Lauerhaas: search on Z-Library

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1

[Ultra Clean Soc ISSM2000. Ninth International Symposium on Semiconductor Manufacturing - Tokyo, Japan (26-28 Sept. 2000)] Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130) - Critical issues in post Cu CMP cleaning

Fyen, W., Vos, R., Teerlinck, I., Lagrange, S., Lauerhaas, J., Meuris, M., Mertens, P., Heyns, M.

Year:

2000

Language:

english

File:

PDF, 532 KB

english, 2000

2

Non-Contact Post Cu CMP Cleaning Using Megasonic Energy

Fyen, Wim, Lauerhaas, Jeffrey M., Vos, Ingrid, Meuris, Marc, Mertens, Paul W., Heyns, Marc M.

Journal:

Solid State Phenomena

Year:

2001

File:

PDF, 381 KB

2001

3

Selective Nitride Etching with Phosphoric and Sulfuric Acid Mixtures Using a Single-Wafer Wet Processor

Sih, Vincent, Reimer, Berthold, Ratkovich, Anthony S., Lauerhaas, Jeffrey M., Butterbaugh, Jeffery W.

Journal:

Solid State Phenomena

Year:

2014

Language:

english

File:

PDF, 1.92 MB

english, 2014

4

[IEEE 2000 Symposium on VLSI Technology. Digest of Technical Papers - Honolulu, HI, USA (13-15 June 2000)] 2000 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.00CH37104) - A high performance drying method enabling clustered single wafer wet cleaning

Mertens, P.W., Doumen, G., Lauerhaas, J., Kenis, K., Fyen, W., Meuris, M., Arnauts, S., Devriendt, K., Vos, R., Heyns, M.

Year:

2000

Language:

english

File:

PDF, 244 KB

english, 2000

5

[IEEE 2019 China Semiconductor Technology International Conference (CSTIC) - Shanghai, China (2019.3.18-2019.3.19)] 2019 China Semiconductor Technology International Conference (CSTIC) - Cryogenic Nano-Aerosol: Particle Removal and Damage-Free Cleaning for IC Manufacturing

Lauerhaas, Jeffrey M., Thomes, Gregory P., Schwab, Brent D., Rathman, Christina Ann, Rotondaro, Antonio L. P., Bassett, Derek W., Butterbaugh, Jeffery W., Mbanaso, Chimaobi

Year:

2019

Language:

english

File:

PDF, 1.44 MB

english, 2019

6

[IEEE 2019 China Semiconductor Technology International Conference (CSTIC) - Shanghai, China (2019.3.18-2019.3.19)] 2019 China Semiconductor Technology International Conference (CSTIC) - Cryogenic Nano-Aerosol: Particle Removal and Damage-Free Cleaning for IC Manufacturing

Lauerhaas, Jeffrey M., Thomes, Gregory P., Schwab, Brent D., Rathman, Christina Ann, Rotondaro, Antonio L. P., Bassett, Derek W., Butterbaugh, Jeffery W., Mbanaso, Chimaobi

Year:

2019

File:

PDF, 1.44 MB

2019

7

Formation of filled carbon nanotubes and nanoparticles using polycyclic aromatic hydrocarbon molecules

A.A. Setlur, J.Y. Dai, J.M. Lauerhaas, R.P.H. Chang

Journal:

Year:

1998

Language:

english

File:

PDF, 383 KB

english, 1998

8

Reversible Luminescence Quenching of Porous Si by Solvents

Lauerhaas, Jeffrey M., Credo, Grace M., Heinrich, Julie L., Sailor, Michael J.

Journal:

MRS Proceedings

Year:

1991

Language:

english

File:

PDF, 300 KB

english, 1991

9

Chemical Modification of the Photoluminescence Quenching of Porous Silicon

Lauerhaas, J. M., Sailor, M. J.

Journal:

Year:

1993

Language:

english

File:

PDF, 562 KB

english, 1993

10

Damage-Free Cryogenic Aerosol Clean Processes

Lin, Hong, Chioujones, Kelly, Lauerhaas, Jeff, Freebern, Tim, Yu, Chienfan

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2007

Language:

english

File:

PDF, 2.60 MB

english, 2007

11

Preparation, Characterization, and Damage-Free Processing of Advanced Multiple-Gate FETs

Lauerhaas, Jeffrey M., Cleavelin, Rinn, Xiong, Wei Ze, Mochizuki, Koki, Sherman, Kara, Lee, Hu Cheng, Clappin, Brian, Schulz, Thomas, Schruefer, Klaus

Journal:

Solid State Phenomena

Year:

2008

Language:

english

File:

PDF, 971 KB

english, 2008

12

[Ultra Clean Soc ISSM2000. Ninth International Symposium on Semiconductor Manufacturing - Tokyo, Japan (26-28 Sept. 2000)] Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130) - Single wafer cleaning and drying: particle removal via a non-contact, non-damaging megasonic clean followed by a high performance "Rotagoni" dry

Lauerhaas, J., Mertens, P.W., Fyen, W., Kenis, K., Meuris, M., Nicolosi, T., Bran, M., Fraser, B., Franklin, C., Wu, Y., Heyns, M.

Year:

2000

Language:

english

File:

PDF, 523 KB

english, 2000

13

A nanotube-based field-emission flat panel display

Wang, Q. H., Setlur, A. A., Lauerhaas, J. M., Dai, J. Y., Seelig, E. W., Chang, R. P. H.

Journal:

Applied Physics Letters

Year:

1998

Language:

english

File:

PDF, 439 KB

english, 1998

14

Electrochemiluminescence from porous silicon in formic acid liquid-junction cells

Green, Will H., Lee, Eric J., Lauerhaas, Jeffrey M., Bitner, Theodore W., Sailor, Michael J.

