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51

Monocrystalline silicon carbide nanoelectromechanical systems

Yang, Y. T., Ekinci, K. L., Huang, X. M. H., Schiavone, L. M., Roukes, M. L., Zorman, C. A., Mehregany, M.

Journal:

Applied Physics Letters

Year:

2001

Language:

english

File:

PDF, 367 KB

english, 2001

52

A simple fabrication process for polysilicon side-drive micromotors

Deng, K., Mehregany, M., Dewa, A.S.

Journal:

Journal of Microelectromechanical Systems

Year:

1994

Language:

english

File:

PDF, 1.31 MB

english, 1994

53

6H-SiC JFETs for 450 $^{\circ}\hbox{C}$ Differential Sensing Applications

Patil, A.C., Xiao-an Fu,, Anupongongarch, C., Mehregany, M., Garverick, S.L.

Journal:

Journal of Microelectromechanical Systems

Year:

2009

Language:

english

File:

PDF, 1.45 MB

english, 2009

54

Polycrystalline silicon-carbide surface-micromachined vertical resonators-part II: electrical testing and material property extraction

Wiser, R.F., Tabib-Azar, M., Mehregany, M., Zorman, C.A.

Journal:

Journal of Microelectromechanical Systems

Year:

2005

Language:

english

File:

PDF, 1.80 MB

english, 2005

55

Thick glass film technology for polysilicon surface micromachining

Azzam Yasseen, A., Cawley, J.D., Mehregany, M.

Journal:

Journal of Microelectromechanical Systems

Year:

1999

Language:

english

File:

PDF, 529 KB

english, 1999

56

Fracture toughness of low-pressure chemical-vapor-deposited polycrystalline silicon carbide thin films

Hatty, V., Kahn, H., Trevino, J., Zorman, C. A., Mehregany, M., Ballarini, R., Heuer, A. H.

Journal:

Journal of Applied Physics

Year:

2006

Language:

english

File:

PDF, 711 KB

english, 2006

57

[IEEE 2011 5th International Symposium on Medical Information and Communication Technology (ISMICT) - Montreux, Switzerland (2011.03.27-2011.03.30)] 2011 5th International Symposium on Medical Information and Communication Technology - A mobile wearable wireless fetal heart monitoring system

Roham, Masoud, Saldivar, Enrique, Raghavan, Srinivas, Zurcher, Mark, Mack, Jonathan, Mehregany, Mehran

Year:

2011

Language:

english

File:

PDF, 633 KB

english, 2011

58

Mechanical properties of epitaxial 3C silicon carbide thin films

Jackson, K.M., Dunning, J., Zorman, C.A., Mehregany, M., Sharpe, W.N.

Journal:

Journal of Microelectromechanical Systems

Year:

2005

Language:

english

File:

PDF, 1.20 MB

english, 2005

59

Deposition of Polycrystalline 3C-SiC Films on 100 mm Diameter Si(100) Wafers in a Large-Volume LPCVD Furnace

Zorman, C. A., Rajgopal, S., Fu, X. A., Jezeski, R., Melzak, J., Mehregany, M.

Journal:

Electrochemical and Solid-State Letters

Year:

2002

Language:

english

File:

PDF, 185 KB

english, 2002

60

SPIE Proceedings [SPIE Photonics West '95 - San Jose, CA, United States (Wednesday 1 February 1995)] Micro-Optics/Micromechanics and Laser Scanning and Shaping - Integrated micro-opto-mechanical systems

Merat, Francis L., Mehregany, Mehran

Year:

1995

Language:

english

File:

PDF, 819 KB

english, 1995

61

Measurement of Residual Stress-Induced Bending Moment of P+ Silicon Films

Chu, W. H., Mehregany, M., Ning, X., Pirouz, P.

