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1

Hydrophobicity of Rare Earth Oxides Grown by Atomic Layer Deposition

Oh, Il-Kwon, Kim, Kangsik, Lee, Zonghoon, Ko, Kyung Yong, Lee, Chang-Wan, Lee, Su Jeong, Myung, Jae Min, Lansalot-Matras, Clement, Noh, Wontae, Dussarrat, Christian, Kim, Hyungjun, Lee, Han-Bo-Ram

Journal:

Chemistry of Materials

Year:

2015

Language:

english

File:

PDF, 2.47 MB

english, 2015

2

Novel mixed alkylamido-cyclopentadienyl precursors for ALD of ZrO2 thin films

Niinistö, Jaakko, Kukli, Kaupo, Kariniemi, Maarit, Ritala, Mikko, Leskelä, Markku, Blasco, Nicolas, Pinchart, Audrey, Lachaud, Christophe, Laaroussi, Nadia, Wang, Ziyun, Dussarrat, Christian

Journal:

Journal of Materials Chemistry

Year:

2008

Language:

english

File:

PDF, 706 KB

english, 2008

3

Plasma-Enhanced Atomic Layer Deposition of Cobalt Using Cyclopentadienyl Isopropyl Acetamidinato-Cobalt as a Precursor

Kim, Jae-Min, Lee, Han-Bo-Ram, Lansalot, Clement, Dussarrat, Christian, Gatineau, Julien, Kim, Hyungjun

Journal:

Japanese Journal of Applied Physics

Year:

2010

Language:

english

File:

PDF, 268 KB

english, 2010

4

[ECS 215th ECS Meeting - San Francisco, CA (May 24 - May 29, 2009)] ECS Transactions - Atomic Layer Deposition of Rare-earth Oxide Thin Films for High-k Dielectric Applications

Stafford, Nathan A., Katamreddy, Rajesh, Guerin, Laurie, Feist, Ben, Dussarrat, Christian, Pallem, Venkateswara, Weiland, Conan, Opila, Robert

Year:

2009

Language:

english

File:

PDF, 1.56 MB

english, 2009

5

Synthesis and Crystal Structures of Li2CuZrO4 Polymorphs

Christian Dussarrat, Glenn C. Mather, Vincent Caignaert, Bernadette Domengès, James G. Fletcher, Anthony R. West

Journal:

Journal of Solid State Chemistry

Year:

2002

Language:

english

File:

PDF, 1015 KB

english, 2002

6

Deposition of highly pure ruthenium thin films with a new metal-organic precursor

Julien Gatineau, Christian Dussarrat

Journal:

Surface and Coatings Technology

Year:

2007

Language:

english

File:

PDF, 311 KB

english, 2007

7

Novel series of perovskite-related crystal structures

Christian Dussarrat

Journal:

Solid State Ionics

Year:

1998

Language:

english

File:

PDF, 1.78 MB

english, 1998

8

A new RuO4 solvent solution for pure ruthenium film depositions

Julien Gatineau, Kazutaka Yanagita, Christian Dussarrat

Journal:

Microelectronic Engineering

Year:

2006

Language:

english

File:

PDF, 217 KB

english, 2006

9

[IEEE 2012 23rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY (2012.05.15-2012.05.17)] 2012 SEMI Advanced Semiconductor Manufacturing Conference - New polymerizing chemistries for through-silicon via etching

Nicoll, W., Eisenbraun, E., Dussarrat, C., Gupta, R., Anderson, C.

Year:

2012

Language:

english

File:

PDF, 934 KB

english, 2012

10

ChemInform Abstract: Crystal Structures and Magnetic Properties of Ba4Ru3O10 and Ba5Ru3O12.

C. DUSSARRAT, F. GRASSET, R. BONTCHEV, J. DARRIET

Journal:

Year:

1996

Language:

english

File:

PDF, 27 KB

english, 1996

11

XRD, EXAFS and XANES studies of new bismuth cubic or pseudo-cubic perovskite-type phases

A. Demourgues, C. Dussarrat, R. Bontchev, B. Darriet, F. Weill, J. Darriet

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

1995

Language:

english

File:

PDF, 667 KB

english, 1995

12

Development of low-k precursors for next generation IC manufacturing

François Doniat, Curtis Anderson, Christian Dussarrat, James McAndrew, Robert Opila, Beverly Wright, Dan Yang

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 771 KB

english, 2012

13

The setting-up of an optical remote sensing system for target identification: a laboratory experiment

Dussarrat, O.J., Clark, D.F., Moir, T.J.

