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1

Ultra-shallow junctions produced by plasma doping and flash lamp annealing

Wolfgang Skorupa, Rossen A. Yankov, Wolfgang Anwand, Matthias Voelskow, Thoralf Gebel, Daniel F. Downey, Edwin A. Arevalo

Journal:

Materials Science and Engineering: B

Year:

2004

Language:

english

File:

PDF, 100 KB

english, 2004

2

Three-Dimensional Carrier Profiling of Individual Si Nanowires by Scanning Spreading Resistance Microscopy

Xin Ou, Pratyush Das Kanungo, Reinhard Kögler, Peter Werner, Ulrich Gösele, Wolfgang Skorupa, Xi Wang

Journal:

Advanced Materials

Year:

2010

Language:

english

File:

PDF, 491 KB

english, 2010

3

Ferromagnetic GaMnP Prepared by Ion Implantation and Pulsed Laser Annealing

Yuan, Ye, Wang, Yutian, Khalid, Muhammad, Gao, Kun, Prucnal, Slawomir, Gordan, Ovidiu Dorin, Salvan, Georgeta, Zahn, Dietrich R. T., Skorupa, Wolfgang, Helm, Manfred, Zhou, Shengqiang

Journal:

IEEE Transactions on Magnetics

Year:

2014

Language:

english

File:

PDF, 657 KB

english, 2014

4

High Dose High Temperature Ion Implantation of Ge into 4H-SiC

Kups, Thomas, Weih, Petia, Voelskow, M., Skorupa, Wolfgang, Pezoldt, Jörg

Journal:

Materials Science Forum

Year:

2006

Language:

english

File:

PDF, 14.73 MB

english, 2006

5

A review of thermal processing in the subsecond range: semiconductors and beyond

Rebohle, Lars, Prucnal, Slawomir, Skorupa, Wolfgang

Journal:

Semiconductor Science and Technology

Year:

2016

Language:

english

File:

PDF, 6.58 MB

english, 2016

6

Millisecond thermal processing using flash lamps for the advancement of thin layers and functional coatings

Skorupa, Wolfgang, Schumann, Thomas, Rebohle, Lars

Journal:

Surface and Coatings Technology

Year:

2016

Language:

english

File:

PDF, 2.11 MB

english, 2016

7

Si-based Materials for Advanced Microelectronic Devices: Synthesis, Defects and Diffusion

Enrico Napolitani, Andrej Kuznetsov, Wolfgang Skorupa, Majeed Foad

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2006

Language:

english

File:

PDF, 78 KB

english, 2006

8

Gettering layer for oxygen accumulation in the initial stage of SIMOX processing

Xin Ou, Reinhard Kögler, Wolfgang Skorupa, Wolfhard Möller, Xi Wang, Jürgen W. Gerlach

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2009

Language:

english

File:

PDF, 484 KB

english, 2009

9

Subsecond melt processing for achieving SiGe layers

Matthias Voelskow, Aloke Kanjilal, Wolfgang Skorupa

Journal:

Current Applied Physics

Year:

2010

Language:

english

File:

PDF, 603 KB

english, 2010

10

Proton irradiation effects in silicon junction diodes and charge-coupled-devices

Eddy Simoen, Jan Vanhellemont, Andre Alaerts, Cor Claeys, Eugenius Gaubas, Arvidas Kaniava, Hidenori Ohyama, H. Sunaga, I. Nahsiyama, Wolfgang Skorupa

Journal:

Radiation Physics and Chemistry

Year:

1997

Language:

english

File:

PDF, 475 KB

english, 1997

11

Structural characterization of H plasma-doped ZnO single crystals by positron annihilation spectroscopies

Wolfgang Anwand, Gerhard Brauer, Thomas E. Cowan, Dieter Grambole, Wolfgang Skorupa, Jakub Čížek, Jan Kuriplach, Ivan Procházka, Werner Egger, Peter Sperr

Journal:

physica status solidi (a)

Year:

2010

Language:

english

File:

PDF, 511 KB

english, 2010

12

Structural characterization of H plasma-doped ZnO single crystals by Hall measurements and photoluminescence studies

Wolfgang Anwand, Gerhard Brauer, Thomas E. Cowan, Viton Heera, Heidemarie Schmidt, Wolfgang Skorupa, Holger von Wenckstern, Matthias Brandt, Gabriele Benndorf, Marius Grundmann

Journal:

physica status solidi (a)

Year:

2010

Language:

english

File:

PDF, 268 KB

english, 2010

13

Defects in a nitrogen-implanted ZnO thin film

Matthias Schmidt, Martin Ellguth, Florian Schmidt, Thomas Lüder, Holger v. Wenckstern, Rainer Pickenhain, Marius Grundmann, Gerhard Brauer, Wolfgang Skorupa

Journal:

physica status solidi (b)

Year:

2010

Language:

english

File:

PDF, 335 KB

english, 2010

14

Nickel-related defects in ZnO – A deep-level transient spectroscopy and photo-capacitance study

Matthias Schmidt, Kerstin Brachwitz, Florian Schmidt, Martin Ellguth, Holger von Wenckstern, Rainer Pickenhain, Marius Grundmann, Gerhard Brauer, Wolfgang Skorupa

Journal:

physica status solidi (b)

Year:

2011

Language:

english

File:

PDF, 265 KB

english, 2011

15

The formation of near surface SiGe layers with combined high-dose ion implantation and flash-lamp annealing

Matthias Voelskow, Ioannis Stoimenos, Lars Rebohle, Wolfgang Skorupa

Journal:

physica status solidi (c)

Year:

2011

Language:

english

File:

PDF, 280 KB

english, 2011

16

A Novel Method to Fabricate Silicon Nanowirep–nJunctions by a Combination of Ion Implantation and in-situ Doping

Pratyush Das Kanungo, Reinhard Kögler, Peter Werner, Ulrich Gösele, Wolfgang Skorupa

Journal:

Nanoscale Research Letters

Year:

2010

Language:

english

File:

PDF, 350 KB

english, 2010

17

Controlled localised melting in silicon by high dose germanium implantation and flash lamp annealing

Matthias Voelskow, Wolfgang Skorupa, Jörg Pezoldt, Thomas Kups

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2009

Language:

english

File:

PDF, 387 KB

english, 2009

18

Preface

Lucia Calcagno, Anders Hallén, Rodrigo Martins, Wolfgang Skorupa

Journal:

Applied Surface Science

Year:

2001

Language:

english

File:

PDF, 33 KB

english, 2001

19

Optical and microstructural properties of self-assembled InAs quantum structures in silicon

Sławomir Prucnal, Marcin Turek, Andrzej Drozdziel, Krzysztof Pyszniak, Artur Wójtowicz, Sheng-Qiang Zhou, Alohe Kanjilal, Artem Shalimov, Wolfgang Skorupa, Jerzy Zuk

Journal:

Central European Journal of Physics

Year:

2011

Language:

english

File:

PDF, 936 KB

english, 2011

20

Transition metal diffusion in diluted magnetic Si and GaAs prepared by pulsed laser processing

Bürger, Danilo, Seeger, Michael, Zhou, Shengqiang, Skorupa, Wolfgang, Schmidt, Heidemarie

Journal:

Journal of Applied Physics

Year:

2012

Language:

english

File:

PDF, 1.15 MB

english, 2012

21

Comment on “Gettering of Cu by He-induced cavities in SIMOX materials” [Nucl. Instr. and Meth. B 134 (1998) 360]

Rossen A. Yankov, Wolfgang Skorupa

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

1999

Language:

english

File:

PDF, 47 KB

english, 1999

22

Hysteresis in the magnetotransport of manganese-doped germanium: Evidence for carrier-mediated ferromagnetism

Zhou, Shengqiang, Bürger, Danilo, Mücklich, Arndt, Baumgart, Christine, Skorupa, Wolfgang, Timm, Carsten, Oesterlin, Peter, Helm, Manfred, Schmidt, Heidemarie

Journal:

Physical Review B

Year:

2010

Language:

english

File:

PDF, 358 KB

english, 2010

23

Precise millisecond annealing for advanced material processing

Denise Reichel, Wolfgang Skorupa

Journal:

physica status solidi (c)

Year:

2012

Language:

english

File:

PDF, 417 KB

english, 2012

24

InP nanocrystals on silicon for optoelectronic applications

Prucnal, Slawomir, Zhou, Shengqiang, Ou, Xin, Reuther, Helfried, Liedke, Maciej Oskar, Mücklich, Arndt, Helm, Manfred, Zuk, Jerzy, Turek, Marcin, Pyszniak, Krzysztof, Skorupa, Wolfgang

Journal:

Year:

2012

Language:

english

File:

PDF, 1.99 MB

english, 2012

25

[Springer Series in Materials Science] Rare-Earth Implanted MOS Devices for Silicon Photonics Volume 142 ||

Rebohle, Lars, Skorupa, Wolfgang

Year:

2010

Language:

english

File:

PDF, 6.36 MB

english, 2010

26

[Springer Series in Materials Science] Subsecond Annealing of Advanced Materials Volume 192 ||

Skorupa, Wolfgang, Schmidt, Heidemarie

Year:

2014

Language:

english

File:

PDF, 11.17 MB

english, 2014

27

Hysteretic anomalous Hall effect in a ferromagnetic, Mn-rich Ge:Mn nanonet

BuÌrger, Danilo, Zhou, Shengqiang, HoÌwler, Marcel, Ou, Xin, Kovacs, GyoÌrgy J., Reuther, Helfried, MuÌcklich, Arndt, Skorupa, Wolfgang, Helm, Manfred, Schmidt, Heidemarie

