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51

Observation of Substrate Silicon Incorporation into Thin Lanthanum Oxide Film during Rapid Thermal Annealing

Zhang, Jie Qiong, Yu, Dan Qun, Wong, Hei, Kakushima, Kuniyuki, Iwai, Hiroshi

Journal:

Advanced Materials Research

Year:

2015

Language:

english

File:

PDF, 661 KB

english, 2015

52

Electrical characteristics of asymmetrical silicon nanowire field-effect transistors

Sato, Soshi, Kakushima, Kuniyuki, Ohmori, Kenji, Natori, Kenji, Yamada, Keisaku, Iwai, Hiroshi

Journal:

Applied Physics Letters

Year:

2011

Language:

english

File:

PDF, 826 KB

english, 2011

53

ECS Transactions [ECS China Semiconductor Technology International Conference 2010 (CSTIC 2010) - Shanghai, China (March 18 - March 19, 2010)] - Electrical Characteristics of Rare Earth (La, Ce, Pr and Tm) Oxides/Silicates Gate Dielectric

Matano, Katsuya, Funamizu, Kiyohisa, Kouda, Miyuki, Kakushima, Kuniyuki, Ahmet, Parhat, Tsutsui, Kazuo, Nishiyama, Akira, Sugii, Nobuyuki, Natori, Kenji, Hattori, Takeo, Iwai, Hiroshi

Year:

2010

Language:

english

File:

PDF, 168 KB

english, 2010

54

Influence of Structural Parameters on Electrical Characteristics of Schottky Tunneling Field-Effect Transistor and Its Scalability

Wu, Yan, Dou, Chunmeng, Wei, Feng, Kakushima, Kuniyuki, Ohmori, Kenji, Ahmet, Parhat, Watanabe, Takanobu, Tsutsui, Kazuo, Nishiyama, Akira, Sugii, Nobuyuki, Natori, Kenji, Yamada, Keisaku, Kataoka, Yo

Journal:

Japanese Journal of Applied Physics

Year:

2013

Language:

english

File:

PDF, 744 KB

english, 2013

55

[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Leakage Current Characteristics of Ultra-Shallow Junctions Formed by B

Sauddin, Hendriansyah, Sasaki, Yuichiro, Ito, Hiroyuki, Mizuno, Bunji, Ahmet, Parhat, Kakushima, Kuniyuki, Sugii, Nobuyuki, Tsutsui, Kazuo, Iwai, Hiroshi

Year:

2006

Language:

english

File:

PDF, 289 KB

english, 2006

56

[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Electrical Properties of Lanthanum-scandate Gate Dielectric Directly Deposited on Ge

Bera, M.K. K., Song, J., Kakushima, Kuniyuki, Ahmet, Parhat, Tsutsui, Kazuo, Sugii, Nobuyuki, Hattori, Takeo, Iwai, Hiroshi

Year:

2009

Language:

english

File:

PDF, 878 KB

english, 2009

57

[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Study on Stress Memorization by Argon Implantation and Annealing

Hino, Masafumi, Nagata, Kouki, Yoshida, Tetsuya, Kosemura, Daisuke, Kakushima, Kuniyuki, Ahmet, Parhat, Tsutsui, Kazuo, Sugii, Nobuyuki, Ogura, Atsushi, Hattori, Takeo, Iwai, H.

Year:

2008

Language:

english

File:

PDF, 1.70 MB

english, 2008

58

[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Effect of Deposition Temperature on Chemical Structure of Lanthanum Oxide/Si Interface Structure

Nohira, Hiroshi, Matsuda, Toru, Tachi, Kiichi, Shiino, Yasuhiro, Song, Jaeyeol, Kuroki, Yusuke, Ng, Jin Aun, Ahmet, Parhat, Kakushima, Kuniyuki, Tsutsui, Kazuo, Ikenaga, Eiji, Kobayashi, Keisuke, Iwai

Year:

2006

Language:

english

File:

