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Volume 66; Issue 4
Main
ECS Transactions
Volume 66; Issue 4
ECS Transactions
Volume 66; Issue 4
1
Ge Nanostructures Embedded in ZrO2 Dielectric Films for Nonvolatile Memory Applications
Lehninger, D.
,
Khomenkova, L.
,
Roder, C.
,
Gartner, G.
,
Abendroth, B.
,
Beyer, J.
,
Schneider, F.
,
Meyer, D. C.
,
Heitmann, J.
Journal:
ECS Transactions
Year:
2015
Language:
english
File:
PDF, 520 KB
Your tags:
english, 2015
2
Evaluation of Anisotropic Biaxial Stress in Si1-XGex/Ge Mesa-Structure by Oil-Immersion Raman Spectroscopy
Yamamoto, S.
,
Takeuchi, K.
,
Yokogawa, R.
,
Tomita, M.
,
Kosemura, D.
,
Usuda, K.
,
Ogura, A.
Journal:
ECS Transactions
Year:
2015
Language:
english
File:
PDF, 261 KB
Your tags:
english, 2015
3
A New Method to Induce Tensile Stress in Silicon on Insulator Substrate: From Material Analysis to Device Demonstration
Maitrejean, S.
,
Loubet, N.
,
Augendre, E.
,
Morin, P. F.
,
Reboh, S.
,
Bernier, N.
,
Wacquez, R.
,
Lherron, B.
,
Bonnevialle, A.
,
Liu, Q.
,
Hartmann, J.-M.
,
He, H.
,
Halimaoui, A.
,
Li, J.
,
Pilorget, S.
,
Kanyan
Journal:
ECS Transactions
Year:
2015
Language:
english
File:
PDF, 561 KB
Your tags:
english, 2015
4
(Invited) Monolithic Integration of III-V Semiconductors by Selective Area Growth on Si(001) Substrate: Epitaxy Challenges & Applications
Merckling, C.
,
Jiang, S.
,
Liu, Z.
,
Waldron, N.
,
Boccardi, G.
,
Rooyackers, R.
,
Wang, Z.
,
Tian, B.
,
Pantouvaki, M.
,
Collaert, N.
,
Van Campenhout, J.
,
Heyns, M.
,
Van Thourhout, D.
,
Vandervorst, W.
,
Thean
Journal:
ECS Transactions
Year:
2015
Language:
english
File:
PDF, 599 KB
Your tags:
english, 2015
5
(Invited) Plasma Processes for Emerging Silicon-Based MEMS, NEMS and Packaging Applications
McNie, M. E.
Journal:
ECS Transactions
Year:
2015
Language:
english
File:
PDF, 5.03 MB
Your tags:
english, 2015
6
(Invited) Fabrication of High-Quality TiO2 Nanotubes on Conductive Glasses
Li, S.
,
Yang, X.
,
Wei, X.
,
Xuan, Y.
,
Chen, Z. D.
,
Jiang, Y.
Journal:
ECS Transactions
Year:
2015
Language:
english
File:
PDF, 233 KB
Your tags:
english, 2015
7
(Invited) Record-Performance In(Ga)As MOSFETS Targeting ITRS High-Performance and Low-Power Logic
Rodwell, M. J.
,
Huang, C.-Y.
,
Lee, S.
,
Chobpattana, V.
,
Thibeault, B.
,
Mitchell, W.
,
Stemmer, S.
,
Gossard, A.
Journal:
ECS Transactions
Year:
2015
Language:
english
File:
PDF, 287 KB
Your tags:
english, 2015
8
Effect of Process Temperature of Al2O3 Atomic Layer Deposition Using Accurate Process Gasses Supply System
Sugita, H.
,
Koda, Y.
,
Suwa, T.
,
Kuroda, R.
,
Goto, T.
,
Ishii, H.
,
Yamashita, S.
,
Teramoto, A.
,
Sugawa, S.
,
Ohmi, T.
Journal:
ECS Transactions
Year:
2015
Language:
english
File:
PDF, 251 KB
Your tags:
english, 2015
9
(Invited) Technology Options to Reduce Contact Resistance in Nanoscale III-V MOSFETs
Lee, R. T. P.
,
Loh, W. Y.
,
Tieckelmann, R.
,
Orzali, T.
,
Huffman, C.
,
Vert, A.
,
Huang, G.
,
Kelman, M.
,
Karim, Z.
,
Hobbs, C.
,
Hill, R. J. W.
,
Papa Rao, S. S.
Journal:
ECS Transactions
Year:
2015
Language:
english
File:
PDF, 663 KB
Your tags:
english, 2015
10
(Invited) Heterogeneous Nano- to Wide-Scale Co-Integration of Beyond-Si and Si CMOS Devices to Enhance Future Electronics
Thean, A.