Journal:

Applied Physics Letters

Year:

1995

Language:

english

File:

PDF, 246 KB

english, 1995

15

Single Wafer Selective Silicon Nitride Removal with Phosphoric Acid and Steam

Guo, Ted, Yu, Wesley, Chien, C.C., Lin, Euing, Yang, N.H., Lin, J.F., Wu, J.Y., Ratkovich, Anthony, Kahaian, Don, Butterbaugh, Jeffery W., Lauerhaas, Jeffrey M.

Journal:

Solid State Phenomena

Year:

2014

Language:

english

File:

PDF, 508 KB

english, 2014

16

[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Yield Improvement Using Cryogenic Aerosol for BEOL Defect Removal

Lauerhaas, Jeff, Kok, Yav San, Hamzah, Ameer, Tan, Ling Tze

Year:

2007

Language:

english

File:

PDF, 462 KB

english, 2007

17

The effect of arc parameters on the growth of carbon nanotubes

Lauerhaas, J. M., Dai, J. Y., Setlur, A. A., Chang, R. P. H.

Journal:

Journal of Materials Research

Year:

1997

Language:

english

File:

PDF, 581 KB

english, 1997

18

A method for synthesizing large quantities of carbon nanotubes and encapsulated copper nanowires

Setlur, A. A., Lauerhaas, J. M., Dai, J. Y., Chang, R. P. H.

Journal:

Applied Physics Letters

Year:

1996

Language:

english

File:

PDF, 626 KB

english, 1996

19

[IEEE The 17th Annual SEMI/IEEE ASMC 2006 Conference - Boston, MA (May 22-24, 2006)] The 17th Annual SEMI/IEEE ASMC 2006 Conference - Damage-Free Cryogenic Aerosol Clean Processes

Hong Lin,, Chienfan Yu,, Chioujones, K., Freebern, T., Lauerhaas, J.

Year:

2006

Language:

english

File:

PDF, 522 KB

english, 2006

20

Formation of graphite encapsulated ferromagnetic particles and a mechanism for their growth

Setlur, A. A., Dai, J. Y., Lauerhaas, J. M., Washington, P. L., Chang, R. P. H.

Journal:

Journal of Materials Research

Year:

1998

Language:

english

File:

PDF, 296 KB

english, 1998

21

The Effects of Halogen Exposure on the Photoluminescence of Porous Silicon

Lauerhaas, Jeffrey M., Sailor, Michael J.

Journal:

MRS Proceedings

Year:

1993

Language:

english

File:

PDF, 231 KB

english, 1993

22

[IEEE IEEE/SEMI Conference and Workshop on Advanced Semiconductor Manufacturing 2005. - Munich, Germany (11-12 April 2005)] IEEE/SEMI Conference and Workshop on Advanced Semiconductor Manufacturing 2005. - Advanced cryogenic aerosol cleaning: application to damagefree cleaning of sensitive structured wafers

Jeffrey M. Lauerhaas,, James F. Weygand,, Greg P. Thomes,

Year:

2005

Language:

english

File:

PDF, 532 KB

english, 2005

23

A Theoretical and Experimental Study of Damage-Free BEOL Cleaning with Megasonic Agitation

Lauerhaas, Jeffrey M., Wu, Yi, Bran, Mario, Fraser, Brian, Brause, Eric, Nicolosi, Tom

Journal:

Solid State Phenomena

Year:

2003

File:

PDF, 471 KB

2003

24

Novel Wet Etching of Silicon Nitride in a Single Wafer Spin Processor

Yu, Bill, Huang, Stanley, Yeh, Matt, Chen, C.C., Jang, S.M., Ratkovich, Anthony, Yang, David, Lauerhaas, Jeffrey M., Butterbaugh, Jeffery W.

Journal:

Solid State Phenomena

Year:

2012

Language:

english

File:

PDF, 421 KB

english, 2012

25

Reversible luminescence quenching of porous silicon by solvents

Lauerhaas, Jeffrey M., Credo, Grace M., Heinrich, Julie L., Sailor, Michael J.

Journal:

Journal of the American Chemical Society

Year:

1992

Language:

english

File:

PDF, 289 KB

english, 1992

26

Photoluminescence Quenching of Porous Silicon

Fisher, Diana L., Gamboa, Aurilee, Harper, Jessica, Lauerhaas, Jeffrey M., Sailor, Michael J.

Journal:

MRS Proceedings

Year:

1994

Language:

english

File:

PDF, 644 KB

english, 1994

27

Megasonic, Non-Contact Cleaning Followed by 'Rotagoni' Drying of CMP Wafers

Lauerhaas, Jeffrey M., Mertens, Paul W., Nicolosi, Tom, Kenis, Karine, Fyen, Wim, Heyns, Marc M.

Journal:

Solid State Phenomena

Year:

2001

File:

PDF, 435 KB

2001

28

Advanced Cryogenic Aerosol Cleaning: Small Particle Removal and Damage-Free Performance

Mbanaso, Chimaobi, Butterbaugh, Jeffery W., Becker, David Scott, Printz, Wallace P., Rotondaro, Antonio L.P., Bassett, Derek W., Thomes, Gregory P., Schwab, Brent D., Rathman, Christina Ann, Lauerhaas

Journal:

Solid State Phenomena

Year:

2016

Language:

english

File:

PDF, 6.56 MB

english, 2016

29

Synthesis of carbon-encapsulated nanowires using polycyclic aromatic hydrocarbon precursors

J.Y. Dai, J.M. Lauerhaas, A.A. Setlur, R.P.H. Chang

Journal:

Chemical Physics Letters

Year:

1996

Language:

english

File:

PDF, 673 KB

english, 1996

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