PDF, 551 KB

english, 2006

59

[ECS 208th ECS Meeting - Los Angeles, California (October 16-October 21, 2005)] ECS Transactions - Electrical Breakdown and Reliability of Metal Gate - La2O3 Thin Films after Post Deposition Annealing in N2

Molina, Joel, Tsutsui, Kazuo, Iwai, H., Kakushima, Kuniyuki, Sugii, Nobuyuki, Ahmet, Parhat

Year:

2006

Language:

english

File:

PDF, 667 KB

english, 2006

60

Analysis of Threshold Voltage Variation in Fin Field Effect Transistors: Separation of Short Channel Effects

Kobayashi, Yusuke, Tsutsui, Kazuo, Kakushima, Kuniyuki, Ahmet, Parhat, Rao, V. Ramgopal, Iwai, Hiroshi

Journal:

Japanese Journal of Applied Physics

Year:

2010

Language:

english

File:

PDF, 620 KB

english, 2010

61

Atomic Force Microscope Cantilever Array for Parallel Lithography of Quantum Devices

Kakushima, Kuniyuki, Watanabe, Toshiyuki, Shimamoto, Kouji, Gouda, Takushi, Ataka, Manabu, Mimura, Hidenori, Isono, Yoshimasa, Hashiguchi, Gen, Mihara, Yutaka, Fujita, Hiroyuki

Journal:

Japanese Journal of Applied Physics

Year:

2004

Language:

english

File:

PDF, 303 KB

english, 2004

62

High-permitivity cerium oxide prepared by molecular beam deposition as gate dielectric and passivation layer and applied to AlGaN/GaN power high electron mobility transistor devices

Chiu, Yu Sheng, Liao, Jen Ting, Lin, Yueh Chin, Liu, Shin Chien, Lin, Tai Ming, Iwai, Hiroshi, Kakushima, Kuniyuki, Chang, Edward Yi

Journal:

Japanese Journal of Applied Physics

Year:

2016

Language:

english

File:

PDF, 1.36 MB

english, 2016

63

Anomalous degradation of low-field mobility in short-channel metal-oxide-semiconductor field-effect transistors

Natori, Kenji, Iwai, Hiroshi, Kakushima, Kuniyuki

Journal:

Journal of Applied Physics

Year:

2015

Language:

english

File:

PDF, 544 KB

english, 2015

64

Switching Dynamics Measurement of Ferroelectric Y-Doped HfO 2 M-I-M Capacitor

Lin, YuWei, Mizutani, Kazuto, Hoshii, Takuya, Wakabayashi, Hitoshi, Tsutsui, Kazuo, Kakushima, Kuniyuki

Journal:

ECS Transactions

Year:

2020

File:

PDF, 1.13 MB

2020

65

[IEEE 2009 Proceedings of the European Solid State Device Research Conference (ESSDERC) - Athens, Greece (2009.09.14-2009.09.18)] 2009 Proceedings of the European Solid State Device Research Conference - High-performance Si Nanowire FET with a semi gate-around structure suitable for integration

Sato, Soshi, Kamimura, Hideyuki, Arai, Hideaki, Kakushima, Kuniyuki, Ahmet, Parhat, Ohmori, Kenji, Yamada, Keisaku, Iwai, Hiroshi

Year:

2009

Language:

english

File:

PDF, 1.25 MB

english, 2009

66

Exceptional plasticity of silicon nanobridges

Ishida, Tadashi, Cleri, Fabrizio, Kakushima, Kuniyuki, Mita, Makoto, Sato, Takaaki, Miyata, Masaki, Itamura, Noriaki, Endo, Junji, Toshiyoshi, Hiroshi, Sasaki, Naruo, Collard, Dominique, Fujita, Hiroy

Journal:

Year:

2011

Language:

english

File:

PDF, 1.51 MB

english, 2011

67

[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - La2O3 Gate Dielectric Thin Film with Sc2O3 Buffer Layer for High Temperature Annealing

Shiino, Yasuhiro, Kakushima, Kuniyuki, Ahmet, Parhat, Tsutsui, Kazuo, Sugii, Nobuyuki, Hattori, Takeo, Iwai, H.

