54

An XPS study of XeF2 dry etching of tungsten silicide

Year:
1988
Language:
english
File:
PDF, 690 KB
english, 1988
55

XeF2 dry etching of W(100) induced binding energy shifts: An XPS study

Year:
1988
Language:
english
File:
PDF, 764 KB
english, 1988