IEEE Transactions on Semiconductor Manufacturing

1

CMOS Junctionless Field-Effect Transistors Manufacturing Cost Evaluation

Wen, Sandy M., Chui, Chi On

Journal:

Year:

2013

Language:

english

File:

PDF, 496 KB

english, 2013

2

Tool Condition Diagnosis With a Recipe-Independent Hierarchical Monitoring Scheme

Blue, Jakey, Gleispach, Dietmar, Roussy, Agnès, Scheibelhofer, Peter

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2013

Language:

english

File:

PDF, 2.33 MB

english, 2013

3

Lot Size Management in the Semiconductor Industry: Queueing Analysis for Cycle Time Optimization

Zarifoglu, Emrah, Hasenbein, John J., Kutanoglu, Erhan

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2013

Language:

english

File:

PDF, 237 KB

english, 2013

4

The Evolution of Pixel Structures for Consumer-Grade Image Sensors

Fontaine, Ray

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2013

Language:

english

File:

PDF, 9.07 MB

english, 2013

5

Through-Silicon-Via Fabrication Technologies, Passives Extraction, and Electrical Modeling for 3-D Integration/Packaging

Xu, Zheng, Lu, Jian-Qiang

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2013

Language:

english

File:

PDF, 5.82 MB

english, 2013

6

Characterizing the Economic Value of Organizational Learning in Semiconductor Manufacturing

Weber, Charles M.

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2013

Language:

english

File:

PDF, 6.43 MB

english, 2013

7

Characterization of Mass Transfer Rates and Contamination Kinetics on Silicon Wafer Surface

Godse, Uday B., Ponkala, Mikko J. V., Stuber, John, Elkhatib, Bassam, Ezekoye, Ofodike A.

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2013

Language:

english

File:

PDF, 7.74 MB

english, 2013

8

Segregating Preventive Maintenance Work for Cycle Time Optimization

Kalir, Adar A.

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2013

Language:

english

File:

PDF, 5.07 MB

english, 2013

9

Scaling of Copper Seed Layer Thickness Using Plasma-Enhanced ALD and Optimized Precursors

Mao, Jiajun, Eisenbraun, Eric, Omarjee, Vincent, Korolev, Andrey, Dussarrat, Christian

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2013

Language:

english

File:

PDF, 5.69 MB

english, 2013

10

Design-Aware Defect-Avoidance Floorplanning of EUV Masks

Kagalwalla, Abde Ali, Gupta, Puneet

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2013

Language:

english

File:

PDF, 7.71 MB

english, 2013

11

A Quality Metric for Defect Inspection Recipes

Buengener, Ralf, Lee, Julie L., Trapp, Brian M., Rudy, John A.

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2013

Language:

english

File:

PDF, 6.19 MB

english, 2013

12

A Petri Net-Based Novel Scheduling Approach and Its Cycle Time Analysis for Dual-Arm Cluster Tools With Wafer Revisiting

Qiao, Yan, Wu, NaiQi, Zhou, MengChu

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2013

Language:

english

File:

PDF, 1.38 MB

english, 2013

13

VM-Based Baseline Predictive Maintenance Scheme

Hsieh, Yao-Sheng, Cheng, Fan-Tien, Huang, Hsien-Cheng, Wang, Chung-Ren, Wang, Saint-Chi, Yang, Haw-Ching

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2013

Language:

english

File:

PDF, 11.74 MB

english, 2013

14

Run-to-Run Control Utilizing Virtual Metrology With Reliance Index

Kao, Chi-An, Cheng, Fan-Tien, Wu, Wei-Ming, Kong, Fan-Wei, Huang, Hsuan-Heng

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2013

Language:

english

File:

PDF, 12.90 MB

english, 2013

15

Analyzing UV/Vis/NIR and Photo-Acoustic Spectra: A Note to the Band Gap of ${\rm Ti}_{\rm x}{\rm Si}_{1-{\rm x}}{\rm O}_{2}$

Stadler, Andreas

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2013

Language:

english

File:

PDF, 5.19 MB

english, 2013

16

Impact of Recipe Restrictions on Photolithography Toolsets in an ASIC Fabrication Environment

Kabak, Kamil Erkan, Heavey, Cathal, Corbett, Vincent, Byrne, P. J.

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2013

Language:

english

File:

PDF, 7.92 MB

english, 2013

17

Reducing Environmentally Induced Defects While Maintaining Productivity

van Roijen, Raymond, Conti, Susan G., Keyser, Rebekah, Arndt, Russel, Burda, Richard, Ayala, Javier, Henry, Richard O., Levy, Jonathan, Maxson, Jeffrey, Meyette, Eric, Steer, Warwick, Tabakman, Keith,

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2013

Language:

english

File:

PDF, 8.63 MB

english, 2013

18