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51

Evolution of the optical functions of aluminum films during nucleation and growth determined by real-time spectroscopic ellipsometry

Nguyen, H. V., An, Ilsin, Collins, R. W.

Journal:

Physical Review Letters

Year:

1992

Language:

english

File:

PDF, 682 KB

english, 1992

52

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2008)] Optical Microlithography XXI - 32 nm 1:1 line and space patterning by resist reflow process

Park, Joon-Min, Jeong, Heejun, An, Ilsin, Oh, Hye-Keun

Year:

2008

Language:

english

File:

PDF, 1.20 MB

english, 2008

53

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 22 February 2009)] Advances in Resist Materials and Processing Technology XXVI - Temperature and critical dimension variation in a single wafer on hot plate due to non-uniform heat source

Kim, Bobae, Henderson, Clifford L., Park, Joon-Min, Kim, Hyunsu, An, Ilsin, Park, Seung-Wook, Oh, Hye-Keun

Year:

2009

Language:

english

File:

PDF, 8.31 MB

english, 2009

54

Nucleation and growth of hydrogenated amorphous silicon-carbon alloys: Effect of hydrogen dilution in plasma-enhanced chemical vapor deposition

Lu, Yiwei, An, Ilsin, Gunes, M., Wakagi, M., Wronski, C. R., Collins, R. W.

Journal:

Applied Physics Letters

Year:

1993

Language:

english

File:

PDF, 607 KB

english, 1993

55

Chromeless Phase Lithography Using Scattering Bars and Zebra Patterns

Kang, Hye-Young, An, Ilsin, Shin, Dong-Soo, Jeong, HeeJun, Ahn, Chang-Nam, Oh, Hye-Keun

Journal:

Japanese Journal of Applied Physics

Year:

2006

Language:

english

File:

PDF, 248 KB

english, 2006

56

Sub-Surface Equilibration of Hydrogen with the a-Si:H Network Under Film Growth Conditions

An, ILSIN, Li, Y.M., Wronski, C.R., Collins, R. W.

Journal:

MRS Proceedings

Year:

1993

Language:

english

File:

PDF, 503 KB

english, 1993

57

SPIE Proceedings [SPIE SPIE 31st International Symposium on Advanced Lithography - San Jose, CA (Sunday 19 February 2006)] Data Analysis and Modeling for Process Control III - Optical anisotropy approach in spectroscopic ellipsometry to determine the CD of contact hole patterns

Kyoung, Jaisun, Emami, Iraj, Tobin, Jr., Kenneth W., Cheon, Hyuknyeong, Noh, Sangbin, Cho, Jongkyu, An, Ilsin, Lee, Sukjoo, Cho, Hangu

Year:

2006

Language:

english

File:

PDF, 932 KB

english, 2006

58

SPIE Proceedings [SPIE SPIE Lithography Asia - Taiwan - Taipei, Taiwan (Tuesday 4 November 2008)] Lithography Asia 2008 - 22nm 1:1 line and space patterning by using double patterning and resist reflow process

Park, Joon Min, Chen, Alek C., Lin, Burn, Yoo, Ji-Hye, Hong, Joo-Yoo, Yen, Anthony, An, Ilsin, Oh, Hye-Keun

Year:

2008

Language:

english

File:

PDF, 752 KB

english, 2008

59

Morphological Development and Etching of Gold Thin Film under UV-exposure in Chlorine-based Liquids

An, Ilsin, Seong, Deokkyeong

Journal:

Chemistry Letters

Year:

2004

Language:

english

File:

PDF, 433 KB

english, 2004

60

Conduction mechanism of leakage current due to the traps in ZrO 2 thin film

Seo, Yohan, Lee, Sangyouk, An, Ilsin, Song, Chulgi, Jeong, Heejun

Journal:

Semiconductor Science and Technology

Year:

2009

Language:

english

File:

PDF, 335 KB

english, 2009

61

Preparation and Optical Properties of Ultrathin Silicon Films

Collins, R. W., Nguyen, Hien V., An, Ilsin, Lu, Yiwei, Wakagi, M.

Journal:

MRS Proceedings

Year:

1994

Language:

english

File:

PDF, 510 KB

english, 1994

62

Real Time Optics of Amorphous Silicon Solar Cellfabrication on Textured Tin-Oxide-Coated Glass

Rovira, P. I., Ferlauto, A. S., An, Ilsin, Fujiwara, H., Koh, Joohyun, Koval, R. J., Wronski, C. R., Collins, R. W.

