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51

Characterization and Modeling of Pad Asperity Response in CMP

Boning, Duane, Fan, Wei

Journal:

MRS Proceedings

Year:

2010

Language:

english

File:

PDF, 183 KB

english, 2010

52

Modeling of Reverse Tone Etchback Shallow Trench Isolation Chemical Mechanical Polishing

Gan, Terence, Tugbawa, Tamba, Lee, Brian, Boning, Duane S., Jang, Simon

Journal:

Journal of The Electrochemical Society

Year:

2001

Language:

english

File:

PDF, 413 KB

english, 2001

53

Slurry Particle Agglomeration Model for Chemical Mechanical Planarization (CMP)

Johnson, Joy Marie, Boning, Duane

Journal:

MRS Proceedings

Year:

2010

Language:

english

File:

PDF, 271 KB

english, 2010

54

SPIE Proceedings [SPIE Photonics East '96 - Boston, MA (Monday 18 November 1996)] Open Architecture Control Systems and Standards - Flexible distributed architecture for semiconductor process control and experimentation

Gower, Aaron E., Boning, Duane S., McIlrath, Michael B., Proctor, Frederick M.

Year:

1997

Language:

english

File:

PDF, 299 KB

english, 1997

55

SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] Microelectronic Device Technology - Wafer-scale modeling of pattern effect in oxide chemical mechanical polishing

Ouma, Dennis O., Stine, Brian, Divecha, Rajesh, Boning, Duane S., Chung, James E., Shinn, Gregory B., Ali, Iqbal, Clark, John, Rodder, Mark, Tsuchiya, Toshiaki, Burnett, David, Wristers, Dirk

Year:

1997

Language:

english

File:

PDF, 492 KB

english, 1997

56

Modeling of “Pad-in-a-Bottle”: A Novel Planarization Process Using Suspended Polymer Beads

Fan, Wei, Johnson, Joy, Boning, Duane S.

Journal:

MRS Proceedings

Year:

2013

Language:

english

File:

PDF, 681 KB

english, 2013

57

CMP Modeling and Characterization for Polysilicon MEMS Structures

Tang, Brian, Boning, Duane

Journal:

MRS Proceedings

Year:

2004

Language:

english

File:

PDF, 265 KB

english, 2004

58

A Method for Direct Measurement of Substrate Temperature during Copper CMP

Sampurno, Yasa A., Borucki, Leonard, Zhuang, Yun, Boning, Duane, Philipossian, Ara

Journal:

Journal of The Electrochemical Society

Year:

2005

Language:

english

File:

PDF, 1.11 MB

english, 2005

59

Study on Stiffness and Conditioning Effects of CMP Pad Based on Physical Die-Level CMP Model

Fan, Wei, Boning, Duane, Charns, Leslie, Miyauchi, Hiroyuki, Tano, Hiroyuki, Tsuji, Shoei

Journal:

Journal of The Electrochemical Society

Year:

2010

Language:

english

File:

PDF, 1.08 MB

english, 2010

60

Naturally occurring phenethyl isothiocyanate-induced inhibition of gastric cancer cell growth by disruption of microtubules

Øverby, Anders, Zhao, Chun-Mei, Bones, Atle Magnar, Chen, Duan

Journal:

Journal of Gastroenterology and Hepatology

Year:

2014

Language:

english

File:

PDF, 708 KB

english, 2014

61

Characterization and Modeling of Dynamic Thermal Behavior in CMP

White, David, Melvin, Jason, Boning, Duane

Journal:

Journal of The Electrochemical Society

Year:

2003

Language:

english

File:

PDF, 518 KB

english, 2003

62

Damascene Chemical-Mechanical Polishing Characterization and Modeling for Polysilicon Microelectromechanical Systems Structures

Tang, Brian D., Xie, Xiaolin, Boning, Duane S.

Journal:

Journal of The Electrochemical Society

Year:

2005

Language:

english

File:

PDF, 1.23 MB

english, 2005

63

Changes in the Editorial Board

Boning, Duane S.

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2008

Language:

english

File:

PDF, 220 KB

english, 2008

64

Chip-Scale Modeling of Electroplated Copper Surface Profiles

Park, Tae, Tugbawa, Tamba, Boning, Duane, Chidambaram, Chidi, Borst, Chris, Shin, Gregg

Journal:

Journal of The Electrochemical Society

Year:

2004

Language:

english

File:

PDF, 2.13 MB

english, 2004

65

Wafer Level Modeling of Electrochemical-Mechanical Polishing (ECMP)

Truque, Daniel, Xie, Xiaolin, Boning, Duane

Journal:

MRS Proceedings

Year:

2007

Language:

english

File:

PDF, 252 KB

english, 2007

66

2008 Best Paper Award

Boning, Duane S.

