67

Generation of stacking faults in 4H-SiC epilayer induced by oxidation

Year:
2018
Language:
english
File:
PDF, 3.19 MB
english, 2018
72

Physics and Technology of Silicon Carbide Devices || Thermal Oxidation Mechanism of Silicon Carbide

Year:
2012
Language:
english
File:
PDF, 4.92 MB
english, 2012