Baklanov, A: search on Z-Library

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101

Advanced PECVD SiCOH low-k films with low dielectric constant and/or high Young’s modulus

Verdonck, Patrick, Wang, Cong, Le, Quoc Toan, Souriau, Laurent, Vanstreels, Kris, Krishtab, Mikhail, Baklanov, Mikhail

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.47 MB

english, 2014

102

Porous low dielectric constant materials for microelectronics

Baklanov, M. R, Maex, K.

Journal:

Philosophical Transactions Mathematical Physical & Engineering Sciences

Year:

2006

Language:

english

File:

PDF, 518 KB

english, 2006

103

Supercritical carbon dioxide etching of transition metal (Cu, Ni, Co, Fe) thin films

Rasadujjaman, Md, Nakamura, Yoshiki, Watanabe, Mitsuhiro, Kondoh, Eiichi, Baklanov, Mikhail R.

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 1.17 MB

english, 2016

104

Migrant entrepreneurship, economic activity and export performance: mapping the Danish trends

Baklanov, Nikita, Rezaei, Shahamak, Vang, Jan, Dana, Léo Paul

Journal:

International Journal of Entrepreneurship and Small Business

Year:

2014

Language:

english

File:

PDF, 379 KB

english, 2014

105

Special Issue of Journal of Urban Climate: Modelling of urban air pollution and climate interactions

Sokhi, Ranjeet S, Baklanov, Alexander, Piringer, Martin

Journal:

Year:

2017

Language:

english

File:

PDF, 76 KB

english, 2017

106

Urban meteorological modelling for nuclear emergency preparedness

Alexander Baklanov, Jens Havskov Sørensen, Steen Cordt Hoe, Bjarne Amstrup

Journal:

Journal of Environmental Radioactivity

Year:

2006

Language:

english

File:

PDF, 973 KB

english, 2006

107

Monitoring of forest damage in the Kola Peninsula, Northern Russia due to smelting industry

Olga Rigina, Alexander Baklanov, Olle Hagner, Håkan Olsson

Journal:

Science of The Total Environment

Year:

1999

Language:

english

File:

PDF, 4.22 MB

english, 1999

108

Natural-resource space: Differentiation, boundaries, types

P. Ya. Baklanov,V. P. Karakin

Journal:

Geography and Natural Resources

Year:

2013

Language:

english

File:

PDF, 3.61 MB

english, 2013

109

[IEEE Proceedings of the IEEE 2004 International Interconnect Technology Conference - Burlingame, CA, USA (7-9 June 2004)] Proceedings of the IEEE 2004 International Interconnect Technology Conference (IEEE Cat. No.04TH8729) - Challenges of clean/strip processing for Cu/low-k technology

Baklanov, M.R., Le, Q.T., Kesters, E., Iacopi, F., Van Aelst, J., Struyf, H., Boullart, W., Vanhaelemeersch,, Maex, K.

Year:

2004

Language:

english

File:

PDF, 207 KB

english, 2004

110

Study of porogen removal by atomic hydrogen generated by hot wire chemical vapor deposition for the fabrication of advanced low-k thin films

Godavarthi, S., Wang, C., Verdonck, P., Matsumoto, Y., Koudriavtsev, I., Dutt, A., Tielens, H., Baklanov, M.R.

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 764 KB

english, 2015

111

ECS Transactions [ECS China Semiconductor Technology International Conference 2010 (CSTIC 2010) - Shanghai, China (March 18 - March 19, 2010)] - Influence of the Top Chamber Window Temperature on the STI Etch Process

Shamiryan, Denis, Danilkin, Evgeny, Tinck, Stefan, Klick, Michael, Milenin, Alexey, Baklanov, Mikhail M., Boullart, Werner

Year:

2010

Language:

english

File:

PDF, 157 KB

english, 2010

112

Investigation of hydrogen isotopes interaction processes with lithium under neutron irradiation

Zaurbekova, Zhanna, Skakov, Mazhyn, Ponkratov, Yuriy, Kulsartov, Timur, Gordienko, Yuriy, Tazhibayeva, Irina, Baklanov, Viktor, Barsukov, Nikolay, Chikhray, Yevgen

Journal:

Fusion Engineering and Design

Year:

2016

Language:

english

File:

PDF, 1.25 MB

english, 2016

113

A Book on Methods of Measuring Labor Productivity

Baklanov, G., Rotshtein, A. I.