Year:

2006

Language:

english

File:

PDF, 163 KB

english, 2006

68

ECS Transactions [ECS 219th ECS Meeting - Montreal, QC, Canada (May 1 - May 6, 2011)] - Si Nanowire FET Technology

Iwai, Hiroshi, Natori, Kenji, Shiraishi, Kenji, Iwata, Jun-ichi, Oshiyama, Atsushi, Yamada, Keisaku, Ohmori, Kenji, Kakushima, Kuniyuki, Ahmet, Parhat

Year:

2011

Language:

english

File:

PDF, 3.96 MB

english, 2011

69

Photoluminescence characterization in silicon nanowire fabricated by thermal oxidation of nano-scale Si fin structure

Sakurai, Yoko, Kakushima, Kuniyuki, Ohmori, Kenji, Yamada, Keisaku, Iwai, Hiroshi, Shiraishi, Kenji, Nomura, Shintaro

Journal:

Year:

2014

Language:

english

File:

PDF, 2.37 MB

english, 2014

70

[IEEE 2010 International Workshop on Junction Technology (IWJT) - Shanghai, China (2010.05.10-2010.05.11)] 2010 International Workshop on Junction Technology Extended Abstracts - Er inserted Ni silicide metal source/drain for Schottky MOSFETs

Ahmet, Parhat, Hosoda, Wataru, Noguchi, Kohei, Ohishi, Yoshihisa, Kakushima, Kuniyuki, Tsutsui, Kazuo, Iwai, Hiroshi

Year:

2010

Language:

english

File:

PDF, 767 KB

english, 2010

71

ECS Transactions [ECS China Semiconductor Technology International Conference 2011 (CSTIC 2011) - Shanghai, China (March 13 - March 14, 2011)] - Annealing Effect on the Electrical Properties of La

Kanda, Takashi, Zade, Dariush, Lin, Yueh C., Kakushima, Kuniyuki, Ahmet, Parhat, Tsutsui, Kazuo, Nishiyama, Akira, Sugii, Nobuyuki, Chang, Edward Y., Natori, Kenji, Hattori, Takeo, Iwai, Hiroshi

Year:

2011

Language:

english

File:

PDF, 167 KB

english, 2011

72

Effects of N[sub 2]-Based Annealing on the Reliability Characteristics of Tungsten/La[sub 2]O[sub 3]/Silicon Capacitors

Molina, Joel, Tachi, Kiichi, Kakushima, Kuniyuki, Ahmet, Parhat, Tsutsui, Kazuo, Sugii, Nobuyuki, Hattori, Takeo, Iwai, Hiroshi

Journal:

Journal of The Electrochemical Society

Year:

2007

Language:

english

File:

PDF, 388 KB

english, 2007

73

[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Crystallographic Orientation Dependent Electrical Characteristics of La

Nakayama, Hiroto, Kakushima, Kuniyuki, Ahmet, Parhat, Ikenaga, Eiji, Tsutsui, Kazuo, Sugii, Nobuyuki, Hattori, Takeo, Iwai, Hiroshi

Year:

2009

Language:

english

File:

PDF, 745 KB

english, 2009

74

[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Electrical Properties of CeOX /La2O3 Stack as a Gate Dielectric for Advanced MOSFET Technology

Kouda, Miyuki, Tachi, Kiichi, Kakushima, Kuniyuki, Ahmet, Parhat, Tsutsui, Kazuo, Sugii, Nobuyuki, Chandorkar, Arun, Hattori, Takeo, Iwai, H.