Journal:

MRS Proceedings

Year:

1999

Language:

english

File:

PDF, 1.60 MB

english, 1999

63

SPIE Proceedings [SPIE 26th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 25 February 2001)] Optical Microlithography XIV - Photoresist thickness variation due to local and global topography

Kim, Jin-Young, Bak, Heungin, Sohn, Young-Soo, An, Ilsin, Bang, Kyoung-Yoon, Oh, Hye-Keun, Han, Woo-Sung, Progler, Christopher J.

Year:

2001

Language:

english

File:

PDF, 478 KB

english, 2001

64

[Japan Soc. Appl. Phys Digest of Papers. Microprocesses and Nanotechnology 2002. 2002 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (6-8 Nov. 2002)] 2002 International Microprocesses and Nanotechnology Conference, 2002. Digest of Papers. - Threshold energy resist model for CD prediction

Ji-Yong Yoo,, Young-Keun Kwon,, Jun-Taek Park,, Dong-Soo Sohn,, Ilsin An,, Hye-Keun Oh,

Year:

2002

Language:

english

File:

PDF, 108 KB

english, 2002

65

Rotating-compensator multichannel ellipsometry for characterization of the evolution of nonuniformities in diamond thin-film growth

Lee, Joungchel, Rovira, P. I., An, Ilsin, Collins, R. W.

Journal:

Applied Physics Letters

Year:

1998

Language:

english

File:

PDF, 264 KB

english, 1998

66

SPIE Proceedings [SPIE Microlithography '97 - Santa Clara, CA, USA (Monday 10 March 1997)] Optical Microlithography X - Line-width variation with different sublayers for 0.25-μm minimum feature size in DUV lithography

Oh, Hye-Keun, Fuller, Gene E., Cho, Young-Seon, Jeong, Yeon-Un, Kang, Hoyoung, Lee, Gun-Sang, An, Ilsin, Park, In-Ho

Year:

1997

Language:

english

File:

PDF, 1.02 MB

english, 1997

67

Photoresist Adhesion Effect of Resist Reflow Process

Park, Joon-Min, Kim, Eun-Jin, Hong, Joo-Yoo, An, Ilsin, Oh, Hye-Keun

Journal:

Japanese Journal of Applied Physics

Year:

2007

Language:

english

File:

PDF, 233 KB

english, 2007

68

Commentary: Multichannel ellipsometry for monitoring processes

Journal:

Journal of Nanophotonics

Year:

2010

Language:

english

File:

PDF, 317 KB

english, 2010

69

Development of Calibration-Free Imaging Ellipsometry Using Dual-Rotation of Polarizer and Analyzer

Cheon, Hyuknyeong, Bak, Heung-Jin, Oh, Hyekeun, Lee, Eun-Kyu, An, Ilsin

Journal:

Japanese Journal of Applied Physics

Year:

2007

Language:

english

File:

PDF, 205 KB

english, 2007

70

Spectroscopic ellipsometry on the millisecond time scale for real-time investigations of thin-film and surface phenomena

An, Ilsin, Li, Y. M., Nguyen, H. V., Collins, R. W.

Journal:

Review of Scientific Instruments

Year:

1992

Language:

english

File:

PDF, 1.26 MB

english, 1992

71

Anisotropic Resist Reflow Process Simulation for 22 nm Elongated Contact Holes

Park, Joon-Min, Kim, Dai-Gyoung, Hong, Joo-Yoo, An, Ilsin, Oh, Hye-Keun

Journal:

Japanese Journal of Applied Physics

Year:

2008

Language:

english

File:

PDF, 575 KB

english, 2008

72

Effect of Gas Phase Hydrogen-Dilution on the Nucleation, Growth, and Interfaces Of a-Si1-xCx:H

Lu, Yiwei, An, Ilsin, Gunes, M., Wakagi, M., Wronski, C.R., Collins, R.W.

Journal:

MRS Proceedings

Year:

1993

Language:

english

File:

PDF, 477 KB

english, 1993

73

SPIE Proceedings [SPIE Microlithography 2003 - Santa Clara, CA (Sunday 23 February 2003)] Advances in Resist Technology and Processing XX - Practical extracting method of PEB parameters by using rotating compensator spectroscopic ellipsometer

Kim, Hyoung-Hee, Kwon, Young-Keun, Park, Seung-Wook, Bang, Kyung-Yoon, An, Ilsin, Lee, Kun-Sang, Oh, Hye-Keun, Fedynyshyn, Theodore H.