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2010

Language:

english

File:

PDF, 416 KB

english, 2010

67

2007 Best Paper Award

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2008

Language:

english

File:

PDF, 473 KB

english, 2008

68

2006 Best Paper Award

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2007

Language:

english

File:

PDF, 671 KB

english, 2007

69

[ACM Press the 37th conference - Los Angeles, California, United States (2000.06.05-2000.06.09)] Proceedings of the 37th conference on Design automation - DAC '00 - A methodology for modeling the effects of systematic within-die interconnect and device variation on circuit performance

Mehrotra, Vikas, Sam, Shiou Lin, Boning, Duane, Chandrakasan, Anantha, Vallishayee, Rakesh, Nassif, Sani

Year:

2000

Language:

english

File:

PDF, 986 KB

english, 2000

70

[ACM Press the The 51st Annual Design Automation Conference - San Francisco, CA, USA (2014.06.01-2014.06.05)] Proceedings of the The 51st Annual Design Automation Conference on Design Automation Conference - DAC '14 - Remembrance of Transistors Past

Yu, Li, Saxena, Sharad, Hess, Christopher, Elfadel, Abe, Antoniadis, Dimitri, Boning, Duane

Year:

2014

Language:

english

File:

PDF, 1.29 MB

english, 2014

71

[ACM Press the 21st edition of the great lakes symposium - Lausanne, Switzerland (2011.05.02-2011.05.04)] Proceedings of the 21st edition of the great lakes symposium on Great lakes symposium on VLSI - GLSVLSI '11 - Redundancy in SAR ADCs

Chang, Albert H., Lee, Hae-Seung, Boning, Duane S.

Year:

2011

Language:

english

File:

PDF, 1.86 MB

english, 2011

72

A razor-blade test of the demolding energy in a thermoplastic embossing process

Taylor, Hayden, Boning, Duane, Iliescu, Ciprian

Journal:

Journal of Micromechanics and Microengineering

Year:

2011

Language:

english

File:

PDF, 510 KB

english, 2011

73

A 12b 250 MS/s Pipelined ADC With Virtual Ground Reference Buffers

Boo, Hyun H., Boning, Duane S., Lee, Hae-Seung

Journal:

IEEE Journal of Solid-State Circuits

Year:

2015

Language:

english

File:

PDF, 1.55 MB

english, 2015

74

[IEEE 2015 IEEE International Ultrasonics Symposium (IUS) - Taipei, Taiwan (2015.10.21-2015.10.24)] 2015 IEEE International Ultrasonics Symposium (IUS) - Measurement of very low concentration of microparticles in fluid by single particle detection using acoustic radiation force induced particle motion

Lee, John H., Jimenez, Javier, Butterworth, Ian R., Castro-Gonzalez, Carlos, Shukla, Shiva K., Marti-Fuster, Berta, Elvira, Luis, Boning, Duane S., Anthony, Brian W.

Year:

2015

Language:

english

File:

PDF, 1.46 MB

english, 2015

75

Compact Model Parameter Extraction Using Bayesian Inference, Incomplete New Measurements, and Optimal Bias Selection

Yu, Li, Saxena, Sharad, Hess, Christopher, Elfadel, Abe M., Antoniadis, Dimitri, Boning, Duane

Journal:

IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems

Year:

2016

Language:

english

File:

PDF, 2.58 MB

english, 2016

76

[IEEE 2015 IEEE International Ultrasonics Symposium (IUS) - Taipei, Taiwan (2015.10.21-2015.10.24)] 2015 IEEE International Ultrasonics Symposium (IUS) - Ultrasound image-based absolute concentration measurement technique for materials with low scatterer concentration

Lee, John H., Jimenez, Javier, Xiang Zhang,, Boning, Duane S., Anthony, Brian W.

Year:

2015

Language:

english

File:

PDF, 2.87 MB

english, 2015

77

SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 9 August 2015)] Image Reconstruction from Incomplete Data VIII - Alternative techniques for high-resolution spectral estimation of spectrally encoded endoscopy

Bones, Philip J., Fiddy, Michael A., Millane, Rick P., Mousavi, Mahta, Duan, Lian, Javidi, Tara, Ellerbee, Audrey K.