Journal:

IEEE Transactions on Education

Year:

1999

Language:

english

File:

PDF, 214 KB

english, 1999

14

Hydraulique des unités d'interfluves et de bas-fond tourbeux: un exemple en zone de socle altéré (Madagascar)

J.C. Grillot, B. Dussarrat

Journal:

Journal of Hydrology

Year:

1992

File:

PDF, 1.08 MB

1992

15

Crystal structures and magnetic properties of Ba4Ru3O10 and Ba5Ru3O12

C. Dussarrat, F. Grasset, R. Bontchev, J. Darriet

Journal:

Journal of Alloys and Compounds

Year:

1996

Language:

english

File:

PDF, 877 KB

english, 1996

16

Atomic Layer Deposition of Ruthenium Using the Novel Precursor bis(2,6,6-trimethyl-cyclohexadienyl)ruthenium

Gregorczyk, Keith, Henn-Lecordier, Laurent, Gatineau, Julien, Dussarrat, Christian, Rubloff, Gary

Journal:

Chemistry of Materials

Year:

2011

Language:

english

File:

PDF, 3.10 MB

english, 2011

17

Atomic Layer Deposition of SrTiO 3 Thin Films with Highly Enhanced Growth Rate for Ultrahigh Density Capacitors

Lee, Sang Woon, Han, Jeong Hwan, Han, Sora, Lee, Woongkyu, Jang, Jae Hyuck, Seo, Minha, Kim, Seong Keun, Dussarrat, C., Gatineau, J., Min, Yo-Sep, Hwang, Cheol Seong

Journal:

Chemistry of Materials

Year:

2011

Language:

english

File:

PDF, 3.96 MB

english, 2011

18

Novel Heteroleptic Precursors for Atomic Layer Deposition of TiO 2

Blanquart, Timothee, Niinistö, Jaakko, Gavagnin, Marco, Longo, Valentino, Pallem, Venkateswara R., Dussarrat, Christian, Ritala, Mikko, Leskelä, Markku

Journal:

Chemistry of Materials

Year:

2012

Language:

english

File:

PDF, 3.79 MB

english, 2012

19

A review of cation-ordered rock salt superstructure oxides

Mather, Glenn C., Dussarrat, Christian, Etourneau, Jean, West, Anthony R.

Journal:

Journal of Materials Chemistry

Year:

2000

Language:

english

File:

PDF, 591 KB

english, 2000

20

Nondestructive compositional depth profiling using variable-kinetic energy hard X-ray photoelectron spectroscopy and maximum entropy regularization

Weiland, C., Krajewski, J., Opila, R., Pallem, V., Dussarrat, C., Woicik, J. C.

Journal:

Surface and Interface Analysis

Year:

2014

Language:

english

File:

PDF, 663 KB

english, 2014

21

Growth of RuO 2 Thin Films by Pulsed-Chemical Vapor Deposition Using RuO 4 Precursor and 5% H 2 Reduction Gas

Han, Jeong Hwan, Lee, Sang Woon, Kim, Seong Keun, Han, Sora, Hwang, Cheol Seong, Dussarrat, Christian, Gatineau, Julien

Journal:

Chemistry of Materials

Year:

2010

Language:

english

File:

PDF, 2.44 MB

english, 2010

22

VO2 Films Prepared by Atomic Layer Deposition and RF Magnetron Sputtering

Tangirala, M., Zhang, K., Nminibapiel, D., Pallem, V., Dussarrat, C., Cao, W., Adam, T. N., Johnson, C. S., Elsayed-Ali, H., Baumgart, H.

Journal:

ECS Transactions

Year:

2013

Language:

english

File:

PDF, 9.41 MB

english, 2013

23

Chemical Vapor Deposition of Ru Thin Films with an Enhanced Morphology, Thermal Stability, and Electrical Properties Using a RuO 4 Precursor

Han, Jeong Hwan, Lee, Sang Woon, Choi, Gyu-Jin, Lee, Sang Young, Hwang, Cheol Seong, Dussarrat, Christian, Gatineau, Julien

Journal:

Chemistry of Materials

Year:

2009

Language:

english

File:

PDF, 727 KB

english, 2009

24

Synthesis of VO2 Thin Films by Atomic Layer Deposition with TEMAV as Precursor

Zhang, K., Tangirala, M., Nminibapiel, D., Cao, W., Pallem, V., Dussarrat, C., Baumgart, H.

