Benstetter,: search on Z-Library

The world's largest scientific articles store. 70,000,000+ articles for free.

Don't use scam websites

1

The evolution of He nanobubbles in tungsten under fusion-relevant He ion irradiation conditions

Bi, Zhen-Hua, Liu, Dongping, Zhang, Yang, Liu, Lu, Xia, Yang, Hong, Yi, Fan, Hongyu, Benstetter, Guenther, Lei, Guangjiu, Yan, Longwen

Journal:

Year:

2019

Language:

english

File:

PDF, 909 KB

english, 2019

2

Displacement current sensor for contact and intermittent contact scanning capacitance microscopy

Roland Biberger, Guenther Benstetter, Holger Goebel

Journal:

Microelectronics Reliability

Year:

2009

Language:

english

File:

PDF, 482 KB

english, 2009

3

Surface and structural properties of ultrathin diamond-like carbon coatings

Liu, Dongping, Benstetter, Günther, Lodermeier, Edgar, Chen, Xi, Ding, Jianning, Liu, Yanhong, Zhang, Jialiang, Ma, Tengcai

Journal:

Diamond and Related Materials

Year:

2003

Language:

english

File:

PDF, 826 KB

english, 2003

4

Retraction notice to “Cross- and in-plane thermal conductivity of AlN thin films measured using differential 3-omega method” [Surface & Coatings Technology, 320 (2017) 91-96]

Bogner, Manuel, Benstetter, Günther, Fu, Yong Qing

Journal:

Surface and Coatings Technology

Year:

2018

Language:

english

File:

PDF, 240 KB

english, 2018

5

The effect of fusion-relevant He ion flux on the evolution of He nano-bubbles in W

Ni, Weiyuan, Zhang, Yang, Cui, Yunqiu, Niu, Chunjie, Liu, Lu, Fan, Hongyu, Benstetter, GÃ¼nther, Lei, Guangjiu, Liu, Dongping

Journal:

Plasma Physics and Controlled Fusion

Year:

2020

File:

PDF, 12.91 MB

2020

6

Kelvin probe force microscopy – An appropriate tool for the electrical characterisation of LED heterostructures

W. Bergbauer, T. Lutz, W. Frammelsberger, G. Benstetter

Journal:

Microelectronics Reliability

Year:

2006

Language:

english

File:

PDF, 2.13 MB

english, 2006

7

Influence of the manufacturing process on the electrical properties of thin (

M. Lanza, M. Porti, M. Nafria, G. Benstetter, W. Frammelsberger, H. Ranzinger, E. Lodermeier, G. Jaschke

Journal:

Microelectronics Reliability

Year:

2007

Language:

english

File:

PDF, 1.66 MB

english, 2007

8

Intermittent-contact capacitance spectroscopy – A new method for determining C(V) curves with sub-micron lateral resolution

Roland Biberger, Guenther Benstetter, Holger Goebel, Alexander Hofer

Journal:

Microelectronics Reliability

Year:

2010

Language:

english

File:

PDF, 356 KB

english, 2010

9

A review of ULSI failure analysis techniques for DRAMs. Part II: Defect isolation and visualization

Michael Ruprecht, Guenther Benstetter, Doug Hunt

Journal:

Microelectronics Reliability

Year:

2003

Language:

english

File:

PDF, 2.57 MB

english, 2003

10

Characterization of thin and ultra-thin SiO2 films and SiO2/Si interfaces with combined conducting and topographic atomic force microscopy

Werner Frammelsberger, Guenther Benstetter, Thomas Schweinboeck, Richard J Stamp, Janice Kiely

Journal:

Microelectronics Reliability

Year:

2003

File:

PDF, 1.30 MB

2003

11

Intermittent contact scanning capacitance microscopy-An improved method for 2D doping profiling

Peter Breitschopf, Günther Benstetter, Bernhard Knoll, Werner Frammelsberger

Journal:

Microelectronics Reliability

Year:

2005

Language:

english

File:

PDF, 855 KB

english, 2005

12

Intermittent-contact scanning capacitance microscopy versus contact mode SCM applied to 2D dopant profiling

Biberger, Roland, Benstetter, Guenther, Schweinboeck, Thomas, Breitschopf, Peter, Goebel, Holger

Journal:

Microelectronics Reliability

Year:

2008

Language:

english

File:

PDF, 746 KB

english, 2008

13

A review of ULSI failure analysis techniques for DRAMs 1. Defect localization and verification

Guenther Benstetter, Michael W Ruprecht, Douglas B Hunt

Journal:

Microelectronics Reliability

Year:

2002

Language:

english

File:

PDF, 662 KB

english, 2002

14

Surface roughness, mechanical and tribological properties of ultrathin tetrahedral amorphous carbon coatings from atomic force measurements

Dongping Liu, Günther Benstetter, Edgar Lodermeier

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 872 KB

english, 2003

15

SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Brisbane, Australia (Sunday 11 December 2005)] Microelectronics: Design, Technology, and Packaging II - Subthreshold defect generation by intense electron beams in semiconductors for microelectronics

Ghoranneviss, M., Sari, A. H., Hantehzadeh, M. H., Hora, H., Osman, F., Doolan, K. R., Höpfl, R., Benstetter, G., Hariz, Alex J.

Year:

2006

Language:

english

File:

PDF, 1.57 MB

english, 2006

16

Scanning probe microscopy based electrical characterization of thin dielectric and organic semiconductor films

Hofer, Alexander, Biberger, Roland, Benstetter, Günther, Wilke, Björn, Göbel, Holger

Journal:

Microelectronics Reliability

Year:

2013

Language:

english

File:

PDF, 1.69 MB

english, 2013

17

Analysis of crystal defects on GaN-based semiconductors with advanced scanning probe microscope techniques

Hofer, Alexander, Benstetter, Günther, Biberger, Roland, Leirer, Christian, Brüderl, Georg

Journal:

Thin Solid Films

Year:

2013

Language:

english

File:

PDF, 903 KB

english, 2013

18

Combined AFM–SEM study of the diamond nucleation layer on Ir(001)

Gsell, S., Schreck, M., Benstetter, G., Lodermeier, E., Stritzker, B.

Journal:

Diamond and Related Materials

Year:

2007

Language:

english

File:

PDF, 1.77 MB

english, 2007

19

Influence of the incident angle of energetic carbon ions on the properties of tetrahedral amorphous carbon (ta-C) films

Liu, Dongping, Benstetter, Günther, Lodermeier, Edgar, Vancea, Johann

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2003

Language:

english

File:

PDF, 896 KB

english, 2003

20

Nanoscale and Device Level Gate Conduction Variability of High-k Dielectrics-Based Metal-Oxide-Semiconductor Structures

Bayerl, Albin, Lanza, Mario, Porti, Marc, Nafria, Montserrat, Aymerich, Xavier, Campabadal, F., Benstetter, Günther

Journal:

IEEE Transactions on Device and Materials Reliability

Year:

2011

Language:

english

File:

PDF, 738 KB

english, 2011

21

Nanoscale characterization of copper oxide films by Kelvin Probe Force Microscopy

Berthold, Tobias, Benstetter, Guenther, Frammelsberger, Werner, Rodríguez, Rosana, Nafría, Montserrat

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 1.06 MB

english, 2015

22

Differential 3ω method for measuring thermal conductivity of AlN and Si3N4 thin films

Bogner, Manuel, Hofer, Alexander, Benstetter, Günther, Gruber, Hermann, Fu, Richard Y.Q.

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 600 KB

english, 2015

23

Surface damages of polycrystalline W and La 2 O 3 -doped W induced by high-flux He plasma irradiation

Liu, Lu, Li, Shouzhe, Liu, Dongping, Benstetter, Günther, Zhang, Yang, Hong, Yi, Fan, Hongyu, Ni, Weiyuan, Yang, Qi, Wu, Yunfeng, Bi, Zhenhua

Journal:

Journal of Nuclear Materials

Year:

2018

Language:

english

File:

PDF, 1.84 MB

english, 2018

24

On the Limits of Scalpel AFM for the 3D Electrical Characterization of Nanomaterials

Chen, Shaochuan, Jiang, Lanlan, Buckwell, Mark, Jing, Xu, Ji, Yanfeng, Grustan-Gutierrez, Enric, Hui, Fei, Shi, Yuanyuan, Rommel, Mathias, Paskaleva, Albena, Benstetter, Guenther, Ng, Wing H., Mehonic

Journal:

Advanced Functional Materials

Year:

2018

Language:

english

File:

PDF, 3.85 MB

english, 2018

25

Conducting atomic force microscopy for nanoscale electron emissions from various diamond-like carbon films

Dongping Liu, Günther Benstetter

Journal:

Applied Surface Science

Year:

2005

Language:

english

File:

PDF, 437 KB

english, 2005

26

Thickness determination of thin and ultra-thin SiO2 films by C-AFM IV-spectroscopy

Werner Frammelsberger, Guenther Benstetter, Janice Kiely, Richard Stamp

Journal:

Applied Surface Science

Year:

2006

Language:

english

File:

PDF, 591 KB

english, 2006

27

C-AFM-based thickness determination of thin and ultra-thin SiO2 films by use of different conductive-coated probe tips

Werner Frammelsberger, Guenther Benstetter, Janice Kiely, Richard Stamp

Journal:

Applied Surface Science

Year:

2007

Language:

english

File:

PDF, 1.33 MB

english, 2007

28

Surface and electron emission properties of hydrogen-free diamond-like carbon films investigated by atomic force microscopy

Dongping Liu, Sam Zhang, Soon-Eng Ong, Günther Benstetter, Hejun Du

Journal:

Materials Science and Engineering: A

Year:

2006

Language:

english

File:

PDF, 610 KB

english, 2006

29

Simplified tunnelling current calculation for MOS structures with ultra-thin oxides for conductive atomic force microscopy investigations

Werner Frammelsberger, Guenther Benstetter, Richard Stamp, Janice Kiely, Thomas Schweinboeck

Journal:

Materials Science and Engineering: B

Year:

2005

Language:

english

File:

PDF, 196 KB

english, 2005

30

Surface properties of silicon oxide films deposited using low-pressure dielectric barrier discharge

Yejun Yin, Dongping Liu, Dongming Li, Jiandong Gu, Zhiqing Feng, Jinhai Niu, Guenther Benstetter, Sam Zhang

Journal:

Applied Surface Science

Year:

2009

Language:

english

File:

PDF, 1.50 MB

english, 2009

31

Crystallization and silicon diffusion nanoscale effects on the electrical properties of Al2O3 based devices

M. Lanza, M. Porti, M. Nafria, X. Aymerich, G. Benstetter, E. Lodermeier, H. Ranzinger, G. Jaschke, S. Teichert, L. Wilde, P. Michalowski

Journal:

Microelectronic Engineering

Year:

2009

Language:

english

File:

PDF, 646 KB

english, 2009

32

Reliability and gate conduction variability of HfO2-based MOS devices: A combined nanoscale and device level study

A. Bayerl, M. Lanza, M. Porti, F. Campabadal, M. Nafría, X. Aymerich, G. Benstetter

Journal:

Microelectronic Engineering

Year:

2011

Language:

english

File:

PDF, 483 KB

english, 2011

33

A triangular section magnetic solenoid filter for removal of macro- and nano-particles from pulsed graphite cathodic vacuum arc plasmas

Y.H. Liu, J.L. Zhang, D.P. Liu, T.C. Ma, G. Benstetter

Journal:

Surface and Coatings Technology

Year:

2005

Language:

english

File:

PDF, 485 KB

english, 2005

34

Properties and deposition processes of a-C: H films from CH4/Ar dielectric barrier discharge plasmas

Y.H. Liu, J. Li, D.P. Liu, T.C. Ma, G. Benstetter

Journal:

Surface and Coatings Technology

Year:

2006

Language:

english

File:

PDF, 197 KB

english, 2006

35

A review of advanced scanning probe microscope analysis of functional films and semiconductor devices

Günther Benstetter, Roland Biberger, Dongping Liu

Journal:

Thin Solid Films

Year:

2009

Language:

english

File:

PDF, 476 KB

english, 2009

36

Comparison of fluorocarbon film deposition by pulsed/continuous wave and downstream radio frequency plasmas

Dongping Liu, Jiandong Gu, Zhiqing Feng, Dongming Li, Jinhai Niu, Günther Benstetter

Journal:

Year:

2010

Language:

english

File:

PDF, 1.19 MB

english, 2010

37

SPM investigation of diamond-like carbon and carbon nitride films

Dongping Liu, Günther Benstetter, Edgar Lodermeier, Ihar Akula, Ihar Dudarchyk, Yanhong Liu, Tengcai Ma

Journal:

Surface and Coatings Technology

Year:

2003

Language:

english

File:

PDF, 1.43 MB

english, 2003

38

Surface roughness, scratch resistance and tribological properties of hydrogenated amorphous carbon coatings prepared by low-pressure dielectric barrier discharge

D.P. Liu, G. Benstetter, Y.H. Liu, J.L. Zhang, C.S. Ren, T.C. Ma

Journal:

Surface and Coatings Technology

Year:

2003

Language:

english

File:

PDF, 589 KB

english, 2003

39

Deposition of a-C:H films with an ECWR-reactor at 27 MHz: plasma diagnostics and film properties

P. Awakowicz, R. Schwefel, P. Scheubert, G. Benstetter

Journal:

Surface and Coatings Technology

Year:

2001

Language:

english

File:

PDF, 462 KB

english, 2001

40

The treadmill effect in a fixed budget system

Franz Benstetter, Achim Wambach

Journal:

Journal of Health Economics

Year:

2006

Language:

english

File:

PDF, 314 KB

english, 2006

41

Experimental observations of steady anodic vacuum arcs with thermionic cathodes

Journal:

IEEE Transactions on Plasma Science

Year:

1996

Language:

english

File:

PDF, 734 KB

english, 1996

42

A predictive modeling approach to increasing the economic effectiveness of disease management programs

Andreas Bayerstadler, Franz Benstetter, Christian Heumann, Fabian Winter

Journal:

Health Care Management Science

Year:

2014

Language:

english

File:

PDF, 635 KB

english, 2014

43

[IEEE IEEE International Integrated Reliability Workshop - Lake Tahoe, CA, USA (21-24 Oct. 2002)] IEEE International Integrated Reliability Workshop Final Report, 2002. - Combined AFM methods to improve reliability investigations of thin oxides

Frammelsberger, W., Benstetter, G., Stamp, R.J., Stamp, J., Kiely, J.

Year:

2002

Language:

english

File:

PDF, 342 KB

english, 2002

44

Conductivity and Charge Trapping After Electrical Stress in Amorphous and Polycrystalline $\hbox{Al}_{2}\hbox{O}_{3}\hbox{-Based}$ Devices Studied With AFM-Related Techniques

Lanza, Mario, Porti, Marc, Nafría, Montserrat, Aymerich, Xavier, Benstetter, Günther, Lodermeier, Edgar, Ranzinger, Heiko, Jaschke, Gert, Teichert, Steffen, Wilde, Lutz, Michalowski, Pawel Piotr

Journal:

IEEE Transactions on Nanotechnology

Year:

2011

Language:

english

File:

PDF, 1.08 MB

english, 2011

45

Effect of pressure on the deposition of hydrogen-free amorphous carbon and carbon nitride films by the pulsed cathodic arc discharge method

Liu, Dongping, Benstetter, Günther, Wang, Wenchun, Zhang, Jialiang

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2004

Language:

english

File:

PDF, 767 KB

english, 2004

46

Growth processes and surface properties of diamondlike carbon films

Liu, Dongping, Zhang, Jialiang, Liu, Yanhong, Xu, Jun, Benstetter, Günther

Journal:

Journal of Applied Physics

Year:

2005

Language:

english

File:

PDF, 873 KB

english, 2005

47

The effect of the surface layer of tetrahedral amorphous carbon films on their tribological and electron emission properties investigated by atomic force microscopy

D. Liu, G. Benstetter, W. Frammelsberger

Year:

2003

Language:

english

File:

PDF, 450 KB

english, 2003

48

Nanoscale electron field emissions from the bare, hydrogenated, and graphitelike-layer-covered tetrahedral amorphous carbon films

Liu, Dongping, Benstetter, Günther, Frammelsberger, Werner

Journal:

Journal of Applied Physics

Year:

2006

Language:

english

File:

PDF, 1.05 MB

english, 2006

49

Publisher’s Note: “Degradation of polycrystalline HfO2-based gate dielectrics under nanoscale electrical stress” [Appl. Phys. Lett. 99, 103510 (2011)]

Iglesias, V., Lanza, M., Zhang, K., Bayerl, A., Porti, M., Nafría, M., Aymerich, X., Benstetter, G., Shen, Z. Y., Bersuker, G.

Journal:

Applied Physics Letters

Year:

2011

Language:

english

File:

PDF, 220 KB

english, 2011

50

Degradation of polycrystalline HfO2-based gate dielectrics under nanoscale electrical stress

Iglesias, V., Lanza, M., Zhang, K., Bayerl, A., Porti, M., Nafría, M., Aymerich, X., Benstetter, G., Shen, Z. Y., Bersuker, G.

Journal:

Applied Physics Letters

Year:

2011

Language:

english

File:

PDF, 953 KB

english, 2011