Journal:

Applied Physics Letters

Year:

2012

Language:

english

File:

PDF, 1.04 MB

english, 2012

28

Structural and magnetic properties of irradiated SiC

Wang, Yutian, Chen, Xuliang, Li, Lin, Shalimov, Artem, Tong, Wei, Prucnal, Slawomir, Munnik, Frans, Yang, Zhaorong, Skorupa, Wolfgang, Helm, Manfred, Zhou, Shengqiang

Journal:

Journal of Applied Physics

Year:

2014

Language:

english

File:

PDF, 1.60 MB

english, 2014

29

Carrier Profiling of Individual Si Nanowires by Scanning Spreading Resistance Microscopy

Ou, Xin, Kanungo, Pratyush Das, Kögler, Reinhard, Werner, Peter, Gösele, Ulrich, Skorupa, Wolfgang, Wang, Xi

Journal:

Year:

2010

Language:

english

File:

PDF, 4.50 MB

english, 2010

30

Disentangling defect-induced ferromagnetism in SiC

Wang, Yutian, Li, Lin, Prucnal, Slawomir, Chen, Xuliang, Tong, Wei, Yang, Zhaorong, Munnik, Frans, Potzger, Kay, Skorupa, Wolfgang, Gemming, Sibylle, Helm, Manfred, Zhou, Shengqiang

Journal:

Physical Review B

Year:

2014

Language:

english

File:

PDF, 632 KB

english, 2014

31

Characterization of Structural Changes Associated with Doping Silicon Nanowires by Ion Implantation

Das Kanungo, Pratyush, Koegler, Reinhard, Zakharov, Nikolai, Werner, Peter, Scholz, Roland, Skorupa, Wolfgang

Journal:

Crystal Growth & Design

Year:

2011

Language:

english

File:

PDF, 3.13 MB

english, 2011

32

Fresnoite thin films grown by pulsed laser deposition: photoluminescence and laser crystallization

Müller, Alexander, Lorenz, Michael, Brachwitz, Kerstin, Lenzner, Jörg, Mittwoch, Kai, Skorupa, Wolfgang, Grundmann, Marius, Höche, Thomas

Journal:

Year:

2011

Language:

english

File:

PDF, 20.91 MB

english, 2011

33

Ion beam synthesis of polycrystalline SiC on SiO 2 structures for MEMS applications

Serre, Christophe, Pérez-Rodríguez, Alejandro, Morante, Joan Ramón, Esteve, Jaume, Acero, María-Cruz, Kögler, Reinhard, Skorupa, Wolfgang

Journal:

Journal of Micromechanics and Microengineering

Year:

2000

Language:

english

File:

PDF, 211 KB

english, 2000

34

Homogenization of the melting depth in SiC on Si structures during flash lamp irradiation

Voelskow, Matthias, Skorupa, Wolfgang, Smith, Mark P., McMahon, Richard A.

Journal:

Applied Physics Letters

Year:

2005

Language:

english

File:

PDF, 607 KB

english, 2005

35

Release of helium from vacancy defects in yttria-stabilized zirconia under irradiation

Ou, Xin, Kögler, Reinhard, Zhou, Hong-Bo, Anwand, Wolfgang, Grenzer, Jörg, Hübner, René, Voelskow, Matthias, Butterling, Maik, Zhou, Shengqiang, Skorupa, Wolfgang

Journal:

Physical Review B

Year:

2012

Language:

english

File:

PDF, 3.08 MB

english, 2012

36

The importance of hole concentration in establishing carrier-mediated ferromagnetism in Mn doped Ge

Zhou, Shengqiang, Bürger, Danilo, Skorupa, Wolfgang, Oesterlin, Peter, Helm, Manfred, Schmidt, Heidemarie

Journal:

Applied Physics Letters

Year:

2010

Language:

english

File:

PDF, 446 KB

english, 2010

37

Acceptor deactivation in individual silicon nanowires: From thick to ultrathin

Ou, Xin, Geyer, Nadine, Kögler, Reinhard, Werner, Peter, Skorupa, Wolfgang

Journal:

Applied Physics Letters

Year:

2011

Language:

english

File:

PDF, 934 KB

english, 2011

38

Formation of regularly arranged large grain silicon islands by using embedded micro mirrors in the flash crystallization of amorphous silicon

Henke, Thomas, Bartha, Johann W., Rebohle, Lars, Merkel, Ulrich, Hübner, René, Albert, Matthias, Skorupa, Wolfgang

Journal:

Journal of Applied Physics

Year:

2014

Language:

english

File:

PDF, 5.04 MB

english, 2014

39

Comparative study of defect evolution in carbon implanted strained SiGe and SiSn layers