Journal:

ECS Transactions

Year:

2013

Language:

english

File:

PDF, 430 KB

english, 2013

25

Improvement in the leakage current characteristic of metal-insulator-metal capacitor by adopting RuO2 film as bottom electrode

Han, Jeong Hwan, Han, Sora, Lee, Woongkyu, Lee, Sang Woon, Kim, Seong Keun, Gatineau, Julien, Dussarrat, Christian, Hwang, Cheol Seong

Journal:

Applied Physics Letters

Year:

2011

Language:

english

File:

PDF, 1.03 MB

english, 2011

26

Atomic Layer Deposition, Characterization, and Growth Mechanistic Studies of TiO 2 Thin Films

Kaipio, Mikko, Blanquart, Timothee, Tomczak, Yoann, Niinistö, Jaakko, Gavagnin, Marco, Longo, Valentino, Wanzenböck, Heinz D., Pallem, Venkateswara R., Dussarrat, Christian, Puukilainen, Esa, Ritala,

Journal:

Year:

2014

Language:

english

File:

PDF, 3.73 MB

english, 2014

27

Surface carbonization and nucleation during chemical vapor deposition of diamond

Louchev, Oleg A., Dussarrat, Christian, Sato, Yoichiro

Journal:

Journal of Applied Physics

Year:

1999

Language:

english

File:

PDF, 279 KB

english, 1999

28

Scaling of Copper Seed Layer Thickness Using Plasma-Enhanced ALD and Optimized Precursors

Mao, Jiajun, Eisenbraun, Eric, Omarjee, Vincent, Korolev, Andrey, Dussarrat, Christian

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2013

Language:

english

File:

PDF, 5.69 MB

english, 2013

29

Crystal structure of Ba2Li2/3Ti16/3O13

Dussarrat, Christian, Howie, R. Alan, Mather, Glenn C., Torres-martinez, Leticia M., West, Anthony R.

Journal:

Journal of Materials Chemistry

Year:

1997

Language:

english

File:

PDF, 156 KB

english, 1997

30

Preparation, thermal stability and crystal structure of a new ruthenium(V) oxide containing peroxide ions: Ba5Ru2O9(O2). Structural relationships to thehexagonal-type perovskite

Grasset, Fabien, Dussarrat, Christian, Darriet, Jacques

Journal:

Journal of Materials Chemistry

Year:

1997

Language:

english

File:

PDF, 137 KB

english, 1997

31

[IEEE 2011 22nd Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2011.05.16-2011.05.18)] 2011 IEEE/SEMI Advanced Semiconductor Manufacturing Conference - Scaling of copper seed layer thickness using plasma-enhanced ALD and an optimized precursor

Mao, Jiajun, Eisenbraun, Eric, Omarjee, Vincent, Korolev, Andrey, Dussarrat, Christian

Year:

2011

Language:

english

File:

PDF, 517 KB

english, 2011

32

[IEEE 2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference - Stresa, Italy (2007.06.11-2007.06.12)] 2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Novel Thermally-Stable Hafnium and Zirconium ALD Precursors

Pinchart, Audrey, Blasco, Nicolas, Lachaud, Christophe, Schleisman, Anthony, Dussarrat, Christian, Suzuki, Ikuo, Yanagita, K.

Year:

2007

Language:

english

File:

PDF, 62 KB

english, 2007

33

Onionlike structures and small nested fullerenes formation under electron irradiation of turbostratic BC[sub 2]N

O. Stephan, Y. Bando, C. Dussarrat, K. Kurashima, T. Sasaki, T. Tamiya, M. Akaishi

Year:

1997

Language:

english

File:

PDF, 847 KB

english, 1997

34

ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - Development of Lanthanide Precursors as Dopants for Advanced High-k Materials

Rao, Venkateswara P., Besancon, Brian, Omarjee, Vincent, Dussarrat, Christian

Year:

2010

Language:

english

File:

PDF, 843 KB

english, 2010

35

Design, Synthesis and ALD Assessment of Organometallic Precursors for Semiconductor Applications

Journal:

ECS Transactions

Year:

2014

Language:

english

File:

PDF, 211 KB

english, 2014

36

Atomic Layer Deposition of Ta–N-Based Thin Films Using a Tantalum Source

Schmidt, D., Knaut, M., Hossbach, C., Albert, M., Dussarrat, C., Hintze, B., Bartha, J. W.