,
Collaert, N.
,
Radu, I. P.
,
Waldron, N.
,
Merckling, C.
,
Witters, L.
,
Loo, R.
,
Mitard, J.
,
Rooyackers, R.
,
Vandooren, A.
,
Verhulst, A.
,
Veloso, A.
,
Yakimets, D.
,
Bao, T. H.
,
Chiappe, D.
,
Vays
Journal:
ECS Transactions
Year:
2015
Language:
english
File:
PDF, 2.51 MB
Your tags:
english, 2015
11
(Invited) Si Nanowire Tunnel FETs for Energy Efficient Nanoelectronics
Zhao, Q.-T.
,
Richter, S.
,
Knoll, L.
,
Luong, G. V.
,
Blaeser, S.
,
Schulte-Braucks, C.
,
Schafer, A.
,
Trellenkamp, S.
,
Buca, D.
,
Mantl, S.
Journal:
ECS Transactions
Year:
2015
Language:
english
File:
PDF, 556 KB
Your tags:
english, 2015
12
(Invited) Plasma Etching Technology Challenges for Future CMOS Fabrication Based on Microwave ECR Plasma
Izawa, M.
,
Tanaka, M.
,
Yasui, N.
,
Morimoto, M.
Journal:
ECS Transactions
Year:
2015
Language:
english
File:
PDF, 358 KB
Your tags:
english, 2015
13
(Invited) Phosphor-Free III-Nitride Nanowire White Light Emitting Diodes: Challenges and Prospects
Nguyen, H. P. T.
,
Evo, Y.
Journal:
ECS Transactions
Year:
2015
Language:
english
File:
PDF, 368 KB
Your tags:
english, 2015
14
Improved Structural and Electric Characterstics of Al/ALD-HfO2/Ge MOS Capacitor by Germanium Dioxide and Germanium Oxynitride as Interfacial Layer
Prasher, R.
,
Dass, D.
,
Vaid, R.
Journal:
ECS Transactions
Year:
2015
Language:
english
File:
PDF, 149 KB
Your tags:
english, 2015
15
Effect of Hydrogen on Silicon Nitrides Formation by Microwave Excited Plasma Enhanced Chemical Vapor Deposition
Teramoto, A.
,
Nakao, Y.
,
Suwa, T.
,
Hashimoto, K.
,
Motoya, T.
,
Hirayama, M.
,
Sugawa, S.
,
Ohmi, T.
Journal:
ECS Transactions
Year:
2015
Language:
english
File:
PDF, 122 KB
Your tags:
english, 2015
16
(Invited) Strained-SiGe Channel FinFETs for High-Performance CMOS: Opportunities and Challenges
Hashemi, P.
,
Balakrishnan, K.
,
Ott, J. A.
,
Leobandung, E.
,
Mo, R. T.
,
Park, D.-G.
Journal:
ECS Transactions
Year:
2015
Language:
english
File:
PDF, 1.92 MB
Your tags:
english, 2015
17
Non-Volatile Resistive Memory Switching in Pulsed Laser Deposited Rare-Earth Gallate-GdGaO3 Thin Films
Sharma, Y.
,
Pavunny, S. P.
,
Scott, J. F.
,
Katiyar, R. S.
Journal:
ECS Transactions
Year:
2015
Language:
english
File:
PDF, 1.77 MB
Your tags:
english, 2015
18
Oxide Structure-Dependent Interfacial Layer Defects of HfAlO/SiO2/Si Stack Analyzed by Conductance Method
Ding, Y. M.
,
Misra, D.
Journal:
ECS Transactions
Year:
2015
Language:
english
File:
PDF, 6.01 MB
Your tags:
english, 2015
19
Pulse Width Modulation for Reducing Pulsed MOS Capacitor Measurement Time
Safarnezhad Hendijani, M.
,
Zahedi, S.
Journal:
ECS Transactions
Year:
2015
Language:
english
File:
PDF, 170 KB
Your tags:
english, 2015
20
Novel Buffered Magnetic Logic Gate Grid
Windbacher, T.
,
Makarov, A.
,
Sverdlov, V.
,
Selberherr, S.
Journal:
ECS Transactions
Year:
2015
Language:
english
File:
PDF, 300 KB
Your tags:
english, 2015
21
High Mobility Materials on Insulator for Advanced Technology Nodes
Schwarzenbach, W.
,
Figuet, C.
,
Delprat, D.
,
Veytizou, C.
,
Huyet, I.
,
Tempesta, C.
,
Ecarnot, L.
,
Widiez, J.
,
Loup, V.
,
Hartmann, J.-M.
,
Besson, P.
,
Deguet, C.
,
Mazen, F.
,
Nguyen, B.-Y.
