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1

Microfabrication of 3D silicon MEMS structures using gray-scale lithography and deep reactive ion etching

WAITS, C, MORGAN, B, KASTANTIN, M, GHODSSI, R

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 402 KB

english, 2005

2

Effectiveness of short message service-based intervention (SMS) on self-care in type 2 diabetes: A feasibility study

Peimani, Maryam, Rambod, Camelia, Omidvar, Maryam, Larijani, Bagher, Ghodssi-Ghassemabadi, Robabeh, Tootee, Ali, Esfahani, Ensieh Nasli

Journal:

Primary Care Diabetes

Year:

2015

Language:

english

File:

PDF, 802 KB

english, 2015

3

Residual stress and fracture in thick tetraethylorthosilicate (TEOS) and silane-based PECVD oxide films

X. Zhang, K.-S. Chen, R. Ghodssi, A.A. Ayón, S.M. Spearing

Journal:

Sensors and Actuators A: Physical

Year:

2001

Language:

english

File:

PDF, 328 KB

english, 2001

4

High rate performance of virus enabled 3D n-type Si anodes for lithium-ion batteries

Xilin Chen, Konstantinos Gerasopoulos, Juchen Guo, Adam Brown, Reza Ghodssi, James N. Culver, Chunsheng Wang

Journal:

Electrochimica Acta

Year:

2011

Language:

english

File:

PDF, 567 KB

english, 2011

5

An electrostatic actuator for fatigue testing of low-stress LPCVD silicon nitride thin films

Wen-Hsien Chuang, Rainer K. Fettig, Reza Ghodssi

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 440 KB

english, 2005

6

A Microfabricated Spiral-Groove Turbopump Supported on Microball Bearings

Waits, Christopher Mike, McCarthy, Matthew, Ghodssi, Reza

Journal:

Journal of Microelectromechanical Systems

Year:

2010

Language:

english

File:

PDF, 1.03 MB

english, 2010

7

Electrical Characterization of Benzocyclobutene Polymers for Electric Micromachines

Modafe, A., Ghalichechian, N., Kleber, B., Ghodssi, R.

Journal:

IEEE Transactions on Device and Materials Reliability

Year:

2004

Language:

english

File:

PDF, 1.39 MB

english, 2004

8

In situ characterization of charge rate dependent stress and structure changes in V2O5 cathode prepared by atomic layer deposition

Jung, Hyun, Gerasopoulos, Konstantinos, Talin, A. Alec, Ghodssi, Reza

Journal:

Journal of Power Sources

Year:

2017

Language:

english

File:

PDF, 1.77 MB

english, 2017

9

A peer support intervention in improving glycemic control in patients with type 2 diabetes

Peimani, Maryam, Monjazebi, Fateme, Ghodssi-Ghassemabadi, Robabeh, Nasli-Esfahani, Ensieh

Journal:

Patient Education and Counseling

Year:

2017

Language:

english

File:

PDF, 464 KB

english, 2017

10

Chitosan to electroaddress biological components in lab-on-a-chip devices

Y. Liu, X.-W. Shi, E. Kim, L.M. Robinson, C.K. Nye, R. Ghodssi, G.W. Rubloff, W.E. Bentley, G.F. Payne

Journal:

Carbohydrate Polymers

Year:

2011

Language:

english

File:

PDF, 414 KB

english, 2011

11

Microfabrication of 3D silicon MEMS structures using gray-scale lithography and deep reactive ion etching

C.M. Waits, B. Morgan, M. Kastantin, R. Ghodssi

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 402 KB

english, 2005

12

Dynamic characterization of a linear electrostatic micromotor supported on microball bearings

Nima Ghalichechian, Alireza Modafe, Jeffrey H Lang, Reza Ghodssi

Journal:

Sensors and Actuators A: Physical

Year:

2007

Language:

english

File:

PDF, 1.37 MB

english, 2007

13

Mechanical property measurement of InP-based MEMS for optical communications

Marcel W. Pruessner, Todd T. King, Daniel P. Kelly, Rohit Grover, Lynn C. Calhoun, Reza Ghodssi

