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1

Packing and Sintering of Two-Dimensional Structures Made fro Bimodal Particle Size Distributions

ERIC LINIGER, RISHI RAJ

Journal:

Journal of the American Ceramic Society

Year:

1987

Language:

english

File:

PDF, 1.11 MB

english, 1987

2

Cu CMP and its Challenge for 20nm Nodes and Beyond

Zhang, John H., Tseng, Wei-Tsu, Economikos, Laertis, Fang, Qiang, Zheng, Jianping, Yang, Lin, Canaperi, Donald F., Lofaro, Michael, Kim, Ben, Hu, Chao-Kun, Liniger, Eric G., Murphy, Richard, Leo Tai,

Journal:

MRS Proceedings

Year:

2012

Language:

english

File:

PDF, 1.63 MB

english, 2012

3

ECS Transactions [ECS 220th ECS Meeting - Boston, MA (October 9 - October 14, 2011)] - Robust Ultrathin (20-25 nm)Trilayer Dielectric Low k Cu Damascene Cap for Sub-30 nm Nanoelectric Devices

Nguyen, Son V., Haigh Jr., Thomas, Tagami, Masayoshi, Grill, Alfred, Cohen, Stephan, Shobha, Hosadurga, Hu, Chao-Kun, Adams, Ed, Liniger, Eric, Shaw, Thomas, Cheng, Tien, Yusuff, Hakeem, Xu, Yiheng, K

Year:

2012

Language:

english

File:

PDF, 559 KB

english, 2012

4

Advanced single precursor based pSiCOH k = 2.4 for ULSI interconnects

Priyadarshini, Deepika, Nguyen, Son V., Shobha, Hosadurga, Liniger, Eric, Chen, James H.-C., Huang, Huai, Cohen, Stephan A., Grill, Alfred

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2017

Language:

english

File:

PDF, 1.02 MB

english, 2017

5

Extreme-low k porous pSiCOH dielectrics prepared by PECVD

You, Han, Mennell, Petra, Shoudy, Matthew, Sil, Devika, Dorman, Donald, Cohen, Stephan, Liniger, Eric, Shaw, Thomas, Leo, Tsong-Lin, Canaperi, Donald, Raymond, Mark, Madan, Anita, Grill, Alfred

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2018

Language:

english

File:

PDF, 1.72 MB

english, 2018

6

Spatial Variations in the Sintering Rate of Ordered and Disordered Particle Structures

Eric G. Liniger, Rishi Raj

Journal:

Journal of the American Ceramic Society

Year:

1988

Language:

english

File:

PDF, 403 KB

english, 1988

7

Kinetics of Indentation Cracking in Glass

Robert F. Cook, Eric G. Liniger

Journal:

Journal of the American Ceramic Society

Year:

1993

Language:

english

File:

PDF, 972 KB

english, 1993

8

A Controlled Flaw Technique for Lifetime Characterization

Eric G. Liniger, Robert E. Cook

Journal:

Journal of the American Ceramic Society

Year:

1993

Language:

english

File:

PDF, 408 KB

english, 1993

9

Sigmoidal Indentation–Strength Characteristics of Polycrystalline Alumina

Robert F. Cook, Eric G. Liniger, Rolf W. Steinbrech, Friederike Deuerler

Journal:

Journal of the American Ceramic Society

Year:

1994

Language:

english

File:

PDF, 1.21 MB

english, 1994

10

Integration of Photo-Patternable Low-κ Material into Advanced Cu Back-End-Of-The-Line

Lin, Qinghuang, Nelson, Alshakim, Chen, Shyng-Tsong, Brock, Philip, Cohen, Stephan A., Davis, Blake, Kaplan, Richard, Kwong, Ranee, Liniger, Eric, Neumayer, Debra, Patel, Jyotica, Shobha, Hosadurga, S

Journal:

Japanese Journal of Applied Physics

Year:

2010

Language:

english

File:

PDF, 172 KB

english, 2010

11

Experimental determination of the random-parking limit in two dimensions

Onoda, George Y., Liniger, Eric G.

Journal:

Physical Review A

Year:

1986

Language:

english

File:

PDF, 399 KB

english, 1986

12

Random loose packings of uniform spheres and the dilatancy onset

Onoda, George Y., Liniger, Eric G.

