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51

Holmium and titanium oxide nanolaminates by atomic layer deposition

Kukli, Kaupo, Lu, Jun, Link, Joosep, Kemell, Marianna, Puukilainen, Esa, Heikkilä, Mikko, Hoxha, Roland, Tamm, Aile, Hultman, Lars, Stern, Raivo, Ritala, Mikko, Leskelä, Markku

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1.81 MB

english, 2014

52

Atomic force microscopy study of titanium dioxide thin films grown by atomic layer epitaxy

Mikko Ritala, Markku Leskelä, Leena-Sisko Johansson, Lauri Niinistö

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 2.76 MB

english, 1993

53

Atomic Layer Deposition of Nanostructured TiO2 Photocatalysts via Template Approach

Kemell, Marianna, Pore, Viljami, Tupala, Jere, Ritala, Mikko, Leskelä, Markku

Journal:

Chemistry of Materials

Year:

2007

Language:

english

File:

PDF, 372 KB

english, 2007

54

Low temperature atomic layer deposition of noble metals using ozone and molecular hydrogen as reactants

Hämäläinen, Jani, Puukilainen, Esa, Sajavaara, Timo, Ritala, Mikko, Leskelä, Markku

Journal:

Thin Solid Films

Year:

2013

Language:

english

File:

PDF, 1.29 MB

english, 2013

55

Alkylsilyl compounds as enablers of atomic layer deposition: analysis of (Et 3 Si) 3 As through the GaAs process

Sarnet, Tiina, Hatanpää, Timo, Laitinen, Mikko, Sajavaara, Timo, Mizohata, Kenichiro, Ritala, Mikko, Leskelä, Markku

Journal:

Journal of Materials Chemistry C

Year:

2016

Language:

english

File:

PDF, 2.21 MB

english, 2016

56

Facile Heterolytic H2 Activation by Amines and B(C6F5)3

Victor Sumerin, Felix Schulz, Martin Nieger, Markku Leskelä, Timo Repo, Bernhard Rieger

Journal:

Angewandte Chemie International Edition

Year:

2008

Language:

english

File:

PDF, 303 KB

english, 2008

57

Atomic Layer Deposition of Ferroelectric Bismuth Titanate Bi 4 Ti 3 O 12 Thin Films

Vehkamäki, Marko, Hatanpää, Timo, Kemell, Marianna, Ritala, Mikko, Leskelä, Markku

Journal:

Chemistry of Materials

Year:

2006

Language:

english

File:

PDF, 631 KB

english, 2006

58

Copolymerization of propene with phenylnorbornene using ansa-bridged metallocene catalysts

Erkki Aitola, Timo Repo, Christer Bergström, Markku Leskelä

Journal:

Journal of Applied Polymer Science

Year:

2002

Language:

english

File:

PDF, 178 KB

english, 2002

59

Deposition of manganese-doped zinc sulfide thin films by the successive ionic layer adsorption and reaction (SILAR) method

Seppo Lindroos, Tapio Kanniainen, Markku Leskelä, Eero Rauhala

Journal:

Thin Solid Films

Year:

1995

Language:

english

File:

PDF, 534 KB

english, 1995

60

Holmium titanium oxide thin films grown by atomic layer deposition

Kukli, Kaupo, Kemell, Marianna, Dimri, Mukesh Chandra, Puukilainen, Esa, Tamm, Aile, Stern, Raivo, Ritala, Mikko, Leskelä, Markku

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1.04 MB

english, 2014

61

Atomic layer epitaxy: chemical opportunities and challenges

Lauri Niinistö, Markku Leskelä

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 517 KB

english, 1993

62

Substrate Reactivity Effects in the Atomic Layer Deposition of Aluminum Oxide from Trimethylaluminum on Ruthenium

Tallarida, Massimo, Kukli, Kaupo, Michling, Marcel, Ritala, Mikko, Leskelä, Markku, Schmeisser, Dieter

Journal:

Chemistry of Materials

Year:

2011

Language:

english

File:

PDF, 4.31 MB

english, 2011

63

Structural and spectroscopic characterization of Cu(salen) complexes bearing long alkoxy chains

Räisänen, Minna T., Klinga, Martti, Leskelä, Markku, Nieger, Martin, Repo, Timo

Journal:

Journal of Coordination Chemistry

Year:

2010

Language:

english

File:

PDF, 440 KB

english, 2010

64

Preparation of Lithium Containing Oxides by the Solid State Reaction of Atomic Layer Deposited Thin Films

Atosuo, Elisa, Mäntymäki, Miia, Mizohata, Kenichiro, Heikkilä, Mikko J., Räisänen, Jyrki, Ritala, Mikko, Leskelä, Markku

Journal:

Chemistry of Materials

Year:

2017

Language:

english

File:

PDF, 2.14 MB

english, 2017

65

Atomic layer deposition and characterization of zirconium oxide–erbium oxide nanolaminates

Aile Tamm, Mikko Heikkilä, Marianna Kemell, Jekaterina Kozlova, Kaupo Kukli, Väino Sammelselg, Mikko Ritala, Markku Leskelä

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 1.34 MB

english, 2010

66

Tailoring the dielectric properties of HfO2–Ta2O5 nanolaminates

Kukli, Kaupo, Ihanus, Jarkko, Ritala, Mikko, Leskela, Markku

Journal:

Applied Physics Letters

Year:

1996

Language:

english

File:

PDF, 266 KB

english, 1996

67

Controlling the Crystallinity and Roughness of Atomic Layer Deposited Titanium Dioxide Films

Puurunen, Riikka L., Sajavaara, Timo, Santala, Eero, Miikkulainen, Ville, Saukkonen, Tapio, Laitinen, Mikko, Leskelä, Markku

Journal:

Journal of Nanoscience and Nanotechnology

Year:

2011

Language:

english

File:

PDF, 8.84 MB

english, 2011

68

A frustrated-Lewis-pair approach to catalytic reduction of alkynes to cis-alkenes

Chernichenko, Konstantin, Madarász, Ádám, Pápai, Imre, Nieger, Martin, Leskelä, Markku, Repo, Timo

Journal:

Nature Chemistry

Year:

2013

Language:

english

File:

PDF, 4.69 MB

english, 2013

69

Atomic layer deposition of lanthanum oxide with heteroleptic cyclopentadienyl-amidinate lanthanum precursor - Effect of the oxygen source on the film growth and properties

Seppälä, Sanni, Niinistö, Jaakko, Mattinen, Miika, Mizohata, Kenichiro, Räisänen, Jyrki, Noh, Wontae, Ritala, Mikko, Leskelä, Markku

Journal:

Thin Solid Films

Year:

2018

Language:

english

File:

PDF, 2.07 MB

english, 2018

70

Synthesis and X-ray Structures of New Mononuclear and Dinuclear Diimine Complexes of Late Transition Metals

Timo V. Laine, Martti Klinga, Markku Leskelä

Journal:

European Journal of Inorganic Chemistry

Year:

1999

Language:

english

File:

PDF, 254 KB

english, 1999

71

In Situ Reaction Mechanism Studies on Atomic Layer Deposition of Al x Si y O z from Trimethylaluminium, Hexakis(ethylamino)disilane, and Water

Tomczak, Yoann, Knapas, Kjell, Haukka, Suvi, Kemell, Marianna, Heikkilä, Mikko, Ceccato, Marcel, Leskelä, Markku, Ritala, Mikko

Journal:

Chemistry of Materials

Year:

2012

Language:

english

File:

PDF, 1.90 MB

english, 2012

72

Studies on Thermal Atomic Layer Deposition of Silver Thin Films

Mäkelä, Maarit, Hatanpää, Timo, Mizohata, Kenichiro, Meinander, Kristoffer, Niinistö, Jaakko, Räisänen, Jyrki, Ritala, Mikko, Leskelä, Markku

