61

Defect-Minimized SiGe Layer Using Ion Beam Synthesis

Year:
1992
Language:
english
File:
PDF, 2.91 MB
english, 1992
62

Photo-Polymer Wafer Bonding for Double Layer Transfer

Year:
2003
Language:
english
File:
PDF, 329 KB
english, 2003
80

Modeling of energy distributions for plasma implantation

Year:
2001
Language:
english
File:
PDF, 325 KB
english, 2001
84

Synthesis of SiGe and SiGeC alloys formed by Ge and C implantation

Year:
1996
Language:
english
File:
PDF, 488 KB
english, 1996