Fundraising September 15, 2024 – October 1, 2024 About fundraising

Volume 64; Issue 39

Main
ECS Transactions
Volume 64; Issue 39

ECS Transactions

Volume 64; Issue 39

1

HfO2 Gate Stack Engineering by Post-Gate Cleaning Using NF3/NH3 Plasma

Lee, M. S., Oh, H. J., Lee, J. H., Lee, I. G., Shin, W. G., Kang, S. Y., Ko, D. H.

Journal:

ECS Transactions

Year:

2015

Language:

english

File:

PDF, 3.03 MB

english, 2015

2

Alternative to H3PO4 for Si3N4 Removal by Using Chemical Downstream Etching

de Buttet, C., Gourhant, O., Bouyssou, R., Zoll, S.

Journal:

ECS Transactions

Year:

2015

Language:

english

File:

PDF, 1.24 MB

english, 2015