Volume 29; Issue 4

Russian Microelectronics

Volume 29; Issue 4
4

Reactive ion etching of copper in an RF N2+ BCl3+ Cl2Plasma

Year:
2000
Language:
english
File:
PDF, 424 KB
english, 2000
7

Simulation of epitaxial growth under ion-beam sputtering

Year:
2000
Language:
english
File:
PDF, 1.31 MB
english, 2000
8

Synthesis of multifunction logic modules built on hierarchic neural networks

Year:
2000
Language:
english
File:
PDF, 323 KB
english, 2000
9

Modeling of the gate junction in GaAs MESFETs

Year:
2000
Language:
english
File:
PDF, 345 KB
english, 2000