Year:

2003

Language:

english

File:

PDF, 452 KB

english, 2003

74

SPIE Proceedings [SPIE 26th Annual BACUS Symposium on Photomask Technology - Monterey, CA (Monday 18 September 2006)] Photomask Technology 2006 - Haze detection and haze-induced process latitude variation for low-k 1 193 nm lithography

Kim, Sung-Jin, Martin, Patrick M., Naber, Robert J., Park, Jin-Baek, Kim, Sung-Hyuck, Kang, Hye-Young, Kang, Young-Min, Park, Seung-Wook, An, Ilsin, Oh, Hye-Keun

Year:

2006

Language:

english

File:

PDF, 725 KB

english, 2006

75

Thin-film coalescence in hydrogenated amorphous silicon probed by spectroscopic ellipsometry with millisecond-scale resolution

Li, Y.-M., An, Ilsin, Nguyen, H. V., Wronski, C. R., Collins, R. W.

Journal:

Physical Review Letters

Year:

1992

Language:

english

File:

PDF, 739 KB

english, 1992

76

Mask Haze Measurement by Spectroscopic Ellipsometry

Kim, Young-Hoon, Kim, Sung-Hyuck, Cho, Han-Koo, An, Ilsin, Oh, Hye-Keun

Journal:

Japanese Journal of Applied Physics

Year:

2006

Language:

english

File:

PDF, 289 KB

english, 2006

77

Optical Properties and Structure of Microcrystalline Silicon

Nguyen, Hien V., An, Ilsin, Li, Youming, Wronski, C.R., Collins, R.W.

Journal:

MRS Proceedings

Year:

1992

Language:

english

File:

PDF, 458 KB

english, 1992

78

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 21 February 2010)] Advances in Resist Materials and Processing Technology XXVII - Simulation study of directed self-assembly for 10-nm pattern formation

Kim, Sang-Kon, Allen, Robert D., Oh, Hye-Keun, Jung, Young-Dae, An, Ilsin

Year:

2010

Language:

english

File:

PDF, 3.25 MB

english, 2010

79

A study of virtual lithography process for polymer directed self-assembly

Sang-Kon Kim, Hye-Keun Oh, Young-Dae Jung, Ilsin An

Journal:

Microelectronic Engineering

Year:

2010

Language:

english

File:

PDF, 798 KB

english, 2010

80

Morphology and ellipsometry study of pentacene films grown on native SiO2 and glass substrates

Chaeho Kim, Kyoungyoon Bang, Ilsin An, C.J. Kang, Y.S. Kim, D. Jeon

Journal:

Current Applied Physics

Year:

2006

Language:

english

File:

PDF, 464 KB

english, 2006

81

Real-time spectroscopic ellipsometry studies of diamond film growth by microwave plasma-enhanced chemical vapour deposition

Hong, Byungyou, Wakagi, M., Collins, R.W., An, Ilsin, Engdahl, N.C., Drawl, W., Messier, R.

Journal:

Diamond and Related Materials

Year:

1994

Language:

english

File:

PDF, 689 KB

english, 1994

82

Development of vacuum ultraviolet multichannel ellipsometry and its application to the characterization of ultrathin zirconium oxide films

Journal:

Journal of Nanophotonics

Year:

2008

Language:

english

File:

PDF, 1.19 MB

english, 2008

83

Single Anti-Reflection Coating Optimization with Different Polarizations for Hyper Numerical Aperture Immersion Lithography

Jung, Mi-Rim, Kwak, Eun-A, An, Ilsin, Oh, Hye-Keun

Journal:

Japanese Journal of Applied Physics

Year:

2006

Language:

english

File:

PDF, 311 KB

english, 2006

84

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2008)] Metrology, Inspection, and Process Control for Microlithography XXII - Ellipsometric inspection of the inner surface of pellicle-covered masks

Lee, Sangyouk, Allgair, John A., Raymond, Christopher J., Song, Chulgi, Rhim, Jusang, Lee, Hyoungjoo, Kyoung, Jaisun, Chin, Soobok, Ahn, Taehyuk, An, Ilsin

Year:

2008

Language:

english

File:

PDF, 296 KB

english, 2008

85

Advances in multichannel ellipsometric techniques for in-situ and real-time characterization of thin films

R.W. Collins, Ilsin An, Chi Chen, A.S. Ferlauto, J.A. Zapien

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 491 KB

english, 2004

86

News

Hong, Byungyou, Wakagi, M., Collins, R.W., An, Ilsin, Engdahl, N.C., Drawl, W., Messier, R.

