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1

Precipitation and redistribution of oxygen in Czochralski‐grown silicon

Shimura, Fumio, Tsuya, Hideki, Kawamura, Tsutomu

Journal:

Applied Physics Letters

Year:

1980

Language:

english

File:

PDF, 592 KB

english, 1980

2

Relationship between Grown-in Defects in Czochralski Silicon Crystals

Umeno, Shigeru, Okui, Masahiko, Hourai, Masataka, Sano, Masakazu, Tsuya, Hideki

Journal:

Japanese Journal of Applied Physics

Year:

1997

File:

PDF, 1.60 MB

1997

3

Formation of Grown-in Defects during Czochralski Silicon Crystal Growth

Nishikawa, Hideshi, Tanaka, Tadami, Yanase, Yoshio, Hourai, Masataka, Sano, Masakazu, Tsuya, Hideki

Journal:

Japanese Journal of Applied Physics

Year:

1997

Language:

english

File:

PDF, 923 KB

english, 1997

4

Selective silicon epitaxial growth for device-isolation technology

Akihiko Ishitani, Hiroshi Kitajima, Kohetsu Tanno, Hideki Tsuya, Nobuhiro Endo, Naoki Kasai, Yukinori Kurogi

Journal:

Microelectronic Engineering

Year:

1986

Language:

english

File:

PDF, 2.67 MB

english, 1986

5

Dependence of Grown-in Defect Behavior on Oxygen Concentration in Czochralski Silicon Crystals

Umeno, Shigeru, Yanase, Yoshio, Hourai, Masataka, Sano, Masakazu, Shida, Yoshiaki, Tsuya, Hideki

Journal:

Japanese Journal of Applied Physics

Year:

1999

Language:

english

File:

PDF, 3.69 MB

english, 1999

6

Present Status and Prospect of Si Wafers for Ultra Large Scale Integration

Journal:

Japanese Journal of Applied Physics

Year:

2004

Language:

english

File:

PDF, 341 KB

english, 2004

7

Effect of alcohol drinking and cigarette smoking on neutrophil functions in adults

Junya Sato, Ippei Takahashi, Takashi Umeda, Masashi Matsuzaka, Kazuma Danjyo, Ryosuke Tsuya, Kazuyuki Kida, Hideki Takami, Shigeyuki Nakaji

Journal:

Year:

2011

Language:

english

File:

PDF, 499 KB

english, 2011

8

Present status and future of silicon crystal technology for high-performance silicon VLSI

Journal:

Electronics and Communications in Japan (Part II: Electronics))

Year:

1990

Language:

english

File:

PDF, 1.03 MB

english, 1990

9

Oxygen diffusion in heavily antimony-, arsenic-, and boron-doped Czochralski silicon wafers

Ono, Toshiaki, Rozgonyi, George A., Asayama, Eiichi, Horie, Hiroshi, Tsuya, Hideki, Sueoka, Koji

Journal:

Applied Physics Letters

Year:

1999

Language:

english

File:

PDF, 277 KB

english, 1999

10

Surface- and inner-microdefects in annealed silicon wafer containing oxygen

Shimura, Fumio, Tsuya, Hideki, Kawamura, Tsutomu

Journal:

Journal of Applied Physics

Year:

1980

Language:

english

File:

PDF, 734 KB

english, 1980

11

Optical damage in transition-metal-doped LiTaO3

Journal:

Journal of Applied Physics

Year:

1975

Language:

english

File:

PDF, 1019 KB

english, 1975

12

Dependence of Second Harmonic Generation on Crystal Inhomogeneity

Journal:

Journal of Applied Physics

Year:

1970

Language:

english

File:

PDF, 723 KB

english, 1970

13

Epitaxial growth of silicon with Hg-Xe lamp light irradiation

Ishitani, Akihiko, Kanamori, Masaru, Tsuya, Hideki

Journal:

Journal of Applied Physics

Year:

1985

Language:

english

File:

PDF, 562 KB

english, 1985

14

Reduction of saucer pit microdefects in epitaxial silicon wafer by intrinsic gettering

Tsuya, Hideki, Tanno, Kohetsu, Shimura, Fumio

Journal:

Applied Physics Letters

Year:

1980

Language:

english

File:

PDF, 405 KB

english, 1980

15

Electrooptic and ferroelectric properties of lithium tantalate single crystals as a function of melt composition

Fujino, Yoshio, Tsuya, Hideki, Sugibuchi, Kiyoshi

Journal:

Year:

1971

Language:

english

File:

PDF, 382 KB

english, 1971

16

A Study on Intrinsic Gettering in CZ Silicon Crystals: Evaluation, Thermal History Dependence, and Enhancement

Journal:

Journal of The Electrochemical Society

Year:

1982

Language:

english

File:

PDF, 1.29 MB

english, 1982

17

Local Loading Effect in Selective Silicon Epitaxy

Ishitani, Akihiko, Endo, Nobuhiro, Tsuya, Hideki

Journal:

Japanese Journal of Applied Physics

Year:

1984

File:

PDF, 456 KB

1984

18

Microdefects Formed in Carbon-Doped CZ Silicon Crystals by Oxygen Precipitation Heat Treatment

Kanamori, Masaru, Tsuya, Hideki

Journal:

Japanese Journal of Applied Physics

Year:

1985

Language:

english

File:

PDF, 286 KB

english, 1985

19

Optical Damage in LiTaO 3

Tsuya, Hideki, Fujino, Yoshio

Journal:

Japanese Journal of Applied Physics

Year:

1973

Language:

english

File:

PDF, 524 KB

english, 1973

20

Self-Induced Thermal Effects on Light Extinction of Lithium Tantalate

Tsuya, Hideki, Fujino, Yoshio, Matsushita, Shigeo

Journal:

Japanese Journal of Applied Physics

Year:

1972

Language:

english

File:

PDF, 151 KB

english, 1972

21

Behaviours of Thermally Induced Microdefects in Heavily Doped Silicon Wafers

Tsuya, Hideki, Kondo, Yojiro, Kanamori, Masaru

Journal:

Japanese Journal of Applied Physics

Year:

1983

Language:

english

File:

PDF, 659 KB

english, 1983

22

A New Method for Transmission Electron Microscope Observation of Grown-in Defects in As-Grown Czochralski Silicon (111) Crystals

Yanase, Yoshio, Ono, Toshiaki, Kitamura, Takafumi, Horie, Hiroshi, Ochiai, Takashi, Okamoto, Setsuo, Tsuya, Hideki

Journal:

Japanese Journal of Applied Physics

Year:

1997

File:

PDF, 1.21 MB

1997

23

Selective Silicon Epitaxy Using Reduced Pressure Technique

Tanno, Kohetsu, Endo, Nobuhiro, Kitajima, Hiroshi, Kurogi, Yukinori, Tsuya, Hideki

Journal:

Japanese Journal of Applied Physics

Year:

1982

File:

PDF, 933 KB

1982

24

Transmission phase control by stacked metal-dielectric hole array with two-dimensional geometric design

Matsui, Takayuki, Miyazaki, Hideki T., Miura, Atsushi, Nomura, Tsuyoshi, Fujikawa, Hisayoshi, Sato, Kazuo, Ikeda, Naoki, Tsuya, Daiju, Ochiai, Masayuki, Sugimoto, Yoshimasa, Ozaki, Masanori, Hangyo, M

Journal:

Year:

2012

Language:

english

File:

PDF, 1.54 MB

english, 2012

25

Wavefront control by stacked metal-dielectric hole array with variable hole shapes

Matsui, Takayuki, Nomura, Tsuyoshi, Miura, Atsushi, Fujikawa, Hisayoshi, Ikeda, Naoki, Tsuya, Daiju, Miyazaki, Hideki T., Sugimoto, Yoshimasa, Ozaki, Masanori, Hangyo, Masanori, Asakawa, Kiyoshi

Journal:

Year:

2013

Language:

english

File:

PDF, 2.03 MB

english, 2013

26

SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III - Determination of COP distribution after SC1 cleaning by a laser particle counter

Fujise, T., Yanase, Y., Hourai, M., Sano, M., Tsuya, Hideki, DeBusk, Damon K., Chen, Ray T.

Year:

1996

Language:

english

File:

PDF, 400 KB

english, 1996

27

Superconducting Properties of Fe-Sn Superimposed Films

Journal:

Journal of the Physical Society of Japan

Year:

1965

File:

PDF, 192 KB

1965

28

Proximity Effect of Superconducting Superimposed Films

Journal:

Journal of the Physical Society of Japan

Year:

1967

File:

PDF, 1.02 MB

1967

29

Tunneling in Superconducting Binary Films

Journal:

Journal of the Physical Society of Japan

Year:

1966

File:

PDF, 186 KB

1966

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