Journal:

Journal of The Electrochemical Society

Year:

2010

Language:

english

File:

PDF, 603 KB

english, 2010

37

[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Extra Low-Temperature SiO2 Deposition Using Aminosilanes

Suzuki, Ikuo, Dussarrat, Christian, Yanagita, Kazutaka

Year:

2007

Language:

english

File:

PDF, 258 KB

english, 2007

38

[ECS 215th ECS Meeting - San Francisco, CA (May 24 - May 29, 2009)] ECS Transactions - Pulsed-Chemical Vapor Deposition of Ruthenium and Ruthenium Dioxide Thin Films using RuO4 Precursor for the DRAM Capacitor Electrode

Han, Jeong Hwan, Lee, Sang Woon, Choi, Gyu Jin, Lee, Sang Young, Hwang, Cheol Seong, Dussarrat, Christian, Gatineau, Julien

Year:

2009

Language:

english

File:

PDF, 1.46 MB

english, 2009

39

Low Temperature Copper Deposition by PE-ALD

Mao, Jiajun, Eisenbraun, Eric, Omarjee, Vincent, Lanslot, Clement, Dussarrat, Christian

Journal:

MRS Proceedings

Year:

2009

Language:

english

File:

PDF, 1.67 MB

english, 2009

40

[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Ti Source Precursors for Atomic Layer Deposition of TiO2, STO and BST

Katamreddy, Rajesh, Omarjee, Vincent, Feist, Benjamin, Dussarrat, Christian

Year:

2008

Language:

english

File:

PDF, 296 KB

english, 2008

41

Growth Characteristics and Film Properties of Cerium Dioxide Prepared by Plasma-Enhanced Atomic Layer Deposition

Kim, Woo-Hee, Kim, Min-Kyu, Maeng, W. J., Gatineau, Julien, Pallem, Venkat, Dussarrat, Christian, Noori, Atif, Thompson, David, Chu, Schubert, Kim, Hyungjun

Journal:

Journal of The Electrochemical Society

Year:

2011

Language:

english

File:

PDF, 670 KB

english, 2011

42

[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Advanced Precursor Development for Sr and Ti Based Oxide Thin Film Applications

Katamreddy, Rajesh, Wang, Ziyun, Omarjee, Vincent, Rao, Pallem V., Dussarrat, Christian, Blasco, Nicolas

Year:

2009

Language:

english

File:

PDF, 1.04 MB

english, 2009

43

ECS Transactions [ECS 220th ECS Meeting - Boston, MA (October 9 - October 14, 2011)] - Copper-ALD Seed Layer as an Enabler for Device Scaling

Mao, Jiajun, Eisenbraun, Eric, Omarjee, Vincent, Korolev, Andrey, Dussarrat, Christian

Year:

2011

Language:

english

File:

PDF, 311 KB

english, 2011

44

[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Tuning of Material and Electrical Properties of Strontium Titanates using Process Chemistry and Composition

Katamreddy, Rajesh, Omarjee, Vincent, Feist, Benjamin, Dussarrat, Christian, Singh, Manish, Takoudis, Christos

Year:

2008

Language:

english

File:

PDF, 664 KB

english, 2008

45

[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Evaluation of Trisilylamine for HfSiOx Atomic Layer Deposition

Dussarrat, Christian, Suzuki, Ikuo, Yanagita, Kazutaka

Year:

2006

Language:

english

File:

PDF, 105 KB

english, 2006

46

ECS Transactions [ECS 219th ECS Meeting - Montreal, QC, Canada (May 1 - May 6, 2011)] - Room Temperature Copper Seed Layer Deposition by Plasma-Enhanced Atomic Layer Deposition

Mao, Jiajun, Eisenbraun, Eric, Omarjee, Vincent, Korolev, Andrey, Dussarrat, Christian

Year:

2011

Language:

english

File:

PDF, 1.03 MB

english, 2011

47

ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - Comparison of HfSiO

Besancon, Brian, Weiland, Conan, Omarjee, Vincent, Rao, Venkateswara P., Dussarrat, Christian

Year:

2010

Language:

english

File:

PDF, 325 KB

english, 2010

48

ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - Ultra-Low Temperature Deposition of Copper Seed Layers by PEALD

Mao, Jiajun, Eisenbraun, Eric, Omarjee, Vincent, Korolev, Andrey, Lansalot, Clement, Dussarrat, Christian

Year:

2010

Language:

english

File:

PDF, 618 KB

english, 2010

49

Physical Analysis of VO2 Films Grown by Atomic Layer Deposition and RF Magnetron Sputtering

Tangirala, M., Zhang, K., Nminibapiel, D., Pallem, V., Dussarrat, C., Cao, W., Adam, T. N., Johnson, C. S., Elsayed-Ali, H. E., Baumgart, H.

Journal:

ECS Journal of Solid State Science and Technology

Year:

2014

Language:

english

File:

PDF, 819 KB

english, 2014

50

[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Low Pressure Chemical Vapor Deposition of Tantalum-Based Material

Yanagita, Kazutaka, Dussarrat, Christian, Beyssac, Laurent

Year:

2006

Language:

english

File:

PDF, 33 KB

english, 2006