Volume 18; Issue 3

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Microsystem Technologies
Volume 18; Issue 3

Microsystem Technologies

Volume 18; Issue 3

1

Design and fabrication of a resonant scanning micromirror suspended by V shaped beams with vertical electrostatic comb drives

Xiao-Ying Li, Qian Jin, Da-Yong Qiao, Bao-Peng Kang, Bin Yan, Yao-Bo Liu

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 788 KB

english, 2012

2

Hot embossing at viscous state to enhance filling process for complex polymer structures

Xuelin Zhu, Terrence W. Simon, Tianhong Cui

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 823 KB

english, 2012

3

A three-axis SOI accelerometer sensing with both in-plane and vertical comb electrodes

Jin Xie, Rahul Agarwal, Youhe Liu, Julius Minglin Tsai

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 888 KB

english, 2012

4

Flexible balloon actuators for active flow control

Haifeng Lv, Chengyu Jiang, Hui Hou, Zhou Zhou, Jinjun Deng, Binghe Ma, Weizheng Yuan

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 1.05 MB

english, 2012

5

Microelectronic chip cooling: an experimental assessment of a liquid-passing heat sink, a microchannel heat rejection module, and a microchannel-based recirculating-liquid cooling system

Bin Lu, W. J. Meng, Fanghua Mei

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 843 KB

english, 2012

6

Embedding conductive patterns of elastomer nanocomposite with the assist of laser ablation

Chao-Xuan Liu, Jin-Woo Choi

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 623 KB

english, 2012

7

Design and characterization of an integrated multifunction micro sensor

Yulong Zhao, Weizhong Wang, Bian Tian, Libo Zhao, Zhuangde Jiang

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 1.47 MB

english, 2012

8

Disposable microfluidic chip for rapid pathogen identification with DNA microarrays

Johannes R. Peham, Lisa-Maria Recnik, Walter Grienauer, Michael J. Vellekoop, Christa Nöhammer, Herbert Wiesinger-Mayr

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 718 KB

english, 2012

9

Modelling and evaluation of a thermal microfluidic sensor fabricated on plastic substrate

G. P. Patsis, A. Petropoulos, G. Kaltsas

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 621 KB

english, 2012

10

Fabrication of polystyrene microfluidic devices using a pulsed CO2laser system

Huawei Li, Yiqiang Fan, Rimantas Kodzius, Ian G. Foulds

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 587 KB

english, 2012

11

Determination of residual stress in deep submicron thick films by the critical buckling technique of annular thin plates

Da-Yong Qiao, Xiao-Pei Zheng

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 488 KB

english, 2012

12

Mechanical and tribological characterization of a thermally actuated MEMS cantilever

Marius Pustan, Véronique Rochus, Jean-Claude Golinval

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 633 KB

english, 2012

13

Improved process flow for buried channel fabrication in silicon

Z. Fekete, A. Pongrácz, P. Fürjes, G. Battistig

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 333 KB

english, 2012

14

Flip chip solder bump inspection using vibration analysis

Junchao Liu, Tielin Shi, Qi Xia, Guanglan Liao

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 689 KB

english, 2012

15

Determination of residual stresses in a single crystalline 3C-SiC micro-fabricated structure using FE model and measured resonance frequencies

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 361 KB

english, 2012

16

Temperature compensation of micromachined silicon hot wire sensor using ANN technique

M. Laghrouche, B. Idjeri, K. Hammouche, M. Tahanout, J. Boussey, S. Ameur

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 954 KB

english, 2012

17

Fabrication of a guide block for measuring a device with fine pitch area-arrayed solder bumps

Woo-Chang Choi, Jee-Youl Ryu

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 644 KB

english, 2012