Journal:

MRS Proceedings

Year:

1991

Language:

english

File:

PDF, 913 KB

english, 1991

62

SPIE Proceedings [SPIE SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation - San Diego, CA (Sunday 24 July 1994)] Integrated Optics and Microstructures II - Fabrication of polygon mirror microscanner by surface micromachining

Miyajima, H., Deng, K., Mehregany, Mehran, Merat, Francis L., Furukawa, Shoichi, Tabib-Azar, Massood, Polla, Dennis L., Wong, Ka-Kha

Year:

1994

Language:

english

File:

PDF, 637 KB

english, 1994

63

Innovation for Engineers || The Innovative Mind

Mehregany, Mehran

Year:

2018

Language:

english

File:

PDF, 308 KB

english, 2018

64

[IEEE 2017 16th IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm) - Orlando, FL (2017.5.30-2017.6.2)] 2017 16th IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm) - Embedded two-phase cooling of high heat flux electronics on silicon carbide (SiC) using thin-film evaporation and an enhanced delivery system (FEEDS) manifold-microchannel cooler

Bae, Daniel G., Mandel, Raphael K., Dessiatoun, Serguei V., Rajgopal, Srihari, Roberts, Samantha P., Mehregany, Mehran, Ohadi, Michael M.

Year:

2017

File:

PDF, 595 KB

2017

65

ChemInform Abstract: Silicon Carbide MEMS for Harsh Environments

M. MEHREGANY, C. A. ZORMAN, N. RAJAN, C. H. WU

Journal:

Year:

1999

File:

PDF, 24 KB

1999

66

ChemInform Abstract: Electromechanical Computing at 500 °C with Silicon Carbide.

Te-Hao Lee, Swarup Bhunia, Mehran Mehregany

Journal:

Year:

2010

File:

PDF, 16 KB

2010

67

Dry release fabrication and testing of SiC electrostatic cantilever actuators

Liudi Jiang, M. Hassan, R. Cheung, A.J. Harris, J.S. Burdess, C.A. Zorman, M. Mehregany

Journal:

Microelectronic Engineering

Year:

2005

Language:

english

File:

PDF, 192 KB

english, 2005

68

Measurement of residual stress and elastic modulus of polycrystalline 3C-SiC films deposited by low-pressure chemical vapor deposition

Xiao-an Fu, Jeremy L. Dunning, Christian A. Zorman, Mehran Mehregany

Journal:

Thin Solid Films

Year:

2005

Language:

english

File:

PDF, 225 KB

english, 2005

69

Pendeo-epitaxial growth of thin films of gallium nitride and related materials and their characterization

Robert F. Davis, T. Gehrke, K.J. Linthicum, T.S. Zheleva, E.A. Preble, P. Rajagopal, C.A. Zorman, M. Mehregany

Journal:

Journal of Crystal Growth

Year:

2001

Language:

english

File:

PDF, 321 KB

english, 2001

70

Conventional and pendeo-epitaxial growth of GaN(0 0 0 1) thin films on Si(1 1 1) substrates

Robert F. Davis, Thomas Gehrke, Kevin J. Linthicum, Edward Preble, Pradeep Rajagopal, Carsten Ronning, Christian Zorman, Mehran Mehregany

Journal:

Journal of Crystal Growth

Year:

2001

Language:

english

File:

PDF, 252 KB

english, 2001

71

High temperature ohmic contacts to 3C–silicon carbide films

C Jacob, P Pirouz, H.-I Kuo, M Mehregany

Journal:

Solid-State Electronics

Year:

1998

Language:

english

File:

PDF, 470 KB

english, 1998

72

Stacking rearrangement at 6H–SiC(0 0 0 1) surfaces during thermal hydrogenation

Th. Seyller, N. Sieber, T. Stark, L. Ley, C.A. Zorman, M. Mehregany

Journal:

Surface Science

Year:

2003

Language:

english

File:

PDF, 1.71 MB

english, 2003

73

Performance of 3C-SiC thin films as protective coatings for silicon-micromachined atomizers

Narayanan Rajan, Christian A Zorman, Mehran Mehregany, Russell DeAnna, Rex Harvey

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 2.50 MB

english, 1998

74

Effect of MEMS-compatible thin film hard coatings on the erosion resistance of silicon micromachined atomizers

N Rajan, C.A Zorman, M Mehregany, R DeAnna, R.J Harvey

Journal:

Surface and Coatings Technology

Year:

1998

Language:

english

File:

PDF, 1.78 MB

english, 1998

75

Extreme temperature 6H-SiC JFET integrated circuit technology

Philip G. Neudeck, Steven L. Garverick, David J. Spry, Liang-Yu Chen, Glenn M. Beheim, Michael J. Krasowski, Mehran Mehregany

Journal:

physica status solidi (a)

Year:

2009

Language:

english

File:

PDF, 1.32 MB

english, 2009

76

The relation of temperament and behavior disorders in a preschool clinical sample

Donna V. Mehregany

Journal:

Child Psychiatry & Human Development

Year:

1991

Language:

english

File:

PDF, 456 KB

english, 1991

77

Pendeo-epitaxial growth of gallium nitride on silicon substrates

Thomas Gehrke, Kevin J. Linthicum, Edward Preble, Pradeep Rajagopal, Carsten Ronning, Christian Zorman, Mehran Mehregany, Robert F. Davis

Journal:

Journal of Electronic Materials

Year:

2000

Language:

english

File:

PDF, 214 KB

english, 2000

78

Fabrication of low defect density 3C-SiC on SiO2structures using wafer bonding techniques

Krishna N. Vinod, Christian A. Zorman, Azzam A. Yasseen, Mehran Mehregany

Journal:

Journal of Electronic Materials

Year:

1998

Language:

english

File:

PDF, 1.50 MB

english, 1998

79

Fabrication of hall device structures in 3C-SiC using microelectromechanical processing technology

L. Jiang, S. Anderson, E. Thong, R. Cheung, C.A. Zorman, M. Mehregany

Journal:

Microelectronic Engineering

Year:

2006

Language:

english

File:

PDF, 364 KB

english, 2006

80

Mechanical integrity of polysilicon films exposed to hydrofluoric acid solutions

James A. Walker, Kaigham J. Gabriel, Mehran Mehregany

Journal:

Journal of Electronic Materials

Year:

1991

Language:

english

File:

PDF, 574 KB

english, 1991

81

Microelectromechanical systems

Journal:

IEEE Circuits and Devices Magazine

Year:

1993

Language:

english

File:

PDF, 983 KB

english, 1993

82

Electric micromotor dynamics

Bart, S.F., Mehregany, M., Tavrow, L.S., Lang, J.H., Senturia, S.D.

Journal:

IEEE Transactions on Electron Devices

Year:

1992

Language:

english

File:

PDF, 1.15 MB

english, 1992

83

Measurement of wear in polysilicon micromotors

Mehregany, M., Senturia, S.D., Lang, J.H.

Journal:

IEEE Transactions on Electron Devices

Year:

1992

Language:

english

File:

PDF, 971 KB

english, 1992

84

Micromotor fabrication

Mehregany, M., Senturia, S.D., Lang, J.H., Nagarkar, P.

Journal:

IEEE Transactions on Electron Devices

Year:

1992

Language:

english

File:

PDF, 1.18 MB

english, 1992

85

A study of residual stress distribution through the thickness of p + silicon films [thermal oxidation effects]

Chu, W.-H., Mehregany, M.

Journal:

IEEE Transactions on Electron Devices

Year:

1993

Language:

english

File:

PDF, 629 KB

english, 1993

86

An experimental technique and a model for studying the operation of harmonic side-drive micrometers

Dhuler, V.R., Mehregany, M., Phillips, S.M.

Journal:

IEEE Transactions on Electron Devices

Year:

1993

Language:

english

File:

PDF, 806 KB

english, 1993

87

A comparative study of bearing designs and operational environments for harmonic side-drive micromotors

Dhuler, V.R., Mehregany, M., Phillips, S.M.

Journal:

IEEE Transactions on Electron Devices

Year:

1993

Language:

english

File:

PDF, 550 KB

english, 1993

88

Integrated fabrication of polysilicon mechanisms

Mehregany, M., Gabriel, K.J., Trimmer, W.S.N.