,
Maleville, C.
Journal:
ECS Transactions
Year:
2015
Language:
english
File:
PDF, 656 KB
Your tags:
english, 2015
22
(Invited) Dopant Activation and Deactivation in InGaAs during Sub-Millisecond Thermal Annealing
Sorg, V.
,
Zhang, S. N.
,
Hill, M.
,
Clancy, P.
,
Thompson, M. O.
Journal:
ECS Transactions
Year:
2015
Language:
english
File:
PDF, 222 KB
Your tags:
english, 2015
23
Enhanced Equipment and New Processes As Enabler for Power Technologies on 300mm Substrates
Engelhardt, M.
,
Baumgartl, J.
,
Denifl, G.
,
Ehrentraut, G.
,
Kuenle, M.
,
Stadtmueller, M.
,
Werner, S.
,
Crippa, D.
,
Kraft, M.
Journal:
ECS Transactions
Year:
2015
Language:
english
File:
PDF, 289 KB
Your tags:
english, 2015
24
(Invited) Temperature Influence on Current Leakage and Hysteresis of Nc-CdSe Embedded Zr-Doped HfO2 High-k Dielectric Nonvolatile Memory
Zhang, S.
,
Kuo, Y.
Journal:
ECS Transactions
Year:
2015
Language:
english
File:
PDF, 4.12 MB
Your tags:
english, 2015
25
Room Temperature Photoluminescence Characterization of Interface Quality of SiN/SiO2/Si Prepared under Various Deposition Techniques and Conditions
Yoo, W. S.
,
Kim, B. G.
,
Jin, S. W.
,
Ishigaki, T.
,
Kang, K.
Journal:
ECS Transactions
Year:
2015
Language:
english
File:
PDF, 119 KB
Your tags:
english, 2015
26
Process Optimization of CoSi2 Formation on P-Doped Poly-Si by Hot Wall-Based Rapid Thermal Annealing
Lee, J. Y.
,
Kim, H. J.
,
Kim, E. J.
,
Song, H. S.
,
Yeom, S. J.
,
Ishigaki, T.
,
Kang, K.
,
Yoo, W. S.
Journal:
ECS Transactions
Year:
2015
Language:
english
File:
PDF, 141 KB
Your tags:
english, 2015
27
The Impact of the Ge Concentration in the Source for Vertical Tunnel-FETs
Martino, J. A.
,
Agopian, P. G. D.
,
Neves, F. S.
,
Vandooren, A.
,
Rooyackers, R.
,
Simoen, E.
,
Thean, A.
,
Claeys, C.
Journal:
ECS Transactions
Year:
2015
Language:
english
File:
PDF, 254 KB
Your tags:
english, 2015
28
(Invited) Monolithic Integration of III-V As- and P-Based Devices on Si through Direct MBE Growth and Using Lattice Engineered Substrates
Lubyshev, D.
,
Fastenau, J.
,
Liu, A.
,
Wu, Y.
Journal:
ECS Transactions
Year:
2015
Language:
english
File:
PDF, 2.66 MB
Your tags:
english, 2015
29
Mechanical Analyses of Extended and Localized UTBB Stressors Formed with Ge Enrichment Techniques
Morin, P. F.
,
Grenouillet, L.
,
Loubet, N.
,
Pofelski, A.
,
Lu, D.
,
Liu, Q.
,
Augendre, E.
,
Maitrejean, S.
,
Fiori, V.
,
de Salvo, B.
,
Doris, B.
,
Kleemeier, W.
Journal:
ECS Transactions
Year:
2015
Language:
english
File:
PDF, 1.25 MB
Your tags:
english, 2015
30
On the Origin of the Gate Oxide Failure Evaluated by Raman Spectroscopy
Yokogawa, R.
,
Tomita, M.
,
Mizukoshi, T.
,
Hirano, T.
,
Kusano, K.
,
Sasaki, K.
,
Ogura, A.
Journal:
ECS Transactions
Year:
2015
Language:
english
File:
PDF, 947 KB
Your tags:
english, 2015
31
Influence of Annealing Condition on TSV Pumping and Microstructure Evolution
Jing, X.
,
Lee, U.-H.
,
Xu, C.
,
Niu, Z.
,
Song, C.
,
Zhang, W.
,
Bae, J.-y.
,
Won, J.
Journal:
ECS Transactions
Year:
2015
Language:
english
File:
PDF, 685 KB
Your tags:
english, 2015
32
Solid State Incandescent Light Emitting Device Made of WOx Embedded Zr-Doped HfO2 High-k Stack on Si
Zhang, S.
,
Kuo, Y.
Journal:
ECS Transactions
Year:
2015
Language:
english
File:
PDF, 313 KB
Your tags:
english, 2015
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