Journal:

Problems of Economic Transition

Year:

1959

Language:

english

File:

PDF, 654 KB

english, 1959

114

Aerosol diffusion battery: The retrieval of particle size distribution with the help of analytical formulas

Onischuk, A. A., Baklanov, A. M., Valiulin, S. V., Moiseenko, P. P., Mitrochenko, V. G.

Journal:

Aerosol Science & Technology

Year:

2017

Language:

english

File:

PDF, 922 KB

english, 2017

115

Characterization of Cu surface cleaning by hydrogen plasma

M. R. Baklanov, D. G. Shamiryan, Z. Tökei, G. P. Beyer, T. Conard, S. Vanhaelemeersch, K. Maex

Year:

2001

Language:

english

File:

PDF, 973 KB

english, 2001

116

MASTER OT J004207.99+405501.1/M31LRN 2015 luminous red nova in M31: discovery, light curve, hydrodynamics and evolution

Lipunov, V. M., Blinnikov, S., Gorbovskoy, E., Tutukov, A., Baklanov, P., Krushinski, V., Tiurina, N., Balanutsa, P., Kuznetsov, A., Kornilov, V., Gorbunov, I., Shumkov, V., Vladimirov, V., Gress, O.,

Journal:

Monthly Notices of the Royal Astronomical Society

Year:

2017

Language:

english

File:

PDF, 1.89 MB

english, 2017

117

[IEEE 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - Xian, China (2012.10.29-2012.11.1)] 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology - Interconnect materials challenges for sub 20 nm technology nodes: Ultra low-k dielectrics

Baklanov, Mikhail R.

Year:

2012

Language:

english

File:

PDF, 233 KB

english, 2012

118

Study of sulfur heterogeneous nucleation from supersaturated vapor on tungsten oxide and sodium chloride seed particles. Determination of contact angle of critical sulfur nuclei

Valiulin, S. V., Vosel’, S. V., Karasev, V. V., Onischuk, A. A., Baklanov, A. M., Purtov, P. A.

Journal:

Colloid Journal

Year:

2014

Language:

english

File:

PDF, 1.28 MB

english, 2014

119

[IEEE 2013 8th International Forum on Strategic Technology (IFOST) - Ulaanbaatar, Mongolia (2013.06.28-2013.07.1)] Ifost - The Diffusion Mechanism of Polymer Transfer Through Nanopores

Arkhincheev, V.E, Baklanov, M.R, Yumozapova, N.Y.

Year:

2013

Language:

english

File:

PDF, 383 KB

english, 2013

120

Electrical Reliability Challenges of Advanced Low-k Dielectrics

Wu, C., Li, Y., Baklanov, M. R., Croes, K.

Journal:

ECS Journal of Solid State Science and Technology

Year:

2014

Language:

english

File:

PDF, 885 KB

english, 2014

121

Catalytic synthesis of polyfluoroalkyl chloroformates

A. I. Rakhimov, L. A. Butkovskaya, A. V. Baklanov

Journal:

Russian Journal of General Chemistry

Year:

2008

Language:

english

File:

PDF, 101 KB

english, 2008

122

Parameterisation of radionuclide deposition in atmospheric long-range transport modelling

A. Baklanov, J.H. Sørensen

Journal:

Physics and Chemistry of the Earth, Part B: Hydrology, Oceans and Atmosphere

Year:

2001

Language:

english

File:

PDF, 1.12 MB

english, 2001

123

Determination of pore size distribution in thin films by ellipsometric porosimetry

Baklanov, M. R., Mogilnikov, K. P., Polovinkin, V. G., Dultsev, F. N.

Journal:

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures

Year:

2000

Language:

english

File:

PDF, 339 KB

english, 2000

124

BCl3/N2 Plasma for Advanced non-Si Gate Patterning

Shamiryan, Denis, Paraschiv, Vasile, Eslava-Fernandez, Salvador, Demand, Marc, Baklanov, Mikhail, Boullart, Werner

Journal:

MRS Proceedings

Year:

2006

Language:

english

File:

PDF, 417 KB

english, 2006

125

Quark deconfinement as a supernova explosion engine for massive blue supergiant stars

Fischer, Tobias, Bastian, Niels-Uwe F., Wu, Meng-Ru, Baklanov, Petr, Sorokina, Elena, Blinnikov, Sergei, Typel, Stefan, Klähn, Thomas, Blaschke, David B.