Year:

2008

Language:

english

File:

PDF, 304 KB

english, 2008

75

Leakage current and structural analysis of annealed HfO2/La2O3 and CeO2/La2O3 dielectric stacks: A nanoscopic study

Shubhakar, Kalya, Pey, Kin Leong, Bosman, Michel, Kushvaha, Sunil Singh, O'Shea, Sean Joseph, Kouda, Miyuki, Kakushima, Kuniyuki, Iwai, Hiroshi

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2014

Language:

english

File:

PDF, 2.35 MB

english, 2014

76

SPIE Proceedings [SPIE Optomechatronic Technologies 2005 - Sapporo, Japan (Monday 5 December 2005)] Optomechatronic Micro/Nano Devices and Components - Electrical conductivity of lambda DNA-Pd wire

Hosogi, Maho, Hashiguchi, Gen, Haga, Masa-aki, Yonezawa, Tetsu, Kakushima, Kuniyuki, Fujita, Hiroyuki, Katagiri, Yoshitada

Year:

2005

Language:

english

File:

PDF, 711 KB

english, 2005

77

(Invited) High-K Evolution: Subnanometer EOT Challenges and Future Perspectives for Scaling

Wong, Hei, Zhang, Jieqiong, Iwai, Hiroshi, Kakushima, Kuniyuki

Journal:

ECS Transactions

Year:

2017

Language:

english

File:

PDF, 5.17 MB

english, 2017

78

DNA Manipulation and Retrieval from an Aqueous Solution with Micromachined Nanotweezers

Hashiguchi, Gen, Goda, Takushi, Hosogi, Maho, Hirano, Ken, Kaji, Noritada, Baba, Yoshinobu, Kakushima, Kuniyuki, Fujita, Hiroyuki

Journal:

Analytical Chemistry

Year:

2003

Language:

english

File:

PDF, 161 KB

english, 2003

79

ECS Transactions [ECS 220th ECS Meeting - Boston, MA (October 9 - October 14, 2011)] - Electrical Properties of Rare-Earth Oxides and La

Kouda, Miyuki, Kakushima, Kuniyuki, Ahmet, Parhat, Tsutsui, Kazuo, Nishiyama, Akira, Sugii, Nobuyuki, Natori, Kenji, Hattori, Takeo, Iwai, Hiroshi

Year:

2011

Language:

english

File:

PDF, 705 KB

english, 2011

80

Silicate Reaction Control at Lanthanum Oxide and Silicon Interface for Equivalent Oxide Thickness of 0.5 nm: Adjustment of Amount of Residual Oxygen Atoms in Metal Layer

Kitayama, Daisuke, Kubota, Toru, Koyanagi, Tomotsune, Kakushima, Kuniyuki, Ahmet, Parhat, Tsutsui, Kazuo, Nishiyama, Akira, Sugii, Nobuyuki, Natori, Kenji, Hattori, Takeo, Iwai, Hiroshi

Journal:

Japanese Journal of Applied Physics

Year:

2011

Language:

english

File:

PDF, 659 KB

english, 2011

81

[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Annealing-temperature Dependence of Compositional Depth Profile and Chemical Structures of LaOx/ScOx/Si and ScOx/LaOx/Si Interfacial Transition Layer

Nohira, Hiroshi, Takenaga, Yoshinori, Kakushima, Kuniyuki, Ahmet, Parhat, Tsutsui, Kazuo, Iwai, H.

Year:

2008

Language:

english

File:

PDF, 7.38 MB

english, 2008

82

Capacitance–Voltage Characterization of La$_{2}$O$_{3}$ Metal–Oxide–Semiconductor Structures on In$_{0.53}$Ga$_{0.47}$As Substrate with Different Surface Treatment Methods

Zade, Dariush, Kanda, Takashi, Yamashita, Koji, Kakushima, Kuniyuki, Nohira, Hiroshi, Ahmet, Parhat, Tsutsui, Kazuo, Nishiyama, Akira, Sugii, Nobuyuki, Natori, Kenji, Hattori, Takeo, Iwai, Hiroshi

Journal:

Japanese Journal of Applied Physics

Year:

2011

Language:

english

File:

PDF, 272 KB

english, 2011

83

Temperature-Independent Two-Dimensional Hole Gas Confined at GaN/AlGaN Heterointerface