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 554 KB

english, 2003

14

Design optimization for bioMEMS studies of enzyme-controlled metabolic pathways

Xiaolong Luo, Dean Larios Berlin, Susan Buckhout-White, William E. Bentley, Gregory F. Payne, Reza Ghodssi, Gary W. Rubloff

Journal:

Biomedical Microdevices

Year:

2008

Language:

english

File:

PDF, 915 KB

english, 2008

15

A fast-response microfluidic gas concentrating device for environmental sensing

Sheng Li, Jonathan C. Day, Jung J. Park, Christopher P. Cadou, Reza Ghodssi

Journal:

Sensors and Actuators A: Physical

Year:

2007

Language:

english

File:

PDF, 1.75 MB

english, 2007

16

Closed-loop control of a long-range micropositioner using integrated photodiode sensors

Mustafa Ilker Beyaz, Matthew McCarthy, Nima Ghalichechian, Reza Ghodssi

Journal:

Sensors and Actuators A: Physical

Year:

2009

Language:

english

File:

PDF, 3.24 MB

english, 2009

17

[MEMS Reference Shelf] MEMS Materials and Processes Handbook Volume 1 || Materials and Processes in Shape Memory Alloy

Ghodssi, Reza, Lin, Pinyen

Year:

2011

Language:

english

File:

PDF, 2.92 MB

english, 2011

18

Virus-Enabled Silicon Anode for Lithium-Ion Batteries

Ghodssi, Reza, Culver, James N., Chen, Xilin, Gerasopoulos, Konstantinos, Guo, Juchen, Brown, Adam, Wang, Chunsheng

Journal:

Year:

2010

Language:

english

File:

PDF, 2.71 MB

english, 2010

19

Electrochemical performance of the nanostructured biotemplated V2O5 cathode for lithium-ion batteries

Ekaterina Pomerantseva, Konstantinos Gerasopoulos, Xinyi Chen, Gary Rubloff, Reza Ghodssi

Journal:

Journal of Power Sources

Year:

2012

Language:

english

File:

PDF, 470 KB

english, 2012

20

An ALD aluminum oxide passivated Surface Acoustic Wave sensor for early biofilm detection

Young Wook Kim, Saeed Esmaili Sardari, Mariana T. Meyer, Agis A. Iliadis, Hsuan Chen Wu, William E. Bentley, Reza Ghodssi

Journal:

Sensors and Actuators B: Chemical

Year:

2012

Language:

english

File:

PDF, 1.32 MB

english, 2012

21

A Cantilever Sensor With an Integrated Optical Readout for Detection of Enzymatically Produced Homocysteine

Koev, S.T., Fernandes, R., Bentley, W.E., Ghodssi, R.

Journal:

IEEE Transactions on Biomedical Circuits and Systems

Year:

2009

Language:

english

File:

PDF, 483 KB

english, 2009

22

[MEMS Reference Shelf] MEMS Materials and Processes Handbook Volume 1 || MEMS Lithography and Micromachining Techniques

Ghodssi, Reza, Lin, Pinyen

Year:

2011

Language:

english

File:

PDF, 3.35 MB

english, 2011

23

Chitosan: an integrative biomaterial for lab-on-a-chip devices

Koev, S. T., Dykstra, P. H., Luo, X., Rubloff, G. W., Bentley, W. E., Payne, G. F., Ghodssi, R.

Journal:

Year:

2010

Language:

english

File:

PDF, 500 KB

english, 2010

24

A new method for producing graded index PMMA waveguides

White, V., Ghodssi, R., Fish, G., Herdey, C., Liu, H., Denton, D.D., McCaughan, L.

Journal:

IEEE Photonics Technology Letters

Year:

1995

Language:

english

File:

PDF, 180 KB

english, 1995

25

Monolithic suspended optical waveguides for InP MEMS

D.P. Kelly, M.W. Pruessner, K. Amarnath, M. Datta, S. Kanakaraju, L.C. Calhoun, R. Ghodssi

Journal:

IEEE Photonics Technology Letters

Year:

2004

Language:

english

File:

PDF, 160 KB

english, 2004

26

Biofabrication with Chitosan

Yi, Hyunmin, Wu, Li-Qun, Bentley, William E., Ghodssi, Reza, Rubloff, Gary W., Culver, James N., Payne, Gregory F.

Journal:

Biomacromolecules

Year:

2005

Language:

english

File:

PDF, 538 KB

english, 2005

27

Accessing biology's toolbox for the mesoscale biofabrication of soft matter

Payne, Gregory F., Kim, Eunkyoung, Cheng, Yi, Wu, Hsuan-Chen, Ghodssi, Reza, Rubloff, Gary W., Raghavan, Srinivasa R., Culver, James N., Bentley, William E.

Journal:

Year:

2013

Language:

english

File:

PDF, 1.49 MB

english, 2013

28

[MEMS Reference Shelf] MEMS Materials and Processes Handbook Volume 1 || Additive Processes for Metals

Ghodssi, Reza, Lin, Pinyen

Year:

2011

Language:

english

File:

PDF, 2.16 MB

english, 2011

29

Indium Phosphide MEMS Cantilever Resonator Sensors Utilizing a Pentacene Absorption Layer

Siwak, N., Xiao Zhu Fan,, Hines, D., Kanakaraju, S., Goldsman, N., Ghodssi, R.

Journal:

Journal of Microelectromechanical Systems

Year:

2009

Language:

english

File:

PDF, 638 KB

english, 2009

30

Monitoring of actuation conditions in a micro-turbo-generator

Beyaz, Mustafa Ilker, Hanrahan, Brendan, Feldman, Jeremy, Ghodssi, Reza

Journal:

IEEE Sensors Journal

Year:

2013

Language:

english

File:

PDF, 630 KB

english, 2013

31

An Integrated Permanent-Magnet Microturbogenerator Supported on Microball Bearings

Beyaz, Mustafa, Hanrahan, Brendan, Feldman, Jeremy, Ghodssi, Reza

Journal:

Journal of Microelectromechanical Systems

Year:

2013

Language:

english

File:

PDF, 1.14 MB

english, 2013

32

Mechanical Property Characterization of LPCVD Silicon Nitride Thin Films at Cryogenic Temperatures

Chuang, W.-H., Luger, T., Fettig, R.K., Ghodssi, R.

Journal:

Journal of Microelectromechanical Systems

Year:

2004

Language:

english

File:

PDF, 2.60 MB

english, 2004

33

Tobacco mosaic virus: A biological building block for micro/nano/bio systems

Fan, Xiao Z., Pomerantseva, Ekaterina, Gnerlich, Markus, Brown, Adam, Gerasopoulos, Konstantinos, McCarthy, Matthew, Culver, James, Ghodssi, Reza

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2013

Language:

english

File:

PDF, 11.19 MB

english, 2013

34

[IEEE 2010 Ninth IEEE Sensors Conference (SENSORS 2010) - Kona, HI (2010.11.1-2010.11.4)] 2010 IEEE Sensors - A bacterial biofilm Surface Acoustic Wave sensor for real time biofilm growth monitoring

Young Wook Kim,, Sardari, Saeed Esmaili, Iliadis, Agis A, Ghodssi, Reza

Year:

2010

Language:

english

File:

PDF, 1.09 MB

english, 2010

35

An electric induction micromotor

S. Nagle, C. Livermore, L. Frechette, R. Ghodssi, J. Lang

Journal:

Journal of Microelectromechanical Systems

Year:

2005

Language:

english

File:

PDF, 2.13 MB

english, 2005

36

Vertically-Shaped Tunable MEMS Resonators

Morgan, B., Ghodssi, R.

Journal:

Journal of Microelectromechanical Systems

Year:

2008

Language:

english

File:

PDF, 745 KB

english, 2008

37

Design, Fabrication, and Characterization of a Rotary Micromotor Supported on Microball Bearings

Ghalichechian, N., Modafe, A., Beyaz, M.I., Ghodssi, R.

Journal:

Journal of Microelectromechanical Systems

Year:

2008

Language:

english

File:

PDF, 1.29 MB

english, 2008

38

Automated Two-Axes Optical Fiber Alignment Using Grayscale Technology

Morgan, Brian, McGee, Jonathan, Ghodssi, Reza

Journal:

Journal of Microelectromechanical Systems

Year:

2007

Language:

english

File:

PDF, 1.24 MB

english, 2007

39

InP-based optical waveguide MEMS switches with evanescent coupling mechanism

Pruessner, M.W., Amarnath, K., Datta, M., Kelly, D.P., Kanakaraju, S., Ping-Tong Ho,, Ghodssi, R.

Journal:

Journal of Microelectromechanical Systems

Year:

2005

Language:

english

File:

PDF, 1.59 MB

english, 2005

40

[IEEE TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Denver, CO, USA (2009.06.21-2009.06.25)] TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - A MEMS turbopump for fuel delivery in small-scale power systems

Waits, C. M., McCarthy, M., Ghodssi, R.

Year:

2009

Language:

english

File:

PDF, 253 KB

english, 2009

41

Development of a Deep Silicon Phase Fresnel Lens Using Gray-Scale Lithography and Deep Reactive Ion Etching

Morgan, B., Waits, C.M., Krizmanic, J., Ghodssi, R.

Journal:

Journal of Microelectromechanical Systems

Year:

2004

Language:

english

File:

PDF, 546 KB

english, 2004

42

Double-Exposure Grayscale Photolithography

Mosher, L., Waits, C.M., Morgan, B., Ghodssi, R.

Journal:

Journal of Microelectromechanical Systems

Year:

2009

Language:

english

File:

PDF, 651 KB

english, 2009

43

A Novel Benzocyclobutene-Based Device for Studying the Dynamics of Heat Transfer During the Nucleation Process

Moghaddam, Saeed, Kiger, Kenneth T., Modafe, Alireza, Ghodssi, Reza

Journal:

Journal of Microelectromechanical Systems

Year:

2007

Language:

english

File:

PDF, 1.13 MB

english, 2007

44

High-speed microfabricated silicon turbomachinery and fluid film bearings

Frechette, L.G., Jacobson, S.A., Breuer, K.S., Ehrich, F.F., Ghodssi, R., Khanna, R., Chee Wei Wong,, Xin Zhang,, Schmidt, M.A., Epstein, A.H.

Journal:

Journal of Microelectromechanical Systems

Year:

2005

Language:

english

File:

PDF, 3.00 MB

english, 2005

45

Dynamic Friction and Wear in a Planar-Contact Encapsulated Microball Bearing Using an Integrated Microturbine

McCarthy, M., Waits, C.M., Ghodssi, R.

Journal:

Journal of Microelectromechanical Systems

Year:

2009

Language:

english

File:

PDF, 1.25 MB

english, 2009

46

Fabrication of micronozzles using low-temperature wafer-level bonding with SU-8

Li, Sheng, Freidhoff, Carl B, Young, Robert M, Ghodssi, Reza

Journal:

Journal of Micromechanics and Microengineering

Year:

2003

Language:

english

File:

PDF, 306 KB

english, 2003

47

Wear mechanisms in microfabricated ball bearing systems

Hanrahan, Brendan, Misra, Saswat, Waits, C. Mike, Ghodssi, Reza

Journal:

Year:

2015

Language:

english

File:

PDF, 7.43 MB

english, 2015

48

Vibration-Based Diagnostics for Rotary MEMS

Feldman, Jeremy, Hanrahan, Brendan Michael, Misra, Saswat, Fan, Xiao Zhu, Waits, Christopher Mike, Mitcheson, Paul D., Ghodssi, Reza

Journal:

Journal of Microelectromechanical Systems

Year:

2015

Language:

english

File:

PDF, 1.78 MB

english, 2015

49

Performance of integrated retainer rings in silicon micro-turbines with thrust style micro-ball bearings

Hergert, Robert J, Hanrahan, Brendan, Ghodssi, Reza, Holmes, Andrew S

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 1.01 MB

english, 2013

50

[MEMS Reference Shelf] MEMS Materials and Processes Handbook Volume 1 || Additive Processes for Semiconductors and Dielectric Materials

Ghodssi, Reza, Lin, Pinyen

Year:

2011

Language:

english

File:

PDF, 1.41 MB

english, 2011