68

Thin-film silicon MEMS electronics for ubiquitous sensors applications (uMEMS)

Year:
2018
Language:
english
File:
PDF, 493 KB
english, 2018
69

Performance of Thin Film Silicon MEMS on Flexible Plastic Substrates

Year:
2007
Language:
english
File:
PDF, 4.58 MB
english, 2007