55

The Role of Step Coverage Modeling in Blanket Tungsten LPCVD Process Development

Year:
1991
Language:
english
File:
PDF, 1.09 MB
english, 1991
56

Composition Variation Between Cu-Ni Crystallites using TEM and EDS

Year:
1987
Language:
english
File:
PDF, 741 KB
english, 1987
59

Modified Line-of-Sight Model for Deposition of Tungsten Silicide Barrier Layers

Year:
1990
Language:
english
File:
PDF, 344 KB
english, 1990
60

The Impact of Gas Phase and Surface Chemical Reactions on Step Coverage in Lpcvd

Year:
1993
Language:
english
File:
PDF, 2.51 MB
english, 1993
64

Conformality and Composition of Films Deposited at Low Pressures

Year:
1995
Language:
english
File:
PDF, 2.07 MB
english, 1995
66

Evolution of Surface Morphology During Cu(TMVS)(hfac) Sourced Copper CVD

Year:
2000
Language:
english
File:
PDF, 700 KB
english, 2000
73

Soft Elastohydrodynamic Lubrication With Roughness

Year:
2003
Language:
english
File:
PDF, 991 KB
english, 2003
75

Surface Evolution During Semiconductor Processing

Year:
1998
Language:
english
File:
PDF, 1.94 MB
english, 1998