Journal:

Chemistry of Materials

Year:

2017

Language:

english

File:

PDF, 1.77 MB

english, 2017

73

Diamine Adduct of Cobalt(II) Chloride as a Precursor for Atomic Layer Deposition of Stoichiometric Cobalt(II) Oxide and Reduction Thereof to Cobalt Metal Thin Films

Väyrynen, Katja, Hatanpää, Timo, Mattinen, Miika, Heikkilä, Mikko, Mizohata, Kenichiro, Meinander, Kristoffer, Räisänen, Jyrki, Ritala, Mikko, Leskelä, Markku

Journal:

Chemistry of Materials

Year:

2018

Language:

english

File:

PDF, 1.11 MB

english, 2018

74

Atomic Layer Deposition of Noble Metals and Their Oxides

Hämäläinen, Jani, Ritala, Mikko, Leskelä, Markku

Journal:

Chemistry of Materials

Year:

2014

Language:

english

File:

PDF, 731 KB

english, 2014

75

HfO[sub 2] Films Grown by ALD Using Cyclopentadienyl-Type Precursors and H[sub 2]O or O[sub 3] as Oxygen Source

Niinistö, Jaakko, Putkonen, Matti, Niinistö, Lauri, Arstila, Kai, Sajavaara, Timo, Lu, Jun, Kukli, Kaupo, Ritala, Mikko, Leskelä, Markku

Journal:

Journal of The Electrochemical Society

Year:

2006

Language:

english

File:

PDF, 517 KB

english, 2006

76

Toward the Understanding of Stacked Al-Based High-k Dielectrics for Passivation of 4H-SiC Devices

Usman, Muhammad, Hallén, Anders, Pilvi, Tero, Schöner, Adolf, Leskelä, Markku

Journal:

Journal of The Electrochemical Society

Year:

2011

Language:

english

File:

PDF, 520 KB

english, 2011

77

Properties of HfO[sub 2] Thin Films Grown by ALD from Hafnium tetrakis(ethylmethylamide) and Water

Kukli, Kaupo, Ritala, Mikko, Lu, Jun, Hårsta, Anders, Leskelä, Markku

Journal:

Journal of The Electrochemical Society

Year:

2004

Language:

english

File:

PDF, 177 KB

english, 2004

78

Atomic Layer Deposition of Zirconium Dioxide from Zirconium Tetraiodide and Ozone

Kukli, Kaupo, Kemell, Marianna, Mizohata, Kenichiro, Vehkamäki, Marko, Kalam, Kristjan, Castán, Helena, Dueñas, Salvador, Link, Joosep, Stern, Raivo, Ritala, Mikko, Leskelä, Markku

Journal:

ECS Journal of Solid State Science and Technology

Year:

2018

Language:

english

File:

PDF, 1.67 MB

english, 2018

79

Properties of [Mg 2 (thd) 4 ] as a Precursor for Atomic Layer Deposition of MgO Thin Films and Crystal Structures of [Mg 2 (thd) 4 ] and [Mg(thd) 2 (EtOH) 2 ]

Hatanpää, Timo, Ihanus, Jarkko, Kansikas, Jarno, Mutikainen, Ilpo, Ritala, Mikko, Leskelä, Markku

Journal:

Chemistry of Materials

Year:

1999

Language:

english

File:

PDF, 161 KB

english, 1999

80

Novel mixed alkylamido-cyclopentadienyl precursors for ALD of ZrO2 thin films

Niinistö, Jaakko, Kukli, Kaupo, Kariniemi, Maarit, Ritala, Mikko, Leskelä, Markku, Blasco, Nicolas, Pinchart, Audrey, Lachaud, Christophe, Laaroussi, Nadia, Wang, Ziyun, Dussarrat, Christian

Journal:

Journal of Materials Chemistry

Year:

2008

Language:

english

File:

PDF, 706 KB

english, 2008

81

Bismuth iron oxide thin films using atomic layer deposition of alternating bismuth oxide and iron oxide layers

Puttaswamy, Manjunath, Vehkamäki, Marko, Kukli, Kaupo, Dimri, Mukesh Chandra, Kemell, Marianna, Hatanpää, Timo, Heikkilä, Mikko J., Mizohata, Kenichiro, Stern, Raivo, Ritala, Mikko, Leskelä, Markku

Journal:

Thin Solid Films

Year:

2016

Language:

english

File:

PDF, 2.02 MB

english, 2016

82

Growth of titanium dioxide thin films by atomic layer epitaxy

Mikko Ritala, Markku Leskelä, Erja Nykänen, Pekka Soininen, Lauri Niinistö

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 745 KB

english, 1993

83

Influence of atomic layer deposition chemistry on high-k dielectrics for charge trapping memories

Nikolaos Nikolaou, Panagiotis Dimitrakis, Pascal Normand, Vassilios Ioannou-Sougleridis, Konstantinos Giannakopoulos, Konstantina Mergia, Kaupo Kukli, Jaakko Niinistö, Mikko Ritala, Markku Leskelä

Journal:

Solid-State Electronics

Year:

2012

Language:

english

File:

PDF, 1.79 MB

english, 2012

84

Atomic layer deposition of zirconium dioxide from zirconium tetrachloride and ozone

Kukli, Kaupo, Kemell, Marianna, Köykkä, Joel, Mizohata, Kenichiro, Vehkamäki, Marko, Ritala, Mikko, Leskelä, Markku

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 1.35 MB

english, 2015

85

Patterned films by atomic layer deposition using Parafilm as a mask

Zhang, Chao, Kalliomäki, Jesse, Leskelä, Markku, Ritala, Mikko

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2018

Language:

english

File:

PDF, 3.66 MB

english, 2018

86

Mechanistic Insights into the Oxidation of Veratryl Alcohol with Co(salen) and Oxygen in Aqueous Media: An in-situ Spectroscopic Study

Kaisa Kervinen, Heikki Korpi, J. Gerbrand Mesu, Fouad Soulimani, Timo Repo, Bernhard Rieger, Markku Leskelä, Bert M. Weckhuysen

Journal:

European Journal of Inorganic Chemistry

Year:

2005

Language:

english

File:

PDF, 220 KB

english, 2005

87

Sensitization of Tb3+ luminescence with Ce3+ in LaOBr: Tb3+, Ce3+

Jorma Ho¨lsa¨, Markku Leskela¨, Lauri Niinisto¨

Journal:

Journal of Solid State Chemistry

Year:

1981

Language:

english

File:

PDF, 219 KB

english, 1981

88

Polymerization of ethene with zirconocene catalysts: an experimental and quantum chemical study of the influence of para-substituent in benzyl in bis{η5-(1-benzyl)indenyl}zirconium dichlorides

Erkki Aitola, Marina Surakka, Timo Repo, Mikko Linnolahti, Kristian Lappalainen, Kaisa Kervinen, Martti Klinga, Tapani Pakkanen, Markku Leskelä

Journal:

Journal of Organometallic Chemistry

Year:

2005

Language:

english

File:

PDF, 440 KB

english, 2005

89

New bis(imino)pyridine-iron(II)- and cobalt(II)-based catalysts: synthesis, characterization and activity towards polymerization of ethylene

Adnan S Abu-Surrah, Kristian Lappalainen, Ulla Piironen, Petri Lehmus, Timo Repo, Markku Leskelä

Journal:

Journal of Organometallic Chemistry

Year:

2002

Language:

english

File:

PDF, 133 KB

english, 2002

90

Growth of ZnS, CdS and multilayer ZnS/CdS thin films by SILAR technique

Mika P Valkonen, Tapio Kanniainen, Seppo Lindroos, Markku Leskelä, Eero Rauhala

Journal:

Applied Surface Science

Year:

1997

Language:

english

File:

PDF, 605 KB

english, 1997

91

Copolymerization of carbon monoxide with exo-methylenecycloalkane and dienes: synthesis of functionalized aliphatic polyketones

Mika Kettunen, Adnan S Abu-Surrah, Timo Repo, Markku Leskelä

Journal:

Polymer International

Year:

2001

Language:

english

File:

PDF, 99 KB

english, 2001

92

Platinum and Palladium Complexes Bearing New (1R,2R)-(–)-1,2-Diaminocyclohexane (DACH)-Based Nitrogen Ligands: Evaluation of the Complexes Against L1210 Leukemia

Adnan S. Abu–Surrah, Mika Kettunen, Markku Leskelä, Yousef Al-Abed

Journal:

Zeitschrift für anorganische und allgemeine Chemie

Year:

2008

Language:

english

File:

PDF, 93 KB

english, 2008

93

Atomic layer epitaxy growth of titanium dioxide thin films from titanium ethoxide

Ritala, Mikko, Leskela, Markku, Rauhala, Eero

Journal:

Chemistry of Materials

Year:

1994

Language:

english

File:

PDF, 1.88 MB

english, 1994

94

Luminescence properties of europium(3+)-doped rare-earth oxyhydroxides

Holsa, Jorma, Leskela, Tuula, Leskela, Markku

Journal:

Inorganic Chemistry

Year:

1985

Language:

english

File:

PDF, 516 KB

english, 1985

95

Parallel Screening of Homogeneous Copper Catalysts for the Oxidation of Benzylic Alcohols with Molecular Oxygen in Aqueous Solutions

Lahtinen, Petro, Korpi, Heikki, Haavisto, Elina, Leskelä, Markku, Repo, Timo

Journal:

Journal of Combinatorial Chemistry

Year:

2004

Language:

english

File:

PDF, 330 KB

english, 2004

96

Titanium and Zirconium Benzyl Complexes Bearing Bulky Bis(amido)cyclodiphosph(III)azanes: Synthesis, Structure, Activation, and Ethene Polymerization Studies

Axenov, Kirill V., Kilpeläinen, Ilkka, Klinga, Martti, Leskelä, Markku, Repo, Timo

Journal:

Organometallics

Year:

2006

Language:

english

File:

PDF, 175 KB

english, 2006

97

MANOS erase performance dependence on nitrogen annealing conditions

Ioannou-Sougleridis, Vassilios, Nikolaou, Nikolaos, Dimitrakis, Panagiotis, Normand, Pascal, Skarlatos, Dimitrios, Travlos, Anastasios, Kukli, Kaupo, Niinisto, Jaakko, Ritala, Mikko, Leskela, Markku

Journal:

MRS Proceedings

Year:

2015

Language:

english

File:

PDF, 4.24 MB

english, 2015

98

Selective etching of focused gallium ion beam implanted regions from silicon as a nanofabrication method

Han, Zhongmei, Vehkamäki, Marko, Mattinen, Miika, Salmi, Emma, Mizohata, Kenichiro, Leskelä, Markku, Ritala, Mikko

Journal:

Year:

2015

Language:

english

File:

PDF, 2.01 MB

english, 2015

99

Thermal treatment of phlogopite and muscovite with calcium and magnesium compounds

Aitta, Eero, Leskelä, Markku, Lajunen, Lauri H. J., Jyrkäs, Kauko, Seppälä, Erkki

Journal:

Journal of Chemical Technology & Biotechnology

Year:

2007

Language:

english

File:

PDF, 475 KB

english, 2007

100

Selective oxidation of uronic acids into aldaric acids over gold catalyst

Rautiainen, Sari, Lehtinen, Petra, Chen, Jingjing, Vehkamäki, Marko, Niemelä, Klaus, Leskelä, Markku, Repo, Timo

Journal:

Year:

2015

Language:

english

File:

PDF, 439 KB

english, 2015

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