Volume 21; Issue 2-3

Precision Engineering

Volume 21; Issue 2-3
1

Uncertainty estimation for multiposition form error metrology

W. Tyler Estler, Chris J. Evans, L.Z. Shao
Journal:
Precision Engineering
Year:
1997
Language:
english
File:
PDF, 818 KB
english, 1997
2

Modeling and error analysis for assessing spindle radial error motions

Jay F. Tu, Bernd Bossmanns, Spring C.C. Hung
Journal:
Precision Engineering
Year:
1997
Language:
english
File:
PDF, 838 KB
english, 1997
3

An ultraprecision stage for alignment of wafers in advanced microlithography

Chang-Woo Lee, Seung-Woo Kim
Journal:
Precision Engineering
Year:
1997
Language:
english
File:
PDF, 777 KB
english, 1997
4

Nanogrinding

Hans H. Gatzen, J. Chris Maetzig
Journal:
Precision Engineering
Year:
1997
Language:
english
File:
PDF, 494 KB
english, 1997
5

Three-dimensional shaping by dot-matrix electrical discharge machining

Katsushi Furutani, Toshio Enami, Naotake Mohri
Journal:
Precision Engineering
Year:
1997
Language:
english
File:
PDF, 675 KB
english, 1997
6

Error analysis of a flexure hinge mechanism induced by machining imperfection

Jae W. Ryu, Dae-Gab Gweon
Journal:
Precision Engineering
Year:
1997
Language:
english
File:
PDF, 546 KB
english, 1997
7

An optical flatness measurement system for medium-sized surface plates

Kuang-Chao Fan, Fang-Jung Shiou
Journal:
Precision Engineering
Year:
1997
Language:
english
File:
PDF, 829 KB
english, 1997
8

High-accuracy roundness measurement by a new error separation method

Wei Gao, Satoshi Kiyono, Takamitu Sugawara
Journal:
Precision Engineering
Year:
1997
Language:
english
File:
PDF, 795 KB
english, 1997
9

Index

Journal:
Precision Engineering
Year:
1997
Language:
english
File:
PDF, 166 KB
english, 1997
10

1997 Annual meeting and conference

Don A. Lucca
Journal:
Precision Engineering
Year:
1997
Language:
english
File:
PDF, 39 KB
english, 1997
11

Calendar

Journal:
Precision Engineering
Year:
1997
Language:
english
File:
PDF, 82 KB
english, 1997