Journal:

Nature Astronomy

Year:

2018

Language:

english

File:

PDF, 3.03 MB

english, 2018

126

Regional Cardiac Sympathetic Innervation Early and Late After Transmyocardial Laser Revascularization

G. Chad Hughes, Dmitri V. Baklanov, Shankha S. Biswas, Anne M. Pippen, Timothy R. DeGrado, R. Edward Coleman, Carolyn K. Landolfo, James E. Lowe, Brian H. Annex, Kevin P. Landolfo

Journal:

Journal of Cardiac Surgery

Year:

2004

Language:

english

File:

PDF, 129 KB

english, 2004

127

Advanced Interconnects for ULSI Technology (Baklanov/Advanced Interconnects for ULSI Technology) || Wet Clean Applications in Porous Low-k Patterning Processes

Baklanov, Mikhail R., Ho, Paul S., Zschech, Ehrenfried

Year:

2012

Language:

english

File:

PDF, 527 KB

english, 2012

128

Changes of UV Optical Properties of Plasma Damaged Low-k Dielectrics for Sidewall Damage Scatterometry

Marsik, Premysl, Urbanowicz, Adam, Vinokur, Klara, Cohen, Yoel, Baklanov, Mikhail R

Journal:

MRS Proceedings

Year:

2008

Language:

english

File:

PDF, 510 KB

english, 2008

129

Elastic Scattering of Neutral Fluorine on Si, O, C, and H Atoms in the Range of the Relative Kinetic Energies of 2–200 eV

Palov, A., Zhang, Jing, Baklanov, M., Wei, Shuhua

Journal:

Technical Physics Letters

Year:

2019

File:

PDF, 597 KB

2019

130

Characterisation of HF-last cleaning of ion-implanted Si surfaces

E. Kondoh, M.R. Baklanov, F. Jonckx, K. Maex

Journal:

Materials Science in Semiconductor Processing

Year:

1998

Language:

english

File:

PDF, 514 KB

english, 1998

131

Influence of the ion bombardment of O2 plasmas on low-k materials

Patrick Verdonck, Vladimir Šamara, Alec Goodyear, Abdelkarim Ferchichi, Els Van Besien, Mikhail R. Baklanov, Nicholas Braithwaite

Journal:

Thin Solid Films

Year:

2011

Language:

english

File:

PDF, 546 KB

english, 2011

132

Low-k a-SiCO:H films as diffusion barriers for advanced interconnects

Van Besien, Els, Singh, Arjun, Barbarin, Yohan, Verdonck, Patrick, Dekkers, Harold F.W., Vanstreels, Kris, de Marneffe, Jean-François, Baklanov, Mikhail R., Van Elshocht, Sven

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 488 KB

english, 2014

133

Evaluation of Post Metal Etch Cleaning by Analyzing the Chemical Compositions and Distributions on the Etched Al Surface

Li, Hua Ling, Baklanov, Mikhail R., Boullart, Werner, Conard, Thierry, Brijs, B., Vandervorst, W., Maex, Karen, Froyen, Ludo

Journal:

Solid State Phenomena

Year:

1999

File:

PDF, 342 KB

1999

134

Effect of terminal methyl group concentration on critical properties and plasma resistance of organosilicate low-k dielectrics

Rezvanov, Askar A., Miakonkikh, Andrey V., Seregin, Dmitry S., Vishnevskiy, Alexey S., Vorotilov, Konstantin A., Rudenko, Konstantin V., Baklanov, Mikhail R.

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2020

Language:

english

File:

PDF, 5.26 MB

english, 2020

135

[IEEE 2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings - Shanghai, China (2006.10.23-2006.10.26)] 2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings - Low dielectric constant materials: challenges of plasma damage

Baklanov, M.R., Urbanowicz, A., Mannaert, G., Vanhaelemeersch, S.

Year:

2006

Language:

english

File:

PDF, 106 KB

english, 2006

136

Effect of Surfactant as Additive in Wet Clean Solutions on Properties of Low-k Materials

Le, Q. T., Jeannot, V., Baklanov, M. R., Vanderheyden, R., Boullart, W., Vanhaelemeersch, S.