Nakajima, Akira, Liu, Pucheng, Ogura, Masahiko, Makino, Toshiharu, Nishizawa, Shin-ichi, Yamasaki, Satoshi, Ohashi, Hiromichi, Kakushima, Kuniyuki, Iwai, Hiroshi

Journal:

Applied Physics Express

Year:

2013

Language:

english

File:

PDF, 1.04 MB

english, 2013

84

[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Improvement of Interface Properties of W/La2O3/Si MOS Structure Using Al Capping Layer

Tachi, Kiichi, Kakushima, Kuniyuki, Ahmet, Parhat, Tsutsui, Kazuo, Sugii, Nobuyuki, Hattori, Takeo, Iwai, Hiroshi

Year:

2007

Language:

english

File:

PDF, 516 KB

english, 2007

85

[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Impact of Alkali Earth Elements Incorporation on Electrical Characteristics of La

Koyanagi, Tomotsune, Okamoto, Kouichi, Kakushima, Kuniyuki, Ahmet, Parhat, Tsutsui, Kazuo, Nishiyama, Akira, Sugii, Nobuyuki, Natori, Kenji, Hattori, Takeo, Iwai, Hiroshi

Year:

2009

Language:

english

File:

PDF, 409 KB

english, 2009

86

SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 26 April 2004)] MEMS, MOEMS, and Micromachining - MEMS application to characterization of field emitters and biomolecules

Kakushima, Kuniyuki, Urey, Hakan, El-Fatatry, Ayman, Fujita, Hiroyuki

Year:

2004

Language:

english

File:

PDF, 553 KB

english, 2004

87

Annealing Behavior of La2O3 Thin Film Deposited on Si (001) Substrate Studied by Spherical Aberration Corrected TEM/STEM

Inamoto, Shin, Yamasaki, Jun, Okunishi, Eiji, Kakushima, Kuniyuki, Iwai, Hiroshi, Tanaka, Nobuo

Journal:

Transactions of the Materials Research Society of Japan

Year:

2009

Language:

english

File:

PDF, 1.67 MB

english, 2009

88

Gate Stack Technology

IWAI, Hiroshi, KAKUSHIMA, Kuniyuki, KAWANAGO, Takamasa

Journal:

Year:

2012

File:

PDF, 1.50 MB

2012

89

Activated boron and its concentration profiles in heavily doped Si studied by soft x-ray photoelectron spectroscopy and Hall measurements

Tsutsui, Kazuo, Matsuda, Toru, Watanabe, Masamitsu, Jin, Cheng-Guo, Sasaki, Yuichiro, Mizuno, Bunji, Ikenaga, Eiji, Kakushima, Kuniyuki, Ahmet, Parhat, Maruizumi, Takuya, Nohira, Hiroshi, Hattori, Tak

Journal:

Journal of Applied Physics

Year:

2008

Language:

english

File:

PDF, 699 KB

english, 2008

90

[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Interfacial Dipole Measurement of Dielectric/Silicon Interface by X-ray Photoelectron Spectroscopy

Kakushima, Kuniyuki, Okamoto, Kouichi, Tachi, Kiichi, Sato, Soushi, Song, Jaeyeol, Kawanago, Takamasa, Ahmet, Parhat, Sugii, Nobuyuki, Tsutsui, Kazuo, Hattori, Takeo, Iwai, H.

