75

Ultraviolet radiation induced defect creation in buried SiO2 layers

Year:
1991
Language:
english
File:
PDF, 578 KB
english, 1991
82

Self-Interstitial Migration in Si Implanted with Oxygen

Year:
1987
Language:
english
File:
PDF, 563 KB
english, 1987
94

Ion Implantation Technology–92 || SIMOX material manufacturability

Year:
1993
Language:
english
File:
PDF, 1.49 MB
english, 1993