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1

Etching of CoFeB Using CO∕NH[sub 3] in an Inductively Coupled Plasma Etching System

Park, Jong-Yoon, Kang, Se-Koo, Jeon, Min-Hwan, Jhon, Myung S., Yeom, Geun-Young

Journal:

Journal of The Electrochemical Society

Year:

2011

Language:

english

File:

PDF, 456 KB

english, 2011

2

Study of selective amorphous silicon etching to silicon nitride using a pin-to-plate dielectric barrier discharge in atmospheric pressure

Kyung, Se-Jin, Park, Jae-Beom, Lee, June-Hee, Lim, Jong-Tae, Yeom, Geun-Young

Journal:

Applied Physics Letters

Year:

2007

Language:

english

File:

PDF, 348 KB

english, 2007

3

Temperature Profile in the Presence of Hotspots in Heat Assisted Magnetic Recording

Kim, Hyung Min, Vemuri, Sesha Hari, Chung, Pil Seung, Jhon, Young In, Lee, Nae-Eung, Yeom, Geun-Young, Jhon, Myung S.

Journal:

IEEE Transactions on Magnetics

Year:

2012

Language:

english

File:

PDF, 456 KB

english, 2012

4

Perfluoropolyether Lubricant Interactions With Novel Overcoat via Coarse-Grained Molecular Dynamics

Vemuri, Sesha Hari, Chung, Pil Seung, Smith, Robert, Yeom, Geun-Young, Jhon, Young In, Lee, Nae-Eung, Biegler, Lorenz T., Jhon, Myung S.

Journal:

IEEE Transactions on Magnetics

Year:

2012

Language:

english

File:

PDF, 631 KB

english, 2012

5

A Special Issue on Nanotechnology in Korea 2018

Kang, Dae Joon, Yeom, Geun-Young, Min, Kyeong-Sik

Journal:

Journal of Nanoscience and Nanotechnology

Year:

2019

Language:

english

File:

PDF, 41 KB

english, 2019

6

Characteristic of carbon nanotubes synthesized by pin-to-plate type atmospheric pressure plasma enhanced chemical vapor deposition at low temperature

Yong-Hyuk Lee, Se-Jin Kyung, Chan-Woo Kim, Geun-Young Yeom

Journal:

Year:

2006

Language:

english

File:

PDF, 291 KB

english, 2006

7

Field emission properties of carbon nanotubes synthesized by capillary type atmospheric pressure plasma enhanced chemical vapor deposition at low temperature

Se-Jin Kyung, Yong-Hyuk Lee, Chan-woo Kim, June-Hee Lee, Geun-Young Yeom

Journal:

Year:

2006

Language:

english

File:

PDF, 376 KB

english, 2006

8

The effect of atmospheric pressure plasma treatment on the field emission characteristics of screen printed carbon nanotubes

Se-Jin Kyung, Jae-Beom Park, Maksym Voronko, June-Hee Lee, Geun-Young Yeom

Journal:

Year:

2007

Language:

english

File:

PDF, 1.12 MB

english, 2007

9

Improvement of electron field emission from carbon nanotubes by Ar neutral beam treatment

Se-Jin Kyung, Jae-Beom Park, Byung-Jae Park, June-Hee Lee, Geun-Young Yeom

Journal:

Year:

2008

Language:

english

File:

PDF, 585 KB

english, 2008

10

Growth of carbon nanotubes by atmospheric pressure plasma enhanced chemical vapor deposition using NiCr catalyst

Se-Jin Kyung, Maksym Voronko, Yong-Hyuk Lee, Chan-Woo Kim, June-Hee Lee, Geun-Young Yeom

Journal:

Surface and Coatings Technology

Year:

2007

Language:

english

File:

PDF, 688 KB

english, 2007

11

High-speed etching of amorphous silicon using pin-to-plate dielectric barrier discharge

