
Your tags:
2016
10
10.3131/jvsj2.59.5
KASAI, H.
Journal:
Journal of the Vacuum Society of Japan
Year:
2016
File:
PDF, 150 KB
Your tags:
2016
1
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