Journal:

IEEE Transactions on Electron Devices

Year:

1988

Language:

english

File:

PDF, 1.33 MB

english, 1988

89

Internal stress and elastic modulus measurements on micromachined 3C-SiC thin films

Mehregany, M., Lijun Tong, Matus, L.G., Larkin, D.J.

Journal:

IEEE Transactions on Electron Devices

Year:

1997

Language:

english

File:

PDF, 187 KB

english, 1997

90

Fabrication and characterization of polycrystalline SiC resonators

Roy, S., DeAnna, R.G., Zorman, C.A., Mehregany, M.

Journal:

IEEE Transactions on Electron Devices

Year:

2002

Language:

english

File:

PDF, 1.17 MB

english, 2002

91

Personal Navigation via High-Resolution Gait-Corrected Inertial Measurement Units

Bebek, O., Suster, M.A., Rajgopal, S., Fu, M.J., Xuemei Huang, Çavuşoǧlu, M.C., Young, D.J., Mehregany, M., van den Bogert, A.J., Mastrangelo, C.H.

Journal:

IEEE Transactions on Instrumentation and Measurement

Year:

2010

Language:

english

File:

PDF, 1.75 MB

english, 2010

92

Micromotor grating optical switch

Smith, S. W., Yasseen, A. A., Mehregany, M., Merat, F. L.

Journal:

Year:

1995

Language:

english

File:

PDF, 377 KB

english, 1995

93

[IEEE 2010 32nd Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC 2010) - Buenos Aires (2010.08.31-2010.09.4)] 2010 Annual International Conference of the IEEE Engineering in Medicine and Biology - A high-voltage, high-current CMOS pulse generator ASIC for deep brain stimulation

Laotaveerungrueng, Noppasit, Lahiji, Rosa R, Garverick, Steven L, Mehregany, Mehran

Year:

2010

Language:

english

File:

PDF, 837 KB

english, 2010

94

New developments in MEMS using SiC and TiNi shape memory alloy materials

Christian A Zorman, Mehran Mehregany, Harold Kahn, Arthur H Heuer

Journal:

Current Opinion in Solid State & Materials Science

Year:

1997

Language:

english

File:

PDF, 678 KB

english, 1997

95

Diffraction grating scanners using polysilicon micromotors

Azzam Yasseen, A., Smith, S.W., Merat, F.L., Mehregany, M.

Journal:

IEEE Journal of Selected Topics in Quantum Electronics

Year:

1999

Language:

english

File:

PDF, 912 KB

english, 1999

96

A rotary electrostatic micromotor 1×8 optical switch

Azzam Yasseen, A., Mitchell, J.N., Klemic, J.F., Smith, D.A., Mehregany, M.

Journal:

IEEE Journal of Selected Topics in Quantum Electronics

Year:

1999

Language:

english

File:

PDF, 355 KB

english, 1999

97

[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Mechanical coupling and direct torque measurement of outer-rotor polysilicon micromotors

Stark, K.C., Mehregany, M., Phillips, S.M.

Year:

1997

Language:

english

File:

PDF, 894 KB

english, 1997

98

[IEEE TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Lyon, France (2007.06.10-2007.06.14)] TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - A Silicon Carbide Capacitive Pressure Sensor for High Temperature and Harsh Environment Applications

Li Chen,, Mehregany, Mehran

Year:

2007

Language:

english

File:

PDF, 1.31 MB

english, 2007

99

VHF, UHF and microwave frequency nanomechanical resonators

Huang, X M H, Feng, X L, Zorman, C A, Mehregany, M, Roukes, M L

Journal:

New Journal of Physics

Year:

2005

Language:

english

File:

PDF, 1.12 MB

english, 2005

100

[IEEE 2010 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2010) - Taipei (2010.10.18-2010.10.22)] 2010 IEEE/RSJ International Conference on Intelligent Robots and Systems - Personal navigation via shoe mounted inertial measurement units

Bebek, O, Suster, M A, Rajgopal, S, Fu, M J, Xuemei Huang,, Cavusoglu, M Cenk, Young, Darrin J, Mehregany, M, van den Bogert, A J, Mastrangelo, C H

Year:

2010

Language:

english

File:

PDF, 1.70 MB

english, 2010