53

Stabilized two-dimensional linewidth enhancement in direct laser lithography

Year:
2013
Language:
english
File:
PDF, 1.42 MB
english, 2013
69

Linewidth Enhancement in Direct Laser Writer by Using an Interference Phenomenon

Year:
2012
Language:
english
File:
PDF, 418 KB
english, 2012
72

Enhancement of height resolution in direct laser lithography

Year:
2012
Language:
english
File:
PDF, 2.18 MB
english, 2012