Se-Jin Kyung, Jae-Beom Park, Yong-Hyuk Lee, June-Hee Lee, Geun-Young Yeom

Journal:

Surface and Coatings Technology

Year:

2007

Language:

english

File:

PDF, 426 KB

english, 2007

12

Effect of O2 plasma treatment on the properties of SiO2 aerogel film

Hong-Ryul Kim, Hyung-Ho Park, Sang-Hoon Hyun, Geun-Young Yeom

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 360 KB

english, 1998

13

A study of GaN etch mechanisms using inductively coupled Cl2/Ar plasmas

Hyeon-Soo Kim, Geun-Young Yeom, Jae-Won Lee, Tae-Il Kim

Journal:

Thin Solid Films

Year:

1999

Language:

english

File:

PDF, 370 KB

english, 1999

14

Investigation of surface polymerization on silicon exposed to C4F8 helicon wave plasmas

Weon-Jeong Lee, Hyeon-Soo Kim, Geun-Young Yeom, Jong-Tae Baek

Journal:

Thin Solid Films

Year:

1999

Language:

english

File:

PDF, 171 KB

english, 1999

15

Effect of CaO addition on the firing voltage of MgO films in AC plasma display panels

Jinhui Cho, Rakhwan Kim, Kyoung-Woo Lee, Geun-Young Yeom, Jung-Yeul Kim, Jong-Wan Park

Journal:

Thin Solid Films

Year:

1999

Language:

english

File:

PDF, 327 KB

english, 1999

16

The effects of surface terminal bonds and microstructure of SiO2 aerogel films on dry etching

Wang, Seok-Joo, Park, Hyung-Ho, Yeom, Geun-Young, Hyun, Sang-Hoon

Journal:

Applied Surface Science

Year:

2001

Language:

english

File:

PDF, 1.09 MB

english, 2001

17

Characteristics of magnetized inductively coupled plasma source for flat panel display applications

Young-Jun Lee, Hye-Rhee Han, Geun-Young Yeom

Journal:

Surface and Coatings Technology

Year:

2000

Language:

english

File:

PDF, 222 KB

english, 2000

18

Characteristics of He/O2 atmospheric pressure glow discharge and its dry etching properties of organic materials

Yong-Hyuk Lee, Chang-Heon Yi, Min-Jae Chung, Geun-Young Yeom

Journal:

Surface and Coatings Technology

Year:

2001

Language:

english

File:

PDF, 333 KB

english, 2001

19

Effects of inductively coupled plasma conditions on the etch properties of GaN and ohmic contact formations

Hyeon-Soo Kim, Yong-Hyuk Lee, Geun-Young Yeom, Jae-Won Lee, Tae-Il Kim

Journal:

Materials Science and Engineering: B

Year:

1997

Language:

english

File:

PDF, 263 KB

english, 1997

20

Fabrication of nano-crystalline silicon thin film at low temperature by using a neutral beam deposition method

Se-Koo Kang, Min-Hwan Jeon, Jong-Yoon Park, Hyoung-Cheol Lee, Byung-Jae Park, Je-Kwan Yeon, Geun-Young Yeom

Journal:

Journal of Crystal Growth

Year:

2010

Language:

english

File:

PDF, 406 KB

english, 2010

21

Characteristic of a dielectric barrier discharges using capillary dielectric and its application to photoresist etching

Chang-heon Yi, Yong-hyuk Lee, Dong Woo Kim, Geun-young Yeom

Journal:

Surface and Coatings Technology

Year:

2003

Language:

english

File:

PDF, 110 KB

english, 2003

22

Low-voltage characteristics of MgO-CaO films as a protective layer for AC plasma display panels by e-beam evaporation

Jinhui Cho, Rakhwan Kim, Kyoung-Woo Lee, Choongyong Son, Geun-Young Yeom, Hee Jae Kim, Jung-Yeul Kim, Jong-Wan Park

Journal:

Journal of Materials Science

Year:

1999

Language:

english

File:

PDF, 538 KB

english, 1999

23

A Two-Step-Recess Process Based on Atomic-Layer Etching for High-Performance p-HEMTs

Tae-Woo Kim, Dae-Hyun Kim, Sang-Duk Park, Seung Heon Shin, Seong June Jo, Ho-Jin Song, Young Min Park, Jeoun-Oun Bae, Young-Woon Kim, Geun-Young Yeom, Jae-Hyung Jang, Jong-In Song

Journal:

IEEE Transactions on Electron Devices

Year:

2008

Language:

english

File:

PDF, 1.30 MB

english, 2008

24

Refractive Sapphire Microlenses Fabricated by Chlorine-Based Inductively Coupled Plasma Etching

Park, Si-Hyun, Jeon, Heonsu, Sung, Youn-Joon, Yeom, Geun-Young

Journal:

Year:

2001

Language:

english

File:

PDF, 434 KB

english, 2001

25

Etch characteristics of SrBi2Ta2O9 (SBT) thin films using magnetized inductively coupled plasmas

Young-Joon Lee, Chang-Hyun Jeong, Jeong-Woon Bae, In-Kyu You, Jong-Wan Park, Geun-Young Yeom

Journal:

Thin Solid Films

Year:

2001

Language:

english

File:

PDF, 267 KB

english, 2001

26

Characteristics of Ag Etching using Inductively Coupled Cl 2 -based Plasmas

Lee, Young-Joon, Park, Sang-Duk, Song, Byoung-Kwan, Kim, Sang-Gab, Choe, Hee-Hwan, Hong, Moon-Pyo, Yeom, Geun-Young

Journal:

Japanese Journal of Applied Physics

Year:

2003

Language:

english

File:

PDF, 201 KB

english, 2003

27

[Japan Soc. Appl. Phys Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (11-13 July 2000)] Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387) - Effects of H/sub 2/ addition in magnetized inductively coupled C/sub 2/F/sub 6/ plasma etching of silica aerogel film

Seok-Joo Wang,, Hyung-Ho Park,, Sang-Hoon Hyun,, Geun-Young Yeom,

Year:

2000

Language:

english

File:

PDF, 191 KB

english, 2000

28

Particle-in-cell simulation of a neutral beam source for materials processing

Min Sup Hur,, Sung Jin Kim,, Ho Seung Lee,, Jae Koo Lee,, Geun-Young Yeom,

Journal:

IEEE Transactions on Plasma Science

Year:

2002

Language:

english

File:

PDF, 331 KB

english, 2002

29

Study on surface reaction of (Ba, Sr)TiO[sub 3] thin films by high density plasma etching

Kim, Seung-Bum, Kim, Chang-Il, Chang, Eui-Goo, Yeom, Geun-Young

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

1999

Language:

english

File:

PDF, 393 KB

english, 1999

30

Room-temperature GaN vertical-cavity surface-emitting laser operation in an extended cavity scheme

Park, Si-Hyun, Kim, Jaehoon, Jeon, Heonsu, Sakong, Tan, Lee, Sung-Nam, Chae, Suhee, Park, Y., Jeong, Chang-Hyun, Yeom, Geun-Young, Cho, Yong-Hoon

Journal:

Applied Physics Letters

Year:

2003

Language:

english

File:

PDF, 369 KB

english, 2003

31

Electrical characteristics of buried-Pt Schottky contacts on thin InP/InAlAs heterostructures

Shin, Seung Heon, Song, Jong-In, Jang, Jae-Hyung, Park, Sang-Duk, Bae, Jeong-Woon, Yeom, Geun-Young, Kim, Tae-Woo

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2011

Language:

english

File:

PDF, 755 KB

english, 2011

32

Etch Properties of Gallium Nitride Using Chemically Assisted Ion Beam Etching (CAIBE)

Lee, Weon-Jeong, Kim, Hyeon-Soo, Lee, Jae-Won, Kim, Tae-Il, Yeom, Geun-Young

Journal:

Japanese Journal of Applied Physics

Year:

1998

File:

PDF, 1.18 MB

1998

33

Thermal stability enhancement of Cu/WN/SiOF/Si multilayers by post-plasma treatment of fluorine-doped silicon dioxide

Lee, Seoghyeong, Kim, Dong Joon, Yang, Sung-Hoon, Park, Jeongwon, Sohn, Seil, Oh, Kyunghui, Kim, Yong-Tae, Kim, Jung-Yeul, Yeom, Geun-Young, Park, Jong-Wan

Journal:

Journal of Applied Physics

Year:

1999

Language:

english

File:

PDF, 507 KB

english, 1999

34

Etch Characteristics of Pt Using Cl[sub 2]/Ar/O[sub 2] Gas Mixtures

Kwon, Kwang-Ho, Kang, Seung-Youl, Yeom, Geun-Young, Hong, Nam-Kwan, Lee, Jin Ho

Journal:

Journal of The Electrochemical Society

Year:

2000

Language:

english

File:

PDF, 183 KB

english, 2000

35

Etching mechanism of (Ba, Sr)TiO[sub 3] films in high density Cl[sub 2]/BCl[sub 3]/Ar plasma

Kim, Seung-Bum, Lee, Yong-Hyuk, Kim, Tae-Hyung, Yeom, Geun-Young, Kim, Chang-Il

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2000

Language:

english

File:

PDF, 816 KB

english, 2000

36

Etching characteristics of SrBi[sub 2]Ta[sub 2]O[sub 9] film with Ar/CHF[sub 3] plasma

Seo, Jung-Woo, Lee, Do-Haing, Lee, Won-Jae, Yu, Byoung-Gon, Kwon, Kwang-Ho, Yeom, Geun-Young, Chang, Eui-Goo, Kim, Chang-Il

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2000

Language:

english

File:

PDF, 426 KB

english, 2000

37

Roles of N[sub 2] gas in etching of platinum by inductively coupled Ar/Cl[sub 2]/N[sub 2] plasmas

Ryu, Jae-Heung, Kim, Nam-Hoon, Kim, Hyeon-Soo, Yeom, Geun-Young, Chang, Eui-Goo, Kim, Chang-Il

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2000

Language:

english

File:

PDF, 391 KB

english, 2000

38

The Effect of N 2 Flow Rate in He/O 2 /N 2 on the Characteristics of Large Area Pin-to-Plate Dielectric Barrier Discharge

Lee, Yong-Hyuk, Kyung, Se-Jin, Jeong, Chang-Hyun, Yeom, Geun-Young

Journal:

Japanese Journal of Applied Physics

Year:

2005

Language:

english

File:

PDF, 174 KB

english, 2005

39

Erratum: “Effects of BCl[sub 3] addition on Ar/Cl[sub 2] gas in inductively coupled plasmas for lead zirconate titanate etching” [J. Vac. Sci. Technol. A 18, 1373 (2000)]

An, Tae-Hyun, Park, Joon-Yong, Yeom, Geun-Young, Chang, Eui-Goo, Kim, Chang-Il

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2000

Language:

english

File:

PDF, 318 KB

english, 2000

40

[IEEE 1997 Digest of the IEEE/LEOS Summer Topical Meeting: Vertical-Cavity Lasers/Technologies for a Global Information Infrastructure/WDM Components Technology/Advanced Semiconductor Lasers and Applications/Gallium Nitride Materials, Processing, and Devices (Cat. No.97TH8276) - Montreal, Que., Canada (11-15 Aug. 1997)] 1997 Digest of the IEEE/LEOS Summer Topical Meeting: Vertical-Cavity Lasers/Technologies for a Global Information Infrastructure/WDM Components Technology/Advanced Semiconductor Lasers and Applications/Gallium Nitride Materials, Processing, and Devices (C - A fabrication of GaN micro-lens