Year:

2015

Language:

english

File:

PDF, 4.74 MB

english, 2015

78

Using Wafer-Scale Patterns for CMP Analysis

Lee, Brian, Gan, Terence, Boning, Duane S., David, Jeffrey, Bonner, Benjamin A., McKeever, Peter, Osterheld, Thomas H.

Journal:

MRS Proceedings

Year:

2000

Language:

english

File:

PDF, 180 KB

english, 2000

79

Direct Measurement of Planarization Length for Copper Chemical Mechanical Planarization Polishing (CMP) Processes Using a Large Pattern Test Mask

Lefevre, Paul, Gonzales, Albert, Brown, Tom, Martin, Gerald, Tugbawa, Tamba, Park, Tae, Boning, Duane, Gostein, Michael, Nguyen, John

Journal:

MRS Proceedings

Year:

2001

Language:

english

File:

PDF, 167 KB

english, 2001

80

Modeling of Pattern Dependencies for Multi-Level Copper Chemical-Mechanical Polishing Processes

Tugbawa, Tamba, Park, Tae, Lee, Brian, Boning, Duane

Journal:

MRS Proceedings

Year:

2001

Language:

english

File:

PDF, 41 KB

english, 2001

81

Characterization and Modeling of Wafer and Die Level Uniformity in Deep Reactive Ion Etching (DRIE)

Sun, Hongwei, Hill, Tyrone, Schmidt, Martin, Boning, Duane

Journal:

MRS Proceedings

Year:

2003

Language:

english

File:

PDF, 208 KB

english, 2003

82

SPIE Proceedings [SPIE Ninth International Symposium on Laser Metrology - Unknown, Singapore (Monday 30 June 2008)] Ninth International Symposium on Laser Metrology - Moire fringe method for the measurement of distortions of hot-embossed polymeric substrates

Taylor, Hayden K., Quan, Chenggen, Asundi, Anand, Xu, Zhiguang, Li, Shiguang, Youcef-Toumi, Kamal, Fatt, Yoon Soon, Boning, Duane S.

Year:

2008

Language:

english

File:

PDF, 1010 KB

english, 2008

83

SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] Microelectronic Manufacturing Yield, Reliability, and Failure Analysis III - Evaluation of pad life in chemical mechanical polishing process using statistical metrology

Muthukrishnan, N. Moorthy, Prasad, Sharad, Stine, Brian, Loh, William, Nagahara, Ron, Chung, James E., Boning, Duane S., Keshavarzi, Ali, Prasad, Sharad, Hartmann, Hans-Dieter

Year:

1997

Language:

english

File:

PDF, 458 KB

english, 1997

84

SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Tuesday 18 October 1994)] Microelectronics Manufacturability, Yield, and Reliability - Statistical metrology for interlevel dielectric thickness variation

Boning, Duane S., Maung, Tinaung, Chung, James E., Chang, Keh-Jeng, Oh, Soo-Young, Bartelink, Dirk, Vasquez, Barbara, Kawasaki, Hisao

Year:

1994

Language:

english

File:

PDF, 509 KB

english, 1994

85

SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Microelectronic Manufacturing Yield, Reliability, and Failure Analysis II - Inter- and intra-die polysilicon critical dimension variation

Stine, Brian, Boning, Duane S., Chung, James E., Bell, David A., Equi, Edward, Keshavarzi, Ali, Prasad, Sharad, Hartmann, Hans-Dieter

Year:

1996

Language:

english

File:

PDF, 562 KB

english, 1996

86

SPIE Proceedings [SPIE Photonics East '96 - Boston, MA (Monday 18 November 1996)] Plug and Play Software for Agile Manufacturing - Architecture for distributed design and fabrication

McIlrath, Michael B., Boning, Duane S., Troxel, Donald E., Goldstein, Barbara L. M.

Year:

1997

Language:

english

File:

PDF, 440 KB

english, 1997

87

SPIE Proceedings [SPIE IS&T/SPIE's Symposium on Electronic Imaging: Science and Technology - San Jose, CA (Sunday 31 January 1993)] Liquid Crystal Materials, Devices, and Applications II - Active-matrix-addressed optical amplifier

Haven, Duane, Bone, Matthew F., Chen, Wei, Zampolin, Ronald F., Efron, Uzi, Wand, Michael D.

Year:

1993

Language:

english

File:

PDF, 382 KB

english, 1993

88

SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, USA (Sunday 12 August 2012)] Image Reconstruction from Incomplete Data VII - Effects of extraneous noise in cryptotomography

Loh, N. Duane, Bones, Philip J., Fiddy, Michael A., Millane, Rick P.