Journal:

Electrochemical and Solid-State Letters

Year:

2006

Language:

english

File:

PDF, 457 KB

english, 2006

137

Non-linear ramsey resonance in the optical region

Ye. V. Baklanov, B. Ya. Dubetsky, V. P. Chebotayev

Journal:

Applied Physics A: Materials Science & Processing

Year:

1976

Language:

english

File:

PDF, 228 KB

english, 1976

138

Calculation Of The Height Of The Stable Boundary Layer In Practical Applications

Sergej Zilitinkevich, Alexander Baklanov

Journal:

Boundary-Layer Meteorology

Year:

2002

Language:

english

File:

PDF, 181 KB

english, 2002

139

[IEEE 2013 IEEE International Interconnect Technology Conference - IITC - Kyoto, Japan (2013.06.13-2013.06.15)] 2013 IEEE International Interconnect Technology Conference - IITC - Damage free cryogenic etching of ultra low-k materials

Baklanov, Mikhail R., Zhang, Liping, Dussart, Remi, de Marneffe, Jean-Francois

Year:

2013

Language:

english

File:

PDF, 548 KB

english, 2013

140

Profile control of novel non-Si gates using BCl[sub 3]∕N[sub 2] plasma

D. Shamiryan, V. Paraschiv, S. Eslava-fernandez, M. Demand, M. Baklanov, S. Beckx, W. Boullart

Journal:

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures

Year:

2007

Language:

english

File:

PDF, 721 KB

english, 2007

141

Minimizing plasma damage and in situ sealing of ultralow-k dielectric films by using oxygen free fluorocarbon plasmas

G. Mannaert, M. R. Baklanov, Q. T. Le, Y. Travaly, W. Boullart, S. Vanhaelemeersch, A. M. Jonas

Year:

2005

Language:

english

File:

PDF, 475 KB

english, 2005

142

Measurement of small oscillations with the help of a femtosecond laser

E. V. Baklanov, V. I. Denisov, N. Beverini, G. Carelli

Journal:

Laser Physics Letters

Year:

2004

Language:

english

File:

PDF, 137 KB

english, 2004

143

The computational study of the “inversion substitution” reactions CX3Br + O2 → CX3O2 + Br (X = H, F)

Anton S. Nizovtsev, Georgii A. Bogdanchikov, Alexey V. Baklanov

Journal:

Combustion and Flame

Year:

2010

Language:

english

File:

PDF, 347 KB

english, 2010

144

UV-photoexcitation of encounter complexes of oxygen O2–O2 as a source of singlet oxygen O2(1Δg) in gas phase

Aleksandra P. Trushina, Veniamin G. Goldort, Sergei A. Kochubei, Alexey V. Baklanov

Journal:

Chemical Physics Letters

Year:

2010

Language:

english

File:

PDF, 369 KB

english, 2010

145

Stiffening and hydrophilisation of SOG low-k material studied by ellipsometric porosimetry, UV ellipsometry and laser-induced surface acoustic waves

A. M. Urbanowicz, B. Meshman, D. Schneider, M. R. Baklanov

Journal:

physica status solidi (a)

Year:

2008

Language:

english

File:

PDF, 260 KB

english, 2008

146

Further comments on the equilibrium height of neutral and stable planetary boundary layers

Sergej Zilitinkevich, Igor Esau, Alexander Baklanov

Journal:

Quarterly Journal of the Royal Meteorological Society

Year:

2007

Language:

english

File:

PDF, 126 KB

english, 2007

147

Forthcoming Meetings on Planetary Boundary-layer Theory, Modelling and Applications

Sergej Zilitinkevich, Hannu Savijärvi, Alexander Baklanov, Branko Grisogono, Kai Myrberg

Journal:

Boundary-Layer Meteorology

Year:

2006

Language:

english

File:

PDF, 45 KB

english, 2006

148

Production of nanoaerosols of sparingly water-soluble drugs: The effect of indomethacin nanoparticles

A. A. Onishchuk, T. G. Tolstikova, I. V. Sorokina, A. M. Baklanov, V. V. Karasev, V. V. Boldyrev, V. M. Fomin

Journal:

Doklady Biochemistry and Biophysics

Year:

2009

Language:

english

File:

PDF, 160 KB

english, 2009

149

Analgesic Effect from Ibuprofen Nanoparticles Inhaled by Male Mice

Onischuk, Andrei A., Tolstikova, Tatyana G., Sorokina, Irina V., Zhukova, Natalya A., Baklanov, Anatoly M., Karasev, Vladimir V., Borovkova, Olga V., Dultseva, Galina G., Boldyrev, Vladimir V., Fomin,

Journal:

Journal of Aerosol Medicine and Pulmonary Drug Delivery

Year:

2009

Language:

english

File:

PDF, 560 KB

english, 2009

150

Meteorological and Air Quality Models for Urban Areas Volume 572 || || Front_matter

Baklanov, Alexander, Sue, Grimmond, Alexander, Mahura, Athanassiadou, Maria

Year:

2009

Language:

english

File:

PDF, 269 KB

english, 2009

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