Taek Kim,, Jinseok Khim,, Soohee Chae,, Taeil Kim,, Hyeon-Soo Kim,, Young-Jun Lee,, Geun-Young Yeom,

Year:

1997

Language:

english

File:

PDF, 168 KB

english, 1997

41

Properties and Applications of a Modified Dielectric Barrier Discharge Generated at Atmospheric Pressure

Lee, Yong-Hyuk, Yeom, Geun-Young

Journal:

Japanese Journal of Applied Physics

Year:

2005

Language:

english

File:

PDF, 188 KB

english, 2005

42

Polysilicon Etchback Plasma Process Using HBr, Cl[sub 2], and SF[sub 6] Gas Mixtures for Deep-Trench Isolation

Yeom, Geun-Young

Journal:

Journal of The Electrochemical Society

Year:

1992

Language:

english

File:

PDF, 1.10 MB

english, 1992

43

A Study of Electrical Damage to a-Si:H Thin Film Transistor during Plasma Ashing by a Pin-to-Plate Type Atmospheric Pressure Plasma

Lee, Yong-Hyuk, Kyung, Se-Jin, Lim, Jong-Hyuk, Yeom, Geun-Young

Journal:

Japanese Journal of Applied Physics

Year:

2005

Language:

english

File:

PDF, 130 KB

english, 2005

44

Etch Damage of Ge$_{2}$Sb$_{2}$Te$_{5}$ for Different Halogen Gases

Kang, Se-Koo, Jeon, Min-Hwan, Park, Jong-Yoon, Jhon, Myung S., Yeom, Geun-Young

Journal:

Japanese Journal of Applied Physics

Year:

2011

Language:

english

File:

PDF, 655 KB

english, 2011

45

Preface of ENGE 2014 Special Issue

Park, Byungwoo, Yeom, Geun-Young

Journal:

Current Applied Physics

Year:

2015

Language:

english

File:

PDF, 131 KB

english, 2015

46

Atomistic simulation method in head-disk interface of magnetic data storage systems

Smith, Robert L., Chung, Pil Seung, Hari Vemuri, Sesha, Yeom, Geun-Young, Biegler, Lorenz T., Jhon, Myung S.

Journal:

Journal of Applied Physics

Year:

2012

Language:

english

File:

PDF, 301 KB

english, 2012

47

Effects of H 2 Addition in Magnetized Inductively Coupled C 2 F 6 Plasma Etching of Silica Aerogel Film

Wang, Seok-Joo, Park, Hyung-Ho, Yeom, Geun-Young

Journal:

Japanese Journal of Applied Physics

Year:

2000

Language:

english

File:

PDF, 538 KB

english, 2000

48

Ferroelectric Tunnel Junction for Dense Cross-Point Arrays

Lee, Hong-Sub, Han, Wooje, Chung, Hee-Yoon, Rozenberg, Marcelo, Kim, Kangsik, Lee, Zonghoon, Yeom, Geun-Young, Park, Hyung-Ho

Journal:

ACS Applied Materials & Interfaces

Year:

2015

Language:

english

File:

PDF, 2.09 MB

english, 2015

49

Nanometer-Scale Fabrication of Hydrogen Silsesquioxane (HSQ) Films with Post Exposure Baking

Kim, Dong-Hyun, Kang, Se-Koo, Yeom, Geun-Young, Jang, Jae-Hyung

Journal:

Journal of Nanoscience and Nanotechnology

Year:

2013

Language:

english

File:

PDF, 344 KB

english, 2013

50

Dry Etching Damage Effect on Ohmic Characteristics of GaN

Khim, Jin Seok, Kim, Taek, Chae, Su Hee, Kim, Tae Il, Kim, Hyon-Soo, Yeom, Geun-Young

Journal:

MRS Proceedings

Year:

1998

Language:

english

File:

PDF, 323 KB

english, 1998

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