Year:

2012

Language:

english

File:

PDF, 473 KB

english, 2012

89

Initial evaluation of human recombinant interleukin-1 receptor antagonist in the treatment of sepsis syndrome: A randomized, open-label, placebocontrolled multicenter trial

Fisher, Charles J., Slotman, Gus J., Opal, Steven M., Pribble, John P., Bone, Roger C., Emmanuel, George, Ng, David, Bloedow, Duane C., Catalano, Michael A.

Journal:

Critical Care Medicine

Year:

1994

File:

PDF, 8.05 MB

1994

90

SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Microelectronic Manufacturing Yield, Reliability, and Failure Analysis II - Statistical metrology: understanding spatial variation in semiconductor manufacturing

Boning, Duane S., Chung, James E., Keshavarzi, Ali, Prasad, Sharad, Hartmann, Hans-Dieter

Year:

1996

Language:

english

File:

PDF, 930 KB

english, 1996

91

Wafer Scale Variation of Planarization Length in Chemical Mechanical Polishing

Oji, Charles, Lee, Brian, Ouma, Dennis, Smith, Taber, Yoon, Jung, Chung, James, Boning, Duane

Journal:

Journal of The Electrochemical Society

Year:

2000

Language:

english

File:

PDF, 495 KB

english, 2000

92

Combined spheropolyhedral discrete element (DE)–finite element (FE) computational modeling of vertical plate loading on cohesionless soil

Senseney, Christopher T., Duan, Zheng, Zhang, Boning, Regueiro, Richard A.

Journal:

Acta Geotechnica

Year:

2017

Language:

english

File:

PDF, 1.13 MB

english, 2017

93

[Semiconductors and Semimetals] Chemical Mechanical Polishing in Silicon Processing Volume 63 || Chapter 4 Modeling and Simulation

Boning, Duane S.

Year:

1999

Language:

english

File:

PDF, 2.54 MB

english, 1999

94

[IEEE 2017 IEEE/ACM International Conference on Computer-Aided Design (ICCAD) - Irvine, CA (2017.11.13-2017.11.16)] 2017 IEEE/ACM International Conference on Computer-Aided Design (ICCAD) - Online and incremental machine learning approaches for IC yield improvement

Chen, Hongge, Boning, Duane

Year:

2017

Language:

english

File:

PDF, 472 KB

english, 2017

95

Measuring the Absolute Concentration of Microparticles in Suspension Using High-Frequency B-Mode Ultrasound Imaging

Lee, John H., Boning, Duane S., Anthony, Brian W.

Journal:

Ultrasound in Medicine & Biology

Year:

2018

Language:

english

File:

PDF, 2.12 MB

english, 2018

96

[IEEE Conference Publications Design, Automation and Test in Europe - Grenoble, France (2015.03.9-2015.03.13)] Design, Automation & Test in Europe Conference & Exhibition (DATE), 2015 - Statistical Library Characterization using Belief Propagation across Multiple Technology Nodes

Yu, Li, Saxena, Sharad, Hess, Christopher, Elfadel, Ibrahim (Abe) M., Antoniadis, Dimitri, Boning, Duane

Year:

2015

Language:

english

File:

PDF, 352 KB

english, 2015

97

[IEEE 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2018.4.30-2018.5.3)] 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Modelling pattern dependent variations in semi-additive copper electrochemical plating: AP/DFM: Advanced patterning / design for manufacturability

Lang, Christopher, Boning, Duane

Year:

2018

Language:

english

File:

PDF, 943 KB

english, 2018

98

Human T-cell function in experimental ascorbic acid deficiency and spontaneous scurvy

Kay, N E, Holloway, D E, Hutton, S W, Bone, N D, Duane, W C

Journal:

American Journal of Clinical Nutrition

Year:

1982

Language:

english

File:

PDF, 562 KB

english, 1982

99

Machine Learning in VLSI Computer-Aided Design || Machine Learning-Based System Optimization and Uncertainty Quantification for Integrated Systems

Elfadel, Ibrahim M., Boning, Duane S., Li, Xin

Year:

2019

Language:

english

File:

PDF, 1.13 MB

english, 2019

100

Machine Learning in VLSI Computer-Aided Design || Machine Learning-Based Aging Analysis

Elfadel, Ibrahim M., Boning, Duane S., Li, Xin

Year:

2019

Language:

english

File:

PDF, 3.05 MB

english, 2019