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51

[IEEE 2012 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK) - Suita, Japan (2012.05.9-2012.05.11)] 2012 IEEE International Meeting for Future of Electron Devices, Kansai - Oxidation and structure scheme studies for sensitivity improvement of Si1−xGex nanowire biosensor

Chen, Chu-Feng, Chang, Kow-Ming, Wang, Yu-Bin, Liu, Chung-Hsien, Wu, Chin-Ning, Hsieh, Cheng-Ting, Lai, Chiung-Hui, Chang, Kow-Ming, Chang, Kuo-Chin

Year:

2012

Language:

english

File:

PDF, 261 KB

english, 2012

52

A new simple and reliable method to form a textured Si surface for the fabrication of a tunnel oxide film

Kow-ming Chang, Chii-horng Li, Bao-sheng Sheih, Ji-yi Yang, Shih-wei Wang, Ta-hsun Yeh

Journal:

IEEE Electron Device Letters

Year:

1998

Language:

english

File:

PDF, 108 KB

english, 1998

53

[IEEE 2007 International Semiconductor Device Research Symposium - College Park, MD, USA (2007.12.12-2007.12.14)] 2007 International Semiconductor Device Research Symposium - The effects of plasma treatment on the thermal stability of HfAlOx thin films

Kow-Ming Chang,, Bwo-Ning Chen,, Shih-Ming Huang,

Year:

2007

Language:

english

File:

PDF, 270 KB

english, 2007

54

A novel technology to form air gap for ULSI application

Kow-Ming Chang,, Ji-Yi Yang,, Lih-Woen Chen,

Journal:

IEEE Electron Device Letters

Year:

1999

Language:

english

File:

PDF, 154 KB

english, 1999

55

[IEEE 2009 IEEE International Reliability Physics Symposium - Montreal, QC, Canada (2009.04.26-2009.04.30)] 2009 IEEE International Reliability Physics Symposium - Fundamental understanding of porous low-k dielectric breakdown

Shou-Chung Lee,, Oates, A. S., Kow-Ming Chang,

Year:

2009

Language:

english

File:

PDF, 343 KB

english, 2009

56

[IEEE 2012 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK) - Suita, Japan (2012.05.9-2012.05.11)] 2012 IEEE International Meeting for Future of Electron Devices, Kansai - Effects of sensitivity enhancement by oxide passivation layer on SGOI nanowire fabrication

Chen, Chu-Feng, Chang, Kow-Ming, Wang, Yu-Bin, Liu, Chung-Hsien, Wu, Chin-Ning, Hsieh, Cheng-Ting, Lai, Chiung-Hui, Chang, Kow-Ming, Chang, Kuo-Chin

Year:

2012

Language:

english

File:

PDF, 265 KB

english, 2012

57

[IEEE 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Kyoto, Japan (2012.03.5-2012.03.8)] 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Sensitivity enhancement in SGOI nanowire biosensor fabricated by top surface passivation

Chang, Kow-Ming, Chen, Chu-Feng, Lai, Chiung-Hui, Hsieh, Cheng-Ting, Wu, Chin-Ning, Wang, Yu-Bin, Liu, Chung-Hsien

Year:

2012

Language:

english

File:

PDF, 552 KB

english, 2012

58

New physical formulation of the thermionic emission current at the heterojunction interface

Kow-Ming Chang,, Jung-Yu Tsai,, Chun Yen Chang,

Journal:

IEEE Electron Device Letters

Year:

1993

Language:

english

File:

PDF, 306 KB

english, 1993

59

Characteristics of Zirconium Oxide Gate Ion-Sensitive Field-Effect Transistors

Chang, Kow-Ming, Chao, Kuo-Yi, Chou, Ting-Wei, Chang, Chin-Tien

Journal:

Japanese Journal of Applied Physics

Year:

2007

Language:

english

File:

PDF, 321 KB

english, 2007

60

A simple 2D analytical threshold voltage model for fully depleted short-channel silicon-on-insulator MOSFETs

Chang, Kow-Ming, Wang, Han-Pang

Journal:

Semiconductor Science and Technology

Year:

2004

Language:

english

File:

PDF, 254 KB

english, 2004

61

[IEEE 2000 Asia-Pacific Microwave Conference - Sydney, NSW, Australia (3-6 Dec. 2000)] 2000 Asia-Pacific Microwave Conference. Proceedings (Cat. No.00TH8522) - The enhanced Q spiral inductors with MEMS technology for RF applications

Chia-Ying Lee,, Yao-Huang Kao,, Jiunn-Jye Luo,, Kow-Ming Chang,

Year:

2000

Language:

english

File:

PDF, 785 KB

english, 2000

62

[IEEE 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Kyoto, Japan (2012.03.5-2012.03.8)] 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Effect of oxidation on SGOI nanowire biosensor fabrication using Ge condensation

Chang, Kow-Ming, Chen, Chu-Feng, Lai, Chiung-Hui, Wu, Chin-Ning, Hsieh, Cheng-Ting, Wang, Yu-Bin, Liu, Chung-Hsien

Year:

2012

Language:

english

File:

PDF, 584 KB

english, 2012

63

ECS Transactions [ECS 217th ECS Meeting - Vancouver, Canada (April 25 - April 30, 2010)] - Modulation of the Electrical Characteristics of HfO

Chang, Kow-Ming, Tzeng, Wen-Hsien, Liu, Kou-Chen, Lai, Wei-Ren

Year:

2010

Language:

english

File:

PDF, 209 KB

english, 2010

64

[IEEE 2014 72nd Annual Device Research Conference (DRC) - Santa Barbara, CA, USA (2014.6.22-2014.6.25)] 72nd Device Research Conference - The influence of NH3 plasma treatment on Al2O3/HfO2 gate dielectrics of TFTs with atmospheric pressure plasma jet deposited IGZO channel

Huang, Hau-Yuan, Wu, Chien-Hung, Wang, Shui-Jinn, Chang, Kow-Ming, Hsu, Hsin-Yu

Year:

2014

Language:

english

File:

PDF, 357 KB

english, 2014

65

[IEEE 2010 IEEE 3rd International Nanoelectronics Conference (INEC) - Hong Kong, China (2010.01.3-2010.01.8)] 2010 3rd International Nanoelectronics Conference (INEC) - Transparent resistive random access memory (T-RRAM) based on Gd2O3 film and its resistive switching characteristics

Kou-Chen Liu,, Wen-Hsien Tzeng,, Kow-Ming Chang,, Yi-Chun Chan,, Chun-Chih Kuo,, Chun-Wen Cheng,

Year:

2010

Language:

english

File:

PDF, 100 KB

english, 2010

66

Nitridation of fine grain chemical vapor deposited tungsten film as diffusion barrier for aluminum metallization

Chang, Kow-Ming, Yeh, Ta-Hsun, Deng, I-Chung

Journal:

Journal of Applied Physics

Year:

1997

Language:

english

File:

PDF, 613 KB

english, 1997

67

[IEEE 2008 2nd IEEE International Nanoelectronics Conference - Shanghai, China (2008.03.24-2008.03.27)] 2008 2nd IEEE International Nanoelectronics Conference - Higher drive current for SiGe nanowires

Kow-Ming Chang,, Jiun-Ming Kuo,, Heng-Hsin Wu,, Wen-Hsien Tzeng,, Tzu-liu Wu,, Wen-Chan Chao,

Year:

2008

File:

PDF, 325 KB

2008

68

Highly selective etching for polysilicon and etch-induced damage to gate oxide with halogen-bearing electron-cyclotron-resonance plasma

Chang, Kow-Ming, Yeh, Ta-Hsun, Deng, I-Chung, Lin, Horng-Chih

Journal:

Journal of Applied Physics

Year:

1996

Language:

english

File:

PDF, 581 KB

english, 1996

69

Amorphouslike chemical vapor deposited tungsten diffusion barrier for copper metallization and effects of nitrogen addition

Chang, Kow-Ming, Yeh, Ta-Hsun, Deng, I-Chung, Shih, Chieh-Wen

Journal:

Journal of Applied Physics

Year:

1997

Language:

english

File:

PDF, 864 KB

english, 1997

70

Effects of gas ratio on electrical properties of electron-cyclotron-resonance nitride films grown at room temperature