Journal:

Year:

1990

Language:

english

File:

PDF, 161 KB

english, 1990

87

Optical Investigation of Deep Ultraviolet Degradation of Pellicles

Cheon, Hyuknyeong, Choi, Hyungseok, Oh, Hye-Keun, An, Ilsin

Journal:

Japanese Journal of Applied Physics

Year:

2010

Language:

english

File:

PDF, 191 KB

english, 2010

88

SPIE Proceedings [SPIE Asia-Pacific Optical Communications - Gwangju, USA (Sunday 3 September 2006)] Optoelectronic Materials and Devices - Picosecond nonlinear optical transmission measurement in SiO2/TiO2 one-dimensional photonic crystals

Kim, Min Jung, Hwang, Jisoo, Lee, Seung Mook, Rhee, Bum Ku, An, Ilsin, Wu, Jeong Weon, Lee, Yong Hee, Koyama, Fumio, Luo, Yi

Year:

2013

Language:

english

File:

PDF, 727 KB

english, 2013

89

SPIE Proceedings [SPIE Microlithography 2003 - Santa Clara, CA (Sunday 23 February 2003)] Metrology, Inspection, and Process Control for Microlithography XVII - Use of rotating compensator spectroscoic ellipsometry for monitoring the photoresist etching on Si wafer

Choi, Yong-Seok, Kim, Yun-Hwan, Kim, Gon-Ho, Oh, Hye-Keun, An, Ilsin, Herr, Daniel J.

Year:

2003

Language:

english

File:

PDF, 344 KB

english, 2003

90

Preparation of ultrathin microcrystalline silicon layers by atomic hydrogen etching of amorphous silicon and end-point detection by real time spectroellipsometry

Nguyen, H. V., An, Ilsin, Collins, R. W., Lu, Yiwei, Wakagi, M., Wronski, C. R.

Journal:

Applied Physics Letters

Year:

1994

Language:

english

File:

PDF, 325 KB

english, 1994

91

[Japan Soc. Appl. Phys Digest of Papers. Microprocesses and Nanotechnology 2002. 2002 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (6-8 Nov. 2002)] 2002 International Microprocesses and Nanotechnology Conference, 2002. Digest of Papers. - Resist pattern collapse with top rounding resist profile

Hyung-Joo Lee,, Jun-Taek Park,, Ji-Yong Yoo,, Ilsin An,, Hye-Keun Oh,

Year:

2002

Language:

english

File:

PDF, 116 KB

english, 2002

92

SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Advances in Resist Technology and Processing XXII - Simulation of thermal resist flow process

Kim, Sang-Kon, An, Ilsin, Oh, Hye-Keun, Lee, Sun Muk, Bok, Cheolkyu, Moon, Seung Chan, Sturtevant, John L.

Year:

2005

Language:

english

File:

PDF, 239 KB

english, 2005

93

Multichannel Mueller Matrix Ellipsometry for Simultaneous Real-Time Measurement of Bulk Isotropic and Surface Anisotropic Complex Dielectric Functions of Semiconductors

Chen, Chi, An, Ilsin, Collins, R. W.

Journal:

Physical Review Letters

Year:

2003

Language:

english

File:

PDF, 122 KB

english, 2003

94

SPIE Proceedings [SPIE Microlithography '99 - Santa Clara, CA (Sunday 14 March 1999)] Advances in Resist Technology and Processing XVI - Refractive index change during exposure for 193-nm chemically amplified resists

Oh, Hye-Keun, Sohn, Young-Soo, Sung, Moon-Gyu, Lee, Young-Mi, Lee, Eun-Mi, Byun, Sung Hwan, An, Ilsin, Lee, Kun-Sang, Park, In-Ho, Conley, Will

Year:

1999

Language:

english

File:

PDF, 308 KB

english, 1999

95

Comparison null imaging ellipsometry using polarization rotator

Park, Sungmo, Kim, Eunsung, Kim, Jiwon, An, Ilsin

Journal:

Japanese Journal of Applied Physics

Year:

2018

Language:

english

File:

PDF, 1.04 MB

english, 2018

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