Journal:

Physical Review Letters

Year:

1990

Language:

english

File:

PDF, 151 KB

english, 1990

13

Detection of charge carrier confinement into mobile ionic defects in nanoporous dielectric films for advanced interconnects

Borja, Juan, Plawsky, Joel L., Lu, Toh-Ming, Gill, William N., Shaw, Thomas M., Laibowitz, Robert B., Liniger, Eric G., Cohen, Stephan A., Rosenberg, Robert, Bonilla, Griselda

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2014

Language:

english

File:

PDF, 1.14 MB

english, 2014

14

Evaluation of the modified edge lift-off test for adhesion characterization in microelectronic multifilm applications

Hay, Jack C., Liniger, Eric G., Liu, Xiao Hu

Journal:

Journal of Materials Research

Year:

2001

Language:

english

File:

PDF, 199 KB

english, 2001

15

Effects of Environment on Modlus of Low-k Porous Films Used in Back End of Line

Simonyi, Eva E, Dimitrakopoulos, Christos D, Lane, Michael, Liniger, Eric, Volksen, Willi

Journal:

MRS Proceedings

Year:

2007

Language:

english

File:

PDF, 397 KB

english, 2007

16

[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Comparison of Electromigration in Cu Interconnects with ALD or PVD TaN Liners

Hu, C.-K., Gignac, Lynne, Liniger, Eric, Grunow, Stephan, Simon, Andrew, Liew, San Leong

Year:

2007

Language:

english

File:

PDF, 314 KB

english, 2007

17

Impedance spectroscopy studies of moisture uptake in low-k dielectrics and its relation to reliability

Raja, Archana, Laibowitz, Robert, Liniger, Eric G., Shaw, Thomas M., Heinz, Tony F.

Journal:

Microelectronic Engineering

Year:

2015

Language:

english

File:

PDF, 1.01 MB

english, 2015

18

Line Resistance and Electromigration Variations Induced by Hydrogen-Based Plasma Modifications to the Silicon Carbonitride/Copper Interface

Ryan, E. Todd, Martin, Jeremy, Bonilla, Griselda, Molis, Steven, Spooner, Terry, Widodo, Johnny, Kim, Jae-Hak, Liniger, Eric, Grill, Alfred, Hu, C.-K.

Journal:

Journal of The Electrochemical Society

Year:

2007

Language:

english

File:

PDF, 259 KB

english, 2007

19

ECS Transactions [ECS 220th ECS Meeting - Boston, MA (October 9 - October 14, 2011)] - Electrolyte Additive Chemistry and Feature Size-Dependent Impurity Incorporation for Cu Interconnects

Kelly, James, Nogami, Takeshi, Van der Straten, O., Demarest, James, Li, Juntao, Penny, Chris, Vo, Tuan, Parks, Christopher, DeHaven, Patrick, Hu, Chao-Kun, Liniger, Eric

Year:

2012

Language:

english

File:

PDF, 640 KB

english, 2012

20

Stress-Corrosion Cracking of Spin-on Glass Thin Films

Cook, Robert F, Liniger, Eric G

Journal:

MRS Proceedings

Year:

1998

Language:

english

File:

PDF, 307 KB

english, 1998

21

Properties Development During Curing of Low Dielectric-Constant Spin-On Glasses

Cook, Robert F., Liniger, Eric G., Klaus, David P., Simonyi, Eva E., Cohen, Stephan A.

Journal:

MRS Proceedings

Year:

1998

Language:

english

File:

PDF, 552 KB

english, 1998

22

Characterization of Spin -on Glasses by Microindentation.

Simonyi, Eva E., Lee, K.-W., Cook, Robert F., Liniger, Eric G., Speidell, James

Journal:

MRS Proceedings

Year:

1998

Language:

english

File:

PDF, 550 KB

english, 1998

23

[IEEE 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) - San Jose, CA, USA (2016.5.23-2016.5.26)] 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) - Ruthenium interconnect resistivity and reliability at 48 nm pitch

Xunyuan Zhang,, Huai Huang,, Patlolla, Raghuveer, Wei Wang,, Mont, Frank W., Juntao Li,, Chao-Kun Hu,, Liniger, Eric G., McLaughlin, Paul S., Labelle, Cathy, Ryan, E. Todd, Canaperi, Donald, Spoo

Year:

2016

Language:

english

File:

PDF, 683 KB

english, 2016

24

[IEEE 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) - San Jose, CA, USA (2016.5.23-2016.5.26)] 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) - Post porosity plasma protection integration at 48 nm pitch

Huai Huang,, Lionti, Krystelle, Volksen, Willi, Spooner, Terry, Shobha, Hosadurga, Lee, Joe, Chen, James Hsueh-Chung, Magbitang, Teddie, Peethala, Brown, Liniger, Eric G, Chao Kun Hu,, Huang, Elbert

Year:

2016

Language:

english

File:

PDF, 116 KB

english, 2016

25

Low Hydrogen Silicon Carbon Nitride Cap for High Performance Sub-10 nm Cu-Low k Interconnect

Nguyen, Son van, Shobha, Hosadurga k, Haigh, Thomas J, Yao, Yiping, Tai, Leo, Cohen, Stephan A, Shaw, Thomas M, Hu, Chao-kun, Liniger, Eric, Virwani, Kumar, Kellock, Andrew J, Canaperi, Donald F

Journal:

ECS Transactions

Year:

2017

Language:

english

File:

PDF, 488 KB

english, 2017

26

Characterizing Packing Geometry for Better Sintering

Raj, Rishi, Liniger, Eric

Journal:

Materials and Processing Report

Year:

1988

Language:

english

File:

PDF, 785 KB

english, 1988