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Volume 47; Issue 5
Main
Russian Microelectronics
Volume 47; Issue 5
Russian Microelectronics
Volume 47; Issue 5
1
Analytic Model of Transit-Time Diodes and Transistors for the Generation and Detection of THz Radiation
Vyurkov, V. V.
,
Khabutdinov, R. R.
,
Nemtsov, A. B.
,
Semenikhin, I. A.
,
Rudenko, M. K.
,
Rudenko, K. V.
,
Lukichev, V. F.
Journal:
Russian Microelectronics
Year:
2018
Language:
english
File:
PDF, 536 KB
Your tags:
english, 2018
2
Investigation of Characteristics of Electrostatically Actuated MEMS Switch with an Active Contact Breaking Mechanism
Uvarov, I. V.
,
Kupriyanov, A. N.
Journal:
Russian Microelectronics
Year:
2018
Language:
english
File:
PDF, 1.82 MB
Your tags:
english, 2018
3
The Model of the Process of the Chemical Mechanical Polishing of the Copper Metallization, Based on the Formation of the Passivation Layer
Makhviladze, T. M.
,
Sarychev, M. E.
Journal:
Russian Microelectronics
Year:
2018
Language:
english
File:
PDF, 346 KB
Your tags:
english, 2018
4
Investigation of the Process of Plasma Through Etching of HkMG Stack of Nanotransistor with a 32-nm Critical Dimension
Myakonkikh, A. V.
,
Kuvaev, K. Yu.
,
Tatarintsev, A. A.
,
Orlikovskii, N. A.
,
Rudenko, K. V.
,
Guschin, O. P.
,
Gornev, E. S.
Journal:
Russian Microelectronics
Year:
2018
Language:
english
File:
PDF, 1.12 MB
Your tags:
english, 2018
5
Applications of the Technology of Fast Neutral Particle Beams in Micro- and Nanoelectronics
Kudrya, V. P.
,
Maishev, Yu. P.
Journal:
Russian Microelectronics
Year:
2018
Language:
english
File:
PDF, 560 KB
Your tags:
english, 2018
6
Investigation of a Capacitor Array of a Composite Capacitive Touch Panel
Vlasov, A. I.
,
Krivoshein, A. I.
,
Terent’ev, D. S.
,
Shakhnov, V. A.
Journal:
Russian Microelectronics
Year:
2018
Language:
english
File:
PDF, 365 KB
Your tags:
english, 2018
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