Year:

2009

Language:

english

File:

PDF, 319 KB

english, 2009

91

Characteristics of Ultrathin Lanthanum Oxide Films on Germanium Substrate: Comparison with Those on Silicon Substrate

Song, Jaeyeol, Kakushima, Kuniyuki, Ahmet, Parhat, Tsutsui, Kazuo, Sugii, Nobuyuki, Hattori, Takeo, Iwai, Hiroshi

Journal:

Japanese Journal of Applied Physics

Year:

2007

Language:

english

File:

PDF, 223 KB

english, 2007

92

Low-Temperature MoS2 Film Formation using Sputtering and H2S Annealing

Shimizu, Junrichi, Ohashi, Takumi, Matsuura, Kentaro, Muneta, Iriya, Kakushima, Kuniyuki, Tsutsui, Kazuo, Ikarashi, Nobuyuki, Wakabayashi, Hitoshi

Journal:

IEEE Journal of the Electron Devices Society

Year:

2018

File:

PDF, 6 KB

2018

93

La2O3 gate insulators prepared by atomic layer deposition: Optimal growth conditions and MgO/La2O3 stacks for improved metal-oxide-semiconductor characteristics

Suzuki, Takuya, Kouda, Miyuki, Ahmet, Parhat, Iwai, Hiroshi, Kakushima, Kuniyuki, Yasuda, Tetsuji

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2012

Language:

english

File:

PDF, 2.85 MB

english, 2012

94

Extraction of additional interfacial states of silicon nanowire field-effect transistors

Sato, Soshi, Li, Wei, Kakushima, Kuniyuki, Ohmori, Kenji, Natori, Kenji, Yamada, Keisaku, Iwai, Hiroshi

Journal:

Applied Physics Letters

Year:

2011

Language:

english

File:

PDF, 446 KB

english, 2011

95

Corner effects on phonon-limited mobility in rectangular silicon nanowire metal-oxide-semiconductor field-effect transistors based on spatially resolved mobility analysis

Lee, Yeonghun, Kakushima, Kuniyuki, Natori, Kenji, Iwai, Hiroshi

Journal:

Journal of Applied Physics

Year:

2011

Language:

english

File:

PDF, 2.56 MB

english, 2011

96

[IEEE 2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings - Shanghai, China (2006.10.23-2006.10.26)] 2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings - La-based oxides for high-k gate dielectric application

Ahmet, Parhat, Kakushima, Kuniyuki, Tsutsui, Kazuo, Sugii, Nobuyuki, Hattori, Takeo, Iwai, Hiroshi

Year:

2006

Language:

english

File:

PDF, 143 KB

english, 2006

97

Study of High-$\kappa$/In$_{0.53}$Ga$_{0.47}$As Interface by Hard X-ray Photoemission Spectroscopy

Yamashita, Koji, Numajiri, Yuuya, Watanabe, Masato, Kakushima, Kuniyuki, Iwai, Hiroshi, Nohira, Hiroshi

Journal:

Japanese Journal of Applied Physics

Year:

2011

Language:

english

File:

PDF, 1.26 MB

english, 2011

98

ECS Transactions [ECS China Semiconductor Technology International Conference 2012 (CSTIC 2012) - Shanghai, China (March 18 - March 19, 2012)] - Characterization of Metal Schottky Junction for In

Hosoi, Ryuji, Suzuki, Yuya, Zadeh, Darius, Kakushima, Kuniyuki, Ahmet, Parhat, Kataoka, Yoshinori, Nishiyama, Akira, Sugii, Nobuyuki, Tsutsui, Kazuo, Natori, Kenji, Hattori, Takeo, Iwai, Hiroshi

Year:

2012

Language:

english

File:

PDF, 329 KB

english, 2012

99

Dependence of ohmic contact properties on AlGaN layer thickness for AlGaN/GaN high-electron-mobility transistors

Takei, Yusuke, Tsutsui, Kazuo, Saito, Wataru, Kakushima, Kuniyuki, Wakabayashi, Hitoshi, Iwai, Hiroshi

Journal:

Japanese Journal of Applied Physics

Year:

2016

Language:

english

File:

PDF, 924 KB

english, 2016

100

X-ray photoelectron spectroscopy study of high-k CeO 2 /La 2 O 3 stacked dielectrics

Zhang, Jieqiong, Wong, Hei, Yu, Danqun, Kakushima, Kuniyuki, Iwai, Hiroshi

Journal:

Year:

2014

Language:

english

File:

PDF, 6.50 MB

english, 2014

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