Gaiduk, Peter I., Lundsgaard Hansen, John, Nylandsted Larsen, Arne, Skorupa, Wolfgang

Journal:

Physica status solidi

Year:

2015

Language:

english

File:

PDF, 390 KB

english, 2015

40

[IEEE 2011 Semiconductor Conference Dresden (SCD) - Dresden, Germany (2011.09.27-2011.09.28)] 2011 Semiconductor Conference Dresden - Nanoanalysis of lanthanum scandate MOS capacitors addressing reliability after local current flow

Hippler, Markus, Streit, Stephan, Lehmann, Jan, Skorupa, Wolfgang, Helm, Manfred, Schmidt, Heidemarie, Lopes, J. Marcelo Jardao, Schubert, Jurgen, Mantl, Siegfried, Huber, Hans-Peter, Kienberger, Ferr

Year:

2011

Language:

english

File:

PDF, 1.06 MB

english, 2011

41

[ECS 215th ECS Meeting - San Francisco, CA (May 24 - May 29, 2009)] ECS Transactions - Flash Lamp Activation of n- and p-type Dopants in Strained and Unstrained SOI and HOI

Minamisava, Renato A., Buca, Dan, Heiermann, Wolfgang, Lanzerath, Franz, Mantl, Siegfried, Skorupa, Wolfgang, Hartmann, Jean-Michel, Ghyselen, Bruno, Kernevez, Nelly, Breuer, Uwe

Year:

2009

Language:

english

File:

PDF, 707 KB

english, 2009

42

Buckling Stabilization and Stress Reduction in SiC on Si by i-FLASiC Processing

Andreadou, Aria, Pezoldt, Joerg, Förster, Christian, Polychroniadis, E.K., Voelskow, M., Skorupa, Wolfgang

Journal:

Materials Science Forum

Year:

2009

Language:

english

File:

PDF, 368 KB

english, 2009

43

On Carbon-Implantation Induced Donors in Silicon

Schmalz, K., Gaworzewski, P., Winkler, R., Skorupa, Wolfgang

Journal:

Solid State Phenomena

Year:

1991

File:

PDF, 353 KB

1991

44

Rare Earth Ion Implantation for Silicon Based Light Emission

Skorupa, Wolfgang, Sun, J.M., Prucnal, S., Rebohle, L., Gebel, T., Nazarov, A.N., Osiyuk, I.N., Helm, M.

Journal:

Solid State Phenomena

Year:

2005

Language:

english

File:

PDF, 398 KB

english, 2005

45

Structural and Electrical Characterization of Ion Beam Synthesized and n-Doped SiC Layers

Serre, C., Panknin, D., Pérez-Rodríguez, A., Romano-Rodríguez, A., Morante, J.R., Kögler, R., Skorupa, Wolfgang, Esteve, Jaume, Acero, M.C.

Journal:

Materials Science Forum

Year:

2001

File:

PDF, 346 KB

2001

46

Advanced Thermal Processing of Ultrashallow Implanted Junctions Using Flash Lamp Annealing

Skorupa, Wolfgang, Gebel, Thoralf, Yankov, Rossen A., Paul, Silke, Lerch, Wilfried, Downey, Daniel F., Arevalo, Edwin A.

Journal:

Journal of The Electrochemical Society

Year:

2005

Language:

english

File:

PDF, 155 KB

english, 2005

47

Microstructural Characterization of 3C-SiC Thin Films Grown by Flash Lamp Induced Liquid Phase Epitaxy

Ferro, Gabriel, Panknin, D., Polychroniadis, E.K., Monteil, Yves, Skorupa, Wolfgang, Stoemenos, J.

Journal:

Materials Science Forum

Year:

2005

Language:

english

File:

PDF, 668 KB

english, 2005

48

Improvement of the 3C-SiC/Si Interface by Flash Lamp Annealing

Panknin, D., Stoemenos, J., Eickhoff, M., Heera, V., Vouroutzis, N., Krötz, G., Skorupa, Wolfgang

Journal:

Materials Science Forum

Year:

2001

File:

PDF, 436 KB

2001

49

High Concentration Doping of 6H-SiC by Ion Implantation: Flash versus Furnace Annealing

Panknin, D., Wirth, H., Anwand, W., Brauer, Gerhard, Skorupa, Wolfgang

Journal:

Materials Science Forum

Year:

2000

Language:

english

File:

PDF, 340 KB

english, 2000

50

Growth Acceleration in FLASiC Assisted Short Time Liquid Phase Epitaxy by Melt Modification

Pezoldt, Jörg, Morales, Francisco M., Stauden, Thomas, Förster, Christian, Polychroniadis, E.K., Stoemenos, J., Panknin, D., Skorupa, Wolfgang

Journal:

Materials Science Forum

Year:

2006

Language:

english

File:

PDF, 667 KB

english, 2006

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