Chang, Kow-Ming, Tsai, Jung-Yu, Li, Chii-Horng, Yeh, Ta-Hsun, Wang, Shih-Wei, Yang, Ji-Yi

Journal:

Journal of Applied Physics

Year:

1996

Language:

english

File:

PDF, 375 KB

english, 1996

71

[IEEE 2008 IEEE International Conference on Electron Devices and Solid-State Circuits (EDSSC) - Hong Kong, China (2008.12.8-2008.12.10)] 2008 IEEE International Conference on Electron Devices and Solid-State Circuits - National project on 45 to 32 nm metal oxide semiconductor field effect transistors for next century IC fabrications

Hwang, Huey-liang, Wang, C.W., Chang, K.H., Tsai, C.H., Leou, K.C., Chang-Liao, Kuei-Shu, Lu, Chun-Chang, Chang, S.C., Chiu, F.C., Liu, C.H., Chin, Albert, Chang, Kow-Ming, Chen, Bwo-Ning

Year:

2008

Language:

english

File:

PDF, 673 KB

english, 2008

72

[IEEE 1993 Symposium on Semiconductor Modeling and Simulation [Technical Digest] - Taipei, Taiwan (March 6-7, 1993)] 1993 Symposium on Semiconductor Modeling and Simulation [Technical Digest] - Two-Dimensional Numerical Simulation for GaAs MESFET with Heavy Doping Effects

Kow-Ming Chang,, Gwo-Liang Lin,

Year:

1993

Language:

english

File:

PDF, 107 KB

english, 1993

73

[IEEE 2008 2nd IEEE International Nanoelectronics Conference - Shanghai, China (2008.03.24-2008.03.27)] 2008 2nd IEEE International Nanoelectronics Conference - The Ge enhance the sensitivity for bio-sensor

Kow-Ming Change,, Jiun-Ming Kuo,, Wen-Chan Chao,, Chia-Jung Liang,, Heng-Hsin Wu,, Wen-Hsien Tzeng,, Tzu-liu Wu,

Year:

2008

File:

PDF, 288 KB

2008

74

ECS Transactions [ECS 219th ECS Meeting - Montreal, QC, Canada (May 1 - May 6, 2011)] - Improvement on Electrical Characteristics of HfO

Chang, Kow-Ming, Chang, Ting-Chia, Chen, Hshu-Wei

Year:

2011

Language:

english

File:

PDF, 1001 KB

english, 2011

75

ECS Transactions [ECS 219th ECS Meeting - Montreal, QC, Canada (May 1 - May 6, 2011)] - Reliability Properties and Current Conduction Mechanisms of HfO

Chang, Kow-Ming, Chang, Ting-Chia, Chen, Shou-Hsien, Deng, I-Chung

Year:

2011

Language:

english

File:

PDF, 971 KB

english, 2011

76

[ECS 215th ECS Meeting - San Francisco, CA (May 24 - May 29, 2009)] ECS Transactions - The Improvement Effect of the Plasma Nitridation Process to the Reliability of HfO2 Thin Films

Chang, Kow-Ming, Chen, Bwo-Ning, Tang, Chun-Kai

Year:

2009

Language:

english

File:

PDF, 863 KB

english, 2009

77

The Influence of Precleaning Process on the Gate Oxide Film Fabricated by Electron Cyclotron Resonance Plasma Oxidation

Chang, Kow-Ming

Journal:

Journal of The Electrochemical Society

Year:

1997

Language:

english

File:

PDF, 961 KB

english, 1997

78

ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - Flow Rate's Influence on Low Temperature Silicon Oxide Deposited by Atmospheric Pressure Plasma Jet for Organic Thin Film Tranisitor Application

Chang, Kow-Ming, Huang, Shih-Syuan, Cheng, Chun-Hu

Year:

2010

Language:

english

File:

PDF, 682 KB

english, 2010

79

Suppression of Fluorine Penetration by Use of In Situ Stacked Chemical Vapor Deposited Tungsten Film

Chang, Kow-Ming

Journal:

Journal of The Electrochemical Society

Year:

1999

Language:

english

File:

PDF, 579 KB

english, 1999

80

SiH[sub 4]-WF[sub 6] Gas-Phase Nucleated Tungsten as an Adhesion Layer in Blanket Chemical Vapor Deposition for Ultralarge Scale Integration

