69

X-ray photo-electron spectromicroscopy

Year:
1995
Language:
english
File:
PDF, 873 KB
english, 1995
78

Image formation in EUV lithography: Multilayer and resist properties

Year:
2000
Language:
english
File:
PDF, 1.40 MB
english, 2000
79

X-ray mask temperature distribution and magnification control

Year:
1997
Language:
english
File:
PDF, 217 KB
english, 1997
81

Computation of reflected images from EUV masks

Year:
1999
Language:
english
File:
PDF, 675 KB
english, 1999
84

Inhibition of rat mast cell degranulation by verapamil

Year:
1984
Language:
english
File:
PDF, 331 KB
english, 1984
96

High sensitivity nanocomposite resists for EUV lithography

Year:
2003
Language:
english
File:
PDF, 452 KB
english, 2003
100

10.1038/13664

Year:
1999
Language:
english
File:
PDF, 570 KB
english, 1999