Volume 59; Issue 1

Journal of the Vacuum Society of Japan

Volume 59; Issue 1

1

10.3131/jvsj2.59.10

Journal:

Journal of the Vacuum Society of Japan

Year:

2016

File:

PDF, 143 KB

2016

2

Report on the 55th Vacuum Summer School

KAMIYA, Junichiro

Journal:

Journal of the Vacuum Society of Japan

Year:

2016

File:

PDF, 361 KB

2016

3

10.3131/jvsj2.59.2

Journal:

Journal of the Vacuum Society of Japan

Year:

2016

File:

PDF, 182 KB

2016

4

10.3131/jvsj2.59.8

Journal:

Journal of the Vacuum Society of Japan

Year:

2016

File:

PDF, 182 KB

2016

5

Evaluation of SF6 Reactive Ion Etching Performance with a Permanent Magnet Located behind the Substrate based on a Simple Design Concept

MOTOMURA, Taisei, TAKAHASHI, Kazunori, KASASHIMA, Yuji, Kikunaga, Kazuya, UESUGI, Fumihiko, ANDO, Akira

Journal:

Journal of the Vacuum Society of Japan

Year:

2016

Language:

english

File:

PDF, 974 KB

english, 2016

6

10.3131/jvsj2.59.7

Journal:

Journal of the Vacuum Society of Japan

Year:

2016

File:

PDF, 161 KB

2016

7

10.3131/jvsj2.59.3

Journal:

Journal of the Vacuum Society of Japan

Year:

2016

File:

PDF, 171 KB

2016

8

10.3131/jvsj2.59.6

Journal:

Journal of the Vacuum Society of Japan

Year:

2016

File:

PDF, 157 KB

2016

9

10.3131/jvsj2.59.1

Journal:

Journal of the Vacuum Society of Japan

Year:

2016

File:

PDF, 114 KB

2016

10

10.3131/jvsj2.59.5

Journal:

Journal of the Vacuum Society of Japan

Year:

2016

File:

PDF, 150 KB

2016