Chang, Kow-Ming

Journal:

Journal of The Electrochemical Society

Year:

1997

Language:

english

File:

PDF, 3.92 MB

english, 1997

81

Using NH[sub 3] Plasma Treatment to Improve the Characteristics of Hydrogen Silsesquioxane for Copper Interconnection Application

Chang, Kow-Ming, Deng, I-Chung, Yeh, Sy-Jer, Tsai, Yao-Pin

Journal:

Journal of The Electrochemical Society

Year:

2000

Language:

english

File:

PDF, 520 KB

english, 2000

82

Barrier Characteristics of Chemical Vapor Deposited Amorphous-like Tungsten Silicide with In Situ Nitrogen Plasma Treatment

Chang, Kow-Ming

Journal:

Journal of The Electrochemical Society

Year:

1999

Language:

english

File:

PDF, 722 KB

english, 1999

83

ECS Transactions [ECS 219th ECS Meeting - Montreal, QC, Canada (May 1 - May 6, 2011)] - Effect of the Mixed N

Chang, Kow-Ming, Chen, Chu-Feng, Lai, Chiung-Hui, Wang, Yu-Bin, Liu, Chung-Hsien, Hsieh, Cheng-Ting, Wu, Chin-Ning

Year:

2011

Language:

english

File:

PDF, 498 KB

english, 2011

84

[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - A Study of Electrical Properties of SiGe Film with Various Oxidation Conditions

Chang, Kow-Ming, Kuo, Jiun-Ming, Wu, Heng-Hsin, Tzeng, Wen-Hsien, Wu, Tzu-Li, Chen, Bwo-Ning, Lin, Jian-Hong

Year:

2008

Language:

english

File:

PDF, 219 KB

english, 2008

85

ECS Transactions [ECS 219th ECS Meeting - Montreal, QC, Canada (May 1 - May 6, 2011)] - Bipolar Resistive Switching Characteristics of Gd

Chang, Kow-Ming, Tzeng, Wen-Hsien, Liu, Kou-Chen, Chan, Yi-Chun, Kuo, Chun-Chih

Year:

2011

Language:

english

File:

PDF, 425 KB

english, 2011

86

[ECS 215th ECS Meeting - San Francisco, CA (May 24 - May 29, 2009)] ECS Transactions - Investigation of the Thin Silicon Oxide Deposited with Different Main Gases and Gap Distances of Atmospheric-pressure Plasma Jet at Low Temperature for OTFTs Gate Insulator

Chang, Kow-Ming, Huang, Shih-Syuan, Lin, Je-Uai, Lin, Chih-Hsiang

Year:

2009

Language:

english

File:

PDF, 276 KB

english, 2009

87

ECS Transactions [ECS 219th ECS Meeting - Montreal, QC, Canada (May 1 - May 6, 2011)] - The Effect of Different Carrier Gases and Channel Thicknesses on the Characteristics of ZnO TFTs Prepared by Atmospheric Pressure Plasma Jet

Chang, Kow-Ming, Huang, Sung-Hung, Chi, Chia-Wei, Wu, Chin-Jyi, Lin, Je-Wei, Chang, Chia-Chiang

Year:

2011

Language:

english

File:

PDF, 703 KB

english, 2011

88

ECS Transactions [ECS 219th ECS Meeting - Montreal, QC, Canada (May 1 - May 6, 2011)] - Performance Improvement of Pentacene-Based Organic Thin-Film Transistor with HfO

Chang, Kow-Ming, Huang, Sung-Hung, Tseng, Yi-Wen

Year:

2011

Language:

english

File:

PDF, 1.18 MB

english, 2011

89

A Novel Pretreatment Technology for Organic Low-Dielectric Material to Suppress Copper Diffusion and Improve Ashing Resistance

Chang, Kow-Ming, Deng, I-Chung, Tsai, Yao-Pin, Wen, Chan-Yang, Yeh, Sy-Jer, Wang, Shih-Wei, Wang, Jin-Yea

Journal:

Journal of The Electrochemical Society

Year:

2000

Language:

english

File:

PDF, 368 KB

english, 2000

90

ECS Transactions [ECS 219th ECS Meeting - Montreal, QC, Canada (May 1 - May 6, 2011)] - The α-Si/SiGe Core/Shell Nano-Wire as Highly Sensitive Bio-Sensor

Chang, Kow-Ming, Chen, Chu-Feng, Lai, Chiung-Hui, Liu, Chung-Hsien, Wang, Yu-Bin, Wu, Chin-Ning, Hsieh, Cheng-Ting

Year:

2011

Language:

english

File:

PDF, 603 KB

english, 2011

91

The Changing Effect of N[sub 2]/O[sub 2] Gas Flow Rate Ratios on Ultrathin Nitrogen-Enriched Oxynitride Gate Dielectrics

Chang, Kow-Ming, Yang, Wen-Chih, Chen, Chu-Feng, Hung, Bing-Fang

Journal:

Journal of The Electrochemical Society

Year:

2004

Language:

english

File:

PDF, 163 KB

english, 2004

92

Low-Temperature Poly-Si Thin-Film Transistor with a N[sub 2]O-Plasma ONO Multilayer Gate Dielectric

Chang, Kow-Ming, Yang, Wen-Chih, Hung, Bing-Fang

Journal:

Electrochemical and Solid-State Letters

Year:

2004

Language:

english

File:

PDF, 154 KB

english, 2004

93

[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Low Temperature Processes of Organic Thin Film Transistor with Gate Dielectric of Silicon Dioxide Deposited by Scanning Atmospheric-Pressure Technology

Chang, Kow-Ming, Huang, Shih-Syuan, Lin, Chih-Hsiang, Huang, Song Hong, Wu, Yong Mao, Pan, H.C., Hsu, Ming I

Year:

2008

Language:

english

File:

PDF, 257 KB

english, 2008

94

1.0 nm Oxynitride Dielectrics Prepared by RTP in Mixtures of N[sub 2] and O[sub 2] Ambient

Chang, Kow-Ming, Yang, Wen-Chih, Chen, Chu-Feng

Journal:

Electrochemical and Solid-State Letters

Year:

2004

Language:

english

File:

PDF, 135 KB

english, 2004

95

Characteristics of Selective Chemical Vapor Deposition of Tungsten on Aluminum with a Vapor Phase Precleaning Technology

Chang, Kow-Ming

Journal:

Journal of The Electrochemical Society

Year:

1997

Language:

english

File:

PDF, 3.72 MB

english, 1997

96

A Novel pH-dependent Drift Improvement Method for Zirconium Dioxide Gated pH-Ion Sensitive Field Effect Transistors

Chang, Kow-Ming, Chang, Chih-Tien, Chao, Kuo-Yi, Lin, Chia-Hung

Journal:

Year:

2010

Language:

english

File:

PDF, 288 KB

english, 2010

97

[ECS 2007 International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors (ULSIC vs. TFT) - Barga, Italy (July 28 - August 3, 2007)] ECS Transactions - Surface-Treatment Effects on Organic Thin-Film Transistors by Atmospheric-Pressure Plasma Technology.

Chang, Kow-Ming, Lin, Chih-Hsiang, Huang, Shih-Syuan, Su, Chun-Long

Year:

2007

Language:

english

File:

PDF, 311 KB

english, 2007

98

Investigation of LaAlO3/ZrO2/a-InGaZnO thin-film transistors using atmospheric pressure plasma jet

Wu, Chien-Hung, Wang, Shui-Jinn, Huang, Hau-Yuan, Chang, Kow-Ming, Hsu, Hsin-Yu

Journal:

Electronics Letters

Year:

2014

Language:

english

File:

PDF, 348 KB

english, 2014

99

[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Polymer Thin-Film Transistors with Chemically Modified Dielectric Interfaces by Atmospheric-Pressure Plasma Technology

Kow-Ming, Chang, Chih-Hsiang, Lin, Shi-Xuan, Huang

Year:

2008

Language:

english

File:

PDF, 511 KB

english, 2008

100

Development of an Ion Sensitive Field Effect Transistor Based Urea Biosensor with Solid State Reference Systems

Chang, Kow-Ming, Chang, Chih-Tien, Chan, Kun-Mou

Journal:

Year:

2010

Language:

english

File